loadpatents
Patent applications and USPTO patent grants for CHO; Byoung Ha.The latest application filed is for "gas sprayer for substrate treatment device, and substrate".
Patent | Date |
---|---|
Gas Sprayer For Substrate Treatment Device, And Substrate App 20190333743 - YOON; Ho Bin ;   et al. | 2019-10-31 |
Apparatus For Treating Substrate And Method For Treating Substrate App 20190161861 - KWAK; Jae Chan ;   et al. | 2019-05-30 |
Apparatus for treating substrate and method for treating substrate Grant 10,233,542 - Kwak , et al. | 2019-03-19 |
Substrate Processing Apparatus App 20190035607 - KIM; Se Young ;   et al. | 2019-01-31 |
Capacitor Deposition Apparatus And Deposition Method Of Dielectric Film Using Same App 20180226468 - SEO; Dong Won ;   et al. | 2018-08-09 |
Apparatus And Method For Processing Substrate App 20180130674 - HAN; Tae Seong ;   et al. | 2018-05-10 |
Substrate Processing Apparatus App 20160153086 - KWAK; Jae Chan ;   et al. | 2016-06-02 |
Apparatus For Treating Substrate And Method For Treating Substrate App 20150337441 - KWAK; Jae Chan ;   et al. | 2015-11-26 |
Cleaning Method Of Process Chamber App 20140166049 - KANG; SUNG-CHUL ;   et al. | 2014-06-19 |
Thin Film Deposition System and Method for Depositing Thin Film App 20110143035 - CHO; Byoung Ha ;   et al. | 2011-06-16 |
Cleaning Method Of Process Chamber App 20110114130 - KANG; SUNG-CHUL ;   et al. | 2011-05-19 |
Method for manufacturing semiconductor device Grant 7,435,445 - Shin , et al. October 14, 2 | 2008-10-14 |
Method for manufacturing semiconductor device App 20060177579 - Shin; Cheol Ho ;   et al. | 2006-08-10 |
Method for atomic layer deposition (ALD) of silicon oxide film Grant 7,077,904 - Cho , et al. July 18, 2 | 2006-07-18 |
Method for atomic layer deposition (ALD) of silicon oxide film App 20060090694 - Cho; Byoung Ha ;   et al. | 2006-05-04 |
ALD apparatus and ALD method for manufacturing semiconductor device App 20040082171 - Shin, Cheol Ho ;   et al. | 2004-04-29 |
Method for atomic layer deposition (ALD) of silicon oxide film App 20030203113 - Cho, Byoung Ha ;   et al. | 2003-10-30 |
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