loadpatents
Patent applications and USPTO patent grants for Chin; Chih-Cheng.The latest application filed is for "holographic reticle and patterning method".
Patent | Date |
---|---|
Holographic reticle and patterning method Grant 7,722,997 - Chang , et al. May 25, 2 | 2010-05-25 |
Method and apparatus for compensated illumination for advanced lithography Grant 7,697,114 - Chang , et al. April 13, 2 | 2010-04-13 |
Method for compensating critical dimension variations in photomasks Grant 7,651,824 - Chen , et al. January 26, 2 | 2010-01-26 |
System and method for examining mask pattern fidelity Grant 7,383,530 - Wang , et al. June 3, 2 | 2008-06-03 |
Holographic Reticle and Patterning Method App 20080113279 - Chang; Shih-Ming ;   et al. | 2008-05-15 |
Etching bias reduction Grant 7,316,872 - Chang , et al. January 8, 2 | 2008-01-08 |
Holographic reticle and patterning method Grant 7,312,021 - Chang , et al. December 25, 2 | 2007-12-25 |
Method And Apparatus For Compensated Illumination For Advanced Lithography App 20070291244 - CHANG; Shih-Ming ;   et al. | 2007-12-20 |
System and method for examining mask pattern fidelity App 20070250805 - Wang; Wen-Chuan ;   et al. | 2007-10-25 |
Etching bias reduction App 20070087571 - Chang; Shih-Ming ;   et al. | 2007-04-19 |
Defect repair method employing non-defective pattern overlay and photoexposure Grant 7,005,219 - Chin , et al. February 28, 2 | 2006-02-28 |
Pattern compensation for stitching Grant 6,982,135 - Chang , et al. January 3, 2 | 2006-01-03 |
Holographic reticle and patterning method App 20050147895 - Chang, Shih-Ming ;   et al. | 2005-07-07 |
Multiple-exposure defect elimination App 20040265704 - Chang, Shih-Ming ;   et al. | 2004-12-30 |
Defect repair method employing non-defective pattern overlay and photoexposure App 20040224238 - Chin, Chih-Cheng ;   et al. | 2004-11-11 |
System and method for examining mask pattern fidelity App 20040225488 - Wang, Wen-Chuan ;   et al. | 2004-11-11 |
Pattern compensation for stitching App 20040191643 - Chang, Chung-Hsing ;   et al. | 2004-09-30 |
Dual-focused ion beams for semiconductor image scanning and mask repair Grant 6,653,029 - Lin , et al. November 25, 2 | 2003-11-25 |
Dual-focused ion beams for semiconductor image scanning and mask repair App 20030031961 - Lin, Chuan-Yuan ;   et al. | 2003-02-13 |
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