| Patent | Date |
|---|
Electrically And Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
App 20220259719 - ABRAHAM; Bassam Hanna ; et al. | 2022-08-18 |
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films
App 20220195585 - Abraham; Bassam Hanna ; et al. | 2022-06-23 |
Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source
Grant 11,359,274 - Abraham , et al. June 14, 2 | 2022-06-14 |
Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
Grant 11,306,391 - Abraham , et al. April 19, 2 | 2022-04-19 |
Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
Grant 11,286,555 - Abraham , et al. March 29, 2 | 2022-03-29 |
Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source
Grant 11,255,012 - Abraham , et al. February 22, 2 | 2022-02-22 |
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films
App 20210115552 - Abraham; Bassam Hanna ; et al. | 2021-04-22 |
Magnetically Enhanced Low Temperature-High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films
App 20210102284 - Abraham; Bassam Hanna ; et al. | 2021-04-08 |
Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
Grant 10,957,519 - Chistyakov , et al. March 23, 2 | 2021-03-23 |
Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
Grant 10,913,998 - Chistyakov , et al. February 9, 2 | 2021-02-09 |
Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films
Grant 10,900,118 - Abraham , et al. January 26, 2 | 2021-01-26 |
High-power Resonance Pulse Ac Hedp Sputtering Source And Method For Material Processing
App 20200176234 - Abraham; Bassam Hanna ; et al. | 2020-06-04 |
Apparatus For Generating High-current Electrical Discharges
App 20190368030 - CHISTYAKOV; Roman | 2019-12-05 |
Capacitive coupled plasma source for sputtering and resputtering
Grant 10,480,063 - Chistyakov , et al. Nov | 2019-11-19 |
Electrically And Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
App 20190316249 - ABRAHAM; Bassam Hanna ; et al. | 2019-10-17 |
Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
App 20190271070 - Abraham; Bassam Hanna ; et al. | 2019-09-05 |
Magnetically Enhanced High Density Plasma-chemical Vapor Deposition Plasma Source For Depositing Diamond And Diamond-like Films
App 20190256969 - CHISTYAKOV; Roman ; et al. | 2019-08-22 |
Magnetically Enhanced Low Temperature-high Density Plasma-chemical Vapor Deposition Plasma Source For Depositing Diamond And Dia
App 20190249293 - ABRAHAM; Bassam Hanna ; et al. | 2019-08-15 |
Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films
Grant 10,227,691 - Abraham , et al. | 2019-03-12 |
Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
Grant 10,227,692 - Chistyakov , et al. | 2019-03-12 |
Magnetically Enhanced High Density Plasma-chemical Vapor Deposition Plasma Source For Depositing Diamond And Diamond-like Films
App 20180374688 - Chistyakov; Roman ; et al. | 2018-12-27 |
Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
App 20180374689 - ABRAHAM; Bassam Hanna ; et al. | 2018-12-27 |
Magnetically Enhanced High Density Plasma-chemical Vapor Deposition Plasma Source For Depositing Diamond And Diamond-like Films
App 20180195164 - Chistyakov; Roman ; et al. | 2018-07-12 |
Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films
Grant 9,951,414 - Chistyakov , et al. April 24, 2 | 2018-04-24 |
Apparatus And Method For Sputtering Hard Coatings
App 20180044780 - Chistyakov; Roman ; et al. | 2018-02-15 |
Method of ionized physical vapor desposition sputter coating high aspect-ratio structures
Grant 9,771,648 - Chistyakov , et al. September 26, 2 | 2017-09-26 |
Capacitive Coupled Plasma Source for Sputtering and Resputtering
App 20170178912 - Chistyakov; Roman ; et al. | 2017-06-22 |
Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
App 20170178878 - Abraham; Bassam Hanna ; et al. | 2017-06-22 |
Magnetically Enhanced High Density Plasma-chemical Vapor Deposition Plasma Source For Depositing Diamond And Diamond-like Films
App 20170175253 - Chistyakov; Roman ; et al. | 2017-06-22 |
Magnetically Enhanced Low Temperature-high Density Plasma-chemical Vapor Deposition Plasma Source For Depositing Diamond And Diamond Like Films
App 20170175248 - Abraham; Bassam Hanna ; et al. | 2017-06-22 |
High Power Pulse Ionized Physical Vapor Deposition
App 20170029936 - Chistyakov; Roman | 2017-02-02 |
Method Of Coating High Aspect Ratio Features
App 20170029937 - Chistyakov; Roman ; et al. | 2017-02-02 |
Apparatus And Method For Sputtering Hard Coatings
App 20150315697 - Chistyakov; Roman ; et al. | 2015-11-05 |
Apparatus for Generating High-Current Electrical Discharges
App 20150315698 - Chistyakov; Roman | 2015-11-05 |
Apparatus and method for sputtering hard coatings
Grant 9,123,508 - Chistyakov , et al. September 1, 2 | 2015-09-01 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities
App 20140238844 - Chistyakov; Roman | 2014-08-28 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
