Chilese; Frank

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chilese; Frank.The latest application filed is for "laser produced plasma light source having a target material coated on a cylindrically-symmetric element".

Company Profile

4.19.21

Chilese; Frank - San Ramon CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Grant 11,419,202 - Kuritsyn , et al. August 16, 2	2022-08-16
Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element App 20210136903 - Kuritsyn; Alexey ; et al.	2021-05-06
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Grant 10,893,599 - Kuritsyn , et al. January 12, 2	2021-01-12
Multi-column spacing for photomask and reticle inspection and wafer print check verification Grant 10,777,377 - Haynes , et al. September 15, 2	2020-09-15
Array-based characterization tool Grant 10,438,769 - Lipkind , et al. O	2019-10-08
Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element App 20190075641 - Kuritsyn; Alexey ; et al.	2019-03-07
Multi-Column Spacing for Photomask and Reticle Inspection and Wafer Print Check Verification App 20180233318 - Haynes; Robert ; et al.	2018-08-16
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Grant 10,021,773 - Kuritsyn , et al. July 10, 2	2018-07-10
System and method for cleaning EUV optical elements Grant 9,810,991 - Chilese , et al. November 7, 2	2017-11-07
Particle and chemical control using tunnel flow Grant 9,759,912 - Chilese , et al. September 12, 2	2017-09-12
Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element App 20170142817 - Kuritsyn; Alexey ; et al.	2017-05-18
System and method for generation of extreme ultraviolet light Grant 9,544,984 - Bykanov , et al. January 10, 2	2017-01-10
Segmented mirror apparatus for imaging and method of using the same Grant 9,448,343 - Kvamme , et al. September 20, 2	2016-09-20
Spectral purity filter and light monitor for an EUV reticle inspection system Grant 9,348,214 - Wang , et al. May 24, 2	2016-05-24
Particle control near reticle and optics using showerhead Grant 9,244,368 - Delgado , et al. January 26, 2	2016-01-26
Temperature control in EUV reticle inspection tool Grant 9,164,388 - Chilese , et al. October 20, 2	2015-10-20
System and Method for Cleaning EUV Optical Elements App 20150253675 - Chilese; Frank ; et al.	2015-09-10
System and Method for Generation of Extreme Ultraviolet Light App 20150076359 - Bykanov; Alexander ; et al.	2015-03-19
Multiplexing EUV sources in reticle inspection Grant 8,917,432 - Wack , et al. December 23, 2	2014-12-23
Segmented Mirror Apparatus For Imaging And Method Of Using The Same App 20140264051 - Kvamme; Damon ; et al.	2014-09-18
Methods And Apparatus For Use With Extreme Ultraviolet Light Having Contamination Protection App 20140231659 - Chilese; Frank ; et al.	2014-08-21
Spectral Purity Filter And Light Monitor For An Euv Actinic Reticle Inspection System App 20140217298 - Wang; Daimian ; et al.	2014-08-07
Methods Of Using Polished Silicon Wafer Strips For Euv Homogenizer App 20140151580 - Wang; Daimian ; et al.	2014-06-05
Particle And Chemical Control Using Tunnel Flow App 20140085724 - Chilese; Frank ; et al.	2014-03-27
Particle Control Near Reticle And Optics Using Showerhead App 20140085618 - Delgado; Gildardo R. ; et al.	2014-03-27
Multiplexing Euv Sources In Reticle Inspection App 20140036333 - Wack; Daniel ; et al.	2014-02-06
Indexing Optics For An Actinic Extreme Ultra-violet (euv) Reticle Inspection Tool App 20130271827 - Delgado; Gildardo ; et al.	2013-10-17
Smart Memory Alloys For An Extreme Ultra-violet (euv) Reticle Inspection Tool App 20130270461 - Delgado; Gildardo ; et al.	2013-10-17
Temperature Control In Euv Reticle Inspection Tool App 20130265557 - Chilese; Frank ; et al.	2013-10-10
System and Method for Particle Control Near A Reticle App 20130235357 - Delgado; Gildardo ; et al.	2013-09-12
Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping Grant 8,414,688 - Delgado , et al. April 9, 2	2013-04-09
Apparatus and method for maintaining uniform and stable temperature for cavity enhanced optical spectroscopy Grant 7,050,170 - Chilese , et al. May 23, 2	2006-05-23
Apparatus and method for maintaining uniform and stable temperature for cavity enhanced optical spectroscopy App 20050018193 - Chilese, Frank ; et al.	2005-01-27

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