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Patent applications and USPTO patent grants for Chien; Ying-Hsueh Chang.The latest application filed is for "gigasonic cleaning techniques".
Patent | Date |
---|---|
Gigasonic cleaning techniques Grant 10,512,946 - Chien , et al. Dec | 2019-12-24 |
Fine temperature controllable wafer heating system Grant 10,020,209 - Chien , et al. July 10, 2 | 2018-07-10 |
Gigasonic Cleaning Techniques App 20170066021 - Chien; Ying-Hsueh Chang ;   et al. | 2017-03-09 |
Fine Temperature Controllable Wafer Heating System App 20160268147 - Chien; Ying-Hsueh Chang ;   et al. | 2016-09-15 |
Fine temperature controllable wafer heating system Grant 9,349,623 - Chien , et al. May 24, 2 | 2016-05-24 |
Semiconductor device cleaning method and apparatus Grant 9,299,593 - Yeh , et al. March 29, 2 | 2016-03-29 |
Apparatus and methods for movable megasonic wafer probe Grant 8,926,762 - Chien , et al. January 6, 2 | 2015-01-06 |
Semiconductor Devices Employing a Barrier Layer App 20150001723 - Chien; Ying-Hsueh Chang ;   et al. | 2015-01-01 |
Semiconductor devices and methods of manufacture thereof Grant 8,871,639 - Chien , et al. October 28, 2 | 2014-10-28 |
Fine Temperature Controllable Wafer Heating System App 20140273302 - Chien; Ying-Hsueh Chang ;   et al. | 2014-09-18 |
Semiconductor Devices and Methods of Manufacture Thereof App 20140191400 - Chien; Ying-Hsueh Chang ;   et al. | 2014-07-10 |
In-situ backside cleaning of semiconductor substrate Grant 8,657,963 - Yeh , et al. February 25, 2 | 2014-02-25 |
In-situ Backside Cleaning Of Semiconductor Substrate App 20130074872 - Yeh; Ming-Hsi ;   et al. | 2013-03-28 |
Semiconductor Device Cleaning Method App 20130068248 - Yeh; Ming-Hsi ;   et al. | 2013-03-21 |
Apparatus and Methods for Movable Megasonic Wafer Probe App 20130056031 - Chien; Ying-Hsueh Chang ;   et al. | 2013-03-07 |
Semiconductor Device Cleaning Method And Apparatus App 20130045606 - Yeh; Ming-Hsi ;   et al. | 2013-02-21 |
Chemical Dispersion Method And Device App 20130034966 - Yeh; Ming-Hsi ;   et al. | 2013-02-07 |
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