Grant 8,125,155 - Chistyakov February 28, 2 | 2012-02-28 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities
App 20110133651 - Chistyakov; Roman ; et al. | 2011-06-09 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
Grant 7,898,183 - Chistyakov , et al. March 1, 2 | 2011-03-01 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities
App 20110019332 - Chistyakov; Roman | 2011-01-27 |
High Power Pulse Ionized Physical Vapor Deposition
App 20100326815 - Chistyakov; Roman | 2010-12-30 |
High Power Pulse Magnetron Sputtering For High Aspect-Ratio Features, Vias, and Trenches
App 20100270144 - Chistyakov; Roman | 2010-10-28 |
High deposition rate sputtering
Grant 7,811,421 - Chistyakov October 12, 2 | 2010-10-12 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
Grant 7,808,184 - Chistyakov October 5, 2 | 2010-10-05 |
High density plasma source
Grant 7,750,575 - Chistyakov July 6, 2 | 2010-07-06 |
Methods and Apparatus for Generating Strongly-Ionized Plasmas with Ionizational Instabilities
App 20100101935 - Chistyakov; Roman ; et al. | 2010-04-29 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
Grant 7,663,319 - Chistyakov , et al. February 16, 2 | 2010-02-16 |
Method of Hard Coating a Blade
App 20090321249 - Chistyakov; Roman ; et al. | 2009-12-31 |
Methods and apparatus for generating high-density plasma
Grant 7,604,716 - Chistyakov October 20, 2 | 2009-10-20 |
High Density Plasma Source
App 20090032191 - Chistyakov; Roman | 2009-02-05 |
High-density plasma source
Grant 7,446,479 - Chistyakov November 4, 2 | 2008-11-04 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
Grant 7,345,429 - Chistyakov March 18, 2 | 2008-03-18 |
Methods And Apparatus For Generating Strongly-ionized Plasmas With Ionizational Instabilities
App 20070188104 - Chistyakov; Roman ; et al. | 2007-08-16 |
Plasma Source With Segmented Magnetron
App 20070181417 - Chistyakov; Roman ; et al. | 2007-08-09 |
High-Power Pulsed Magnetron Sputtering
App 20070119701 - Chistyakov; Roman | 2007-05-31 |
High-density plasma source
App 20070034497 - Chistyakov; Roman | 2007-02-15 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities
App 20060279223 - Chistyakov; Roman | 2006-12-14 |
High-power pulsed magnetron sputtering
Grant 7,147,759 - Chistyakov December 12, 2 | 2006-12-12 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
Grant 7,095,179 - Chistyakov August 22, 2 | 2006-08-22 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
App 20060175197 - Chistyakov; Roman | 2006-08-10 |
Apparatus For Generating High Current Electrical Discharges
App 20060066248 - Chistyakov; Roman | 2006-03-30 |
High deposition rate sputtering
App 20050252763 - Chistyakov, Roman | 2005-11-17 |
Generation of uniformly-distributed plasma
App 20050211543 - Chistyakov, Roman | 2005-09-29 |
Methods and Apparatus for Generating Strongly-Ionized Plasmas with Ionizational Instabilities
App 20050184669 - Chistyakov, Roman | 2005-08-25 |
High deposition rate sputtering
App 20050178654 - Chistyakov, Roman | 2005-08-18 |
High-power pulsed magnetically enhanced plasma processing
App 20050167263 - Chistyakov, Roman | 2005-08-04 |
Generation of uniformly-distributed plasma
Grant 6,903,511 - Chistyakov June 7, 2 | 2005-06-07 |
High-power pulsed magnetically enhanced plasma processing
Grant 6,896,775 - Chistyakov May 24, 2 | 2005-05-24 |
High deposition rate sputtering
Grant 6,896,773 - Chistyakov May 24, 2 | 2005-05-24 |
Plasma Source With Segmented Magnetron Cathode
App 20050103620 - Chistyakov, Roman | 2005-05-19 |
Plasma generation using multi-step ionization
App 20050034666 - Chistyakov, Roman | 2005-02-17 |
Methods and apparatus for generating high-density plasma
Grant 6,853,142 - Chistyakov February 8, 2 | 2005-02-08 |
Methods and apparatus for generating high-density plasma
App 20050006220 - Chistyakov, Roman | 2005-01-13 |
Generation of Uniformly-Distributed Plasma
App 20040222745 - Chistyakov, Roman | 2004-11-11 |
High-density Plasma Source
App 20040212311 - Chistyakov, Roman | 2004-10-28 |
High-density Plasma Source Using Excited Atoms
App 20040212312 - Chistyakov, Roman | 2004-10-28 |
High-density plasma source using excited atoms
Grant 6,806,652 - Chistyakov October 19, 2 | 2004-10-19 |
High-density plasma source
Grant 6,806,651 - Chistyakov October 19, 2 | 2004-10-19 |
Plasma generation using multi-step ionization
Grant 6,805,779 - Chistyakov October 19, 2 | 2004-10-19 |
Plasma Generation Using Multi-step Ionization
App 20040182702 - Chistyakov, Roman | 2004-09-23 |
High deposition rate sputtering
App 20040094411 - Chistyakov, Roman | 2004-05-20 |
Methods and apparatus for generating high-density plasma
App 20040085023 - Chistyakov, Roman | 2004-05-06 |
High-power pulsed magnetically enhanced plasma processing
App 20040082187 - Chistyakov, Roman | 2004-04-29 |
High-power pulsed magnetron sputtering
App 20040060813 - Chistyakov, Roman | 2004-04-01 |
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