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Graphene Deposition App 20110303899 - Padhi; Deenesh ;   et al. | 2011-12-15 |
Integration Process Of Tungsten Atomic Layer Deposition For Metallization Application App 20070099415 - Chen; Ling ;   et al. | 2007-05-03 |
Method and apparatus for forming improved metal interconnects Grant 6,992,012 - Hashim , et al. January 31, 2 | 2006-01-31 |
Integrated deposition process for copper metallization Grant 6,881,673 - Ding , et al. April 19, 2 | 2005-04-19 |
Barrier layer for electroplating processes App 20050031784 - Ding, Peijun ;   et al. | 2005-02-10 |
Barrier layer for electroplating processes Grant 6,790,776 - Ding , et al. September 14, 2 | 2004-09-14 |
Method and apparatus for forming improved metal interconnects App 20040152301 - Hashim, Imran ;   et al. | 2004-08-05 |
Method and apparatus for forming improved metal interconnects Grant 6,709,987 - Hashim , et al. March 23, 2 | 2004-03-23 |
Integrated deposition process for copper metallization App 20030194863 - Ding, Peijun ;   et al. | 2003-10-16 |
Nitrogen analogs of copper II .beta.-diketonates as source reagents for semiconductor processing Grant 6,620,956 - Chen , et al. September 16, 2 | 2003-09-16 |
Integration of ALD tantalum nitride and alpha-phase tantalum for copper metallization application App 20030124262 - Chen, Ling ;   et al. | 2003-07-03 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering App 20030116427 - Ding, Peijun ;   et al. | 2003-06-26 |
Nitrogen analogs of copper II beta-diketonates as source reagents for semiconductor processing App 20030097013 - Chen, Ling ;   et al. | 2003-05-22 |
Integrated deposition process for copper metallization Grant 6,566,259 - Ding , et al. May 20, 2 | 2003-05-20 |
Method and apparatus for forming improved metal interconnects Grant 6,559,061 - Hashim , et al. May 6, 2 | 2003-05-06 |
Pressure modulation method to obtain improved step coverage of seed layer App 20030066747 - Sundarrajan, Arvind ;   et al. | 2003-04-10 |
Method for achieving copper fill of high aspect ratio interconnect features App 20030000844 - Carl, Daniel A. ;   et al. | 2003-01-02 |
Integrated barrier layer structure for copper contact level metallization App 20020192948 - Chen, Fusen ;   et al. | 2002-12-19 |
Methods Of Producing Ultra -low Resistivity Tantalum Films. App 20020162738 - Chiang, Tony ;   et al. | 2002-11-07 |
Integrated barrier layer structure for copper contact level metallization App 20020132473 - Chiang, Tony ;   et al. | 2002-09-19 |
Method and apparatus for forming improved metal interconnects App 20020115287 - Hashim, Imran ;   et al. | 2002-08-22 |
Method for achieving copper fill of high aspect ratio interconnect features Grant 6,436,267 - Carl , et al. August 20, 2 | 2002-08-20 |
Barrier layer for electroplating processes App 20020092772 - Ding, Peijun ;   et al. | 2002-07-18 |
Processes to improve electroplating fill Grant 6,399,479 - Chen , et al. June 4, 2 | 2002-06-04 |
Copper alloy seed layer for copper metallization Grant 6,387,805 - Ding , et al. May 14, 2 | 2002-05-14 |
Method and apparatus for forming improved metal interconnects App 20020028576 - Hashim, Imran ;   et al. | 2002-03-07 |
Method And Apparatus For Physical Vapor Deposition Using Modulated Power App 20010050220 - CHIANG, TONY ;   et al. | 2001-12-13 |
Barrier layer for electroplating processes Grant 6,328,871 - Ding , et al. December 11, 2 | 2001-12-11 |
Ionized metal plasma Ta, TaNx, W, and WNx liners for gate electrode applications Grant 6,313,033 - Chiang , et al. November 6, 2 | 2001-11-06 |
Copper Alloy Seed Layer For Copper Metallization App 20010034126 - DING, PEIJUN ;   et al. | 2001-10-25 |
Method and apparatus for forming improved metal interconnects Grant 6,287,977 - Hashim , et al. September 11, 2 | 2001-09-11 |
Ultra-low resistivity tantalum films and methods for their deposition App 20010018137 - Chiang, Tony ;   et al. | 2001-08-30 |
Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance Grant 6,235,163 - Angelo , et al. May 22, 2 | 2001-05-22 |
IMP technology with heavy gas sputtering Grant 6,200,433 - Ding , et al. March 13, 2 | 2001-03-13 |
Integrated deposition process for copper metallization Grant 6,174,811 - Ding , et al. January 16, 2 | 2001-01-16 |
Copper alloy via structure Grant 6,160,315 - Chiang , et al. December 12, 2 | 2000-12-12 |
High pressure copper fill at low temperature Grant 6,140,235 - Yao , et al. October 31, 2 | 2000-10-31 |
Copper alloy seed layer for copper metallization in an integrated circuit Grant 6,066,892 - Ding , et al. May 23, 2 | 2000-05-23 |
Sputter deposition and annealing of copper alloy metallization Grant 6,037,257 - Chiang , et al. March 14, 2 | 2000-03-14 |