Patent | Date |
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Supercritical drying apparatus and method of drying substrate using the same Grant 11,302,526 - Park , et al. April 12, 2 | 2022-04-12 |
Substrate Processing Apparatus And Apparatus For Manufacturing Integrated Circuit Device App 20210217635 - Kim; Young-hoo ;   et al. | 2021-07-15 |
Substrate processing apparatus and apparatus for manufacturing integrated circuit device Grant 10,985,036 - Kim , et al. April 20, 2 | 2021-04-20 |
Process chamber for a supercritical process and apparatus for treating substrates having the same Grant 10,818,522 - Park , et al. October 27, 2 | 2020-10-27 |
Supercritical Drying Apparatus And Method Of Drying Substrate Using The Same App 20200227253 - PARK; Sangjine ;   et al. | 2020-07-16 |
Process Chamber For A Supercritical Process And Apparatus For Treating Substrates Having The Same App 20190096712 - PARK; Sang-Jine ;   et al. | 2019-03-28 |
Methods of forming semiconductor devices including trench walls having multiple slopes Grant 10,192,973 - Park , et al. Ja | 2019-01-29 |
Planarized interlayer dielectric with air gap isolation Grant 10,186,485 - Nguyen , et al. Ja | 2019-01-22 |
Substrate Processing Apparatus and Apparatus for Manufacturing Integrated Circuit Device App 20180358242 - Kim; Young-hoo ;   et al. | 2018-12-13 |
Planarized Interlayer Dielectric With Air Gap Isolation App 20180174977 - Nguyen; VietHa ;   et al. | 2018-06-21 |
Semiconductor device and method of manufacturing the same Grant 9,984,921 - Ahn , et al. May 29, 2 | 2018-05-29 |
Planarized interlayer dielectric with air gap isolation Grant 9,929,099 - Nguyen , et al. March 27, 2 | 2018-03-27 |
Semiconductor Device And Method Of Manufacturing The Same App 20180053685 - AHN; Sang Hoon ;   et al. | 2018-02-22 |
Semiconductor device and method of manufacturing the same Grant 9,812,353 - Ahn , et al. November 7, 2 | 2017-11-07 |
Planarized Interlayer Dielectric With Air Gap Isolation App 20170170184 - Nguyen; VietHa ;   et al. | 2017-06-15 |
Semiconductor Device And Method Of Manufacturing The Same App 20170162431 - AHN; Sang Hoon ;   et al. | 2017-06-08 |
Methods Of Forming Semiconductor Devices Including Trench Walls Having Multiple Slopes App 20160359017 - PARK; Sang-Jine ;   et al. | 2016-12-08 |
Pouch Container App 20160318684 - Jo; Byung-chul ;   et al. | 2016-11-03 |
Semiconductor devices including trench walls having multiple slopes Grant 9,443,979 - Park , et al. September 13, 2 | 2016-09-13 |
Standing pouch Grant 9,334,087 - Cho , et al. May 10, 2 | 2016-05-10 |
Vertical Pouch App 20150336731 - JO; Byung-chul ;   et al. | 2015-11-26 |
Semiconductor device having dual metal silicide layers and method of manufacturing the same Grant 9,117,692 - Park , et al. August 25, 2 | 2015-08-25 |
Semiconductor Devices Including Trench Walls Having Multiple Slopes App 20150187946 - PARK; Sang-Jine ;   et al. | 2015-07-02 |
Semiconductor device and method of fabricating the same Grant 9,040,415 - Park , et al. May 26, 2 | 2015-05-26 |
Semiconductor Device And Method Of Fabricating The Same App 20150050793 - PARK; Sang-Jine ;   et al. | 2015-02-19 |
Methods of fabricating a semiconductor device including metal gate electrodes Grant 8,946,026 - Choi , et al. February 3, 2 | 2015-02-03 |
Semiconductor Device Having Dual Metal Silicide Layers And Method Of Manufacturing The Same App 20150028423 - Park; Sangjine ;   et al. | 2015-01-29 |
Semiconductor device having dual metal silicide layers and method of manufacturing the same Grant 8,889,552 - Park , et al. November 18, 2 | 2014-11-18 |
Semiconductor Device Having Dual Metal Silicide Layers And Method Of Manufacturing The Same App 20140248761 - Park; Sangjine ;   et al. | 2014-09-04 |
Semiconductor devices including compressive stress patterns and methods of fabricating the same Grant 8,735,239 - Park , et al. May 27, 2 | 2014-05-27 |
Spout cap Grant D705,061 - Jo , et al. May 20, 2 | 2014-05-20 |
Spout cap Grant D705,062 - Jo , et al. May 20, 2 | 2014-05-20 |
Pouch And Method For Manufacturing Same App 20140102436 - Jo; Byung-chul ;   et al. | 2014-04-17 |
Methods Of Fabricating A Semiconductor Device Including Metal Gate Electrodes App 20120129331 - Choi; Sukhun ;   et al. | 2012-05-24 |
Semiconductor Devices Including Compressive Stress Patterns and Methods of Fabricating the Same App 20120094459 - Park; Sanjine ;   et al. | 2012-04-19 |
Semiconductor Integrated Circuit Device Including an Epitaxial Layer App 20120049250 - Park; Sang-Jine ;   et al. | 2012-03-01 |
Standing Pouch App 20110188787 - CHO; Byoung-Chol ;   et al. | 2011-08-04 |