Chiu; Yih-Song

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chiu; Yih-Song.The latest application filed is for "system and method for an etch process with silicon concentration control".

Company Profile

0.4.6

Chiu; Yih-Song - Hsin-chu TW
CHIU; Yih Song - Hsinchu TW
Chiu; Yih-Song - Tainan TW
CHIU, YIH-SONG - CHU-DANG CITY TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for an etch process with silicon concentration control Grant 9,887,095 - Chang , et al. February 6, 2	2018-02-06
System and Method for an Etch Process with Silicon Concentration Control App 20140273303 - Chang; Fu-Yi ; et al.	2014-09-18
Feature dimension measurement Grant 8,049,213 - Su , et al. November 1, 2	2011-11-01
Process For Stripping Photoresist And Removing Dielectric Liner App 20100240220 - CHIU; Yi-Wei ; et al.	2010-09-23
Feature Dimension Measurement App 20090152545 - Su; Ching-Chung ; et al.	2009-06-18
Feed forward spacer width control in semiconductor manufacturing Grant 7,064,085 - Chiu , et al. June 20, 2	2006-06-20
Feed forward spacer width control in semiconductor manufacturing App 20060019479 - Chiu; Yih-Song ; et al.	2006-01-26
Method of forming an STI feature to avoid electrical charge leakage Grant 6,972,241 - Chiu , et al. December 6, 2	2005-12-06
Method of forming an STI feature to avoid electrical charge leakage App 20050158964 - Chiu, Yih Song ; et al.	2005-07-21
Method For Providing Improved Step Coverage Of Deep Trenches And Use Thereof App 20010051408 - CHIU, YIH-SONG	2001-12-13

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