Chien; Tsung-Chih
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chien; Tsung-Chih.The latest application filed is for "extreme ultraviolet mask and method of manufacturing the same".
- Chien; Tsung-Chih - Caotun Township TW
- Chien; Tsung-Chih - Nantou County TW
- Chien; Tsung-Chih - Hsin-Chu TW
| Patent | Date |
|---|---|
| Reticle enclosure for lithography systems Grant 11,415,879 - Shih , et al. August 16, 2 | 2022-08-16 |
| Extreme Ultraviolet Mask And Method Of Manufacturing The Same App 20220197127 - SHIH; Chih-Tsung ; et al. | 2022-06-23 |
| Extreme ultraviolet mask and method of manufacturing the same Grant 11,275,301 - Shih , et al. March 15, 2 | 2022-03-15 |
| Method to reduce native defect printability Grant 10,824,080 - Shih , et al. November 3, 2 | 2020-11-03 |
| Semiconductor Apparatus And Method Of Operating The Same App 20200341388 - CHEN; Jui-Chieh ; et al. | 2020-10-29 |
| Method To Reduce Native Defect Printability App 20200133141 - SHIH; Chih-Tsung ; et al. | 2020-04-30 |
| Extreme Ultraviolet Mask And Method Of Manufacturing The Same App 20200073225 - SHIH; Chih-Tsung ; et al. | 2020-03-05 |
| Apparatus for charged particle lithography system Grant 9,911,575 - Wang , et al. March 6, 2 | 2018-03-06 |
| Bonding pad surface damage reduction in a formation of digital pattern generator Grant 9,633,958 - Lu , et al. April 25, 2 | 2017-04-25 |
| Apparatus for Charged Particle Lithography System App 20160322199 - WANG; SHIH-CHI ; et al. | 2016-11-03 |
| Bonding Pad Surface Damage Reduction in a Formation of Digital Pattern Generator App 20160225612 - Lu; Chih Wei ; et al. | 2016-08-04 |
| Apparatus for charged particle lithography system Grant 9,390,891 - Wang , et al. July 12, 2 | 2016-07-12 |
| Apparatus for Charged Particle Lithography System App 20160049278 - Wang; Shih-Chi ; et al. | 2016-02-18 |
| Wafer edge exposure module Grant 8,625,076 - Chien , et al. January 7, 2 | 2014-01-07 |
| Method of inhibiting photoresist pattern collapse Grant 8,101,340 - Chang , et al. January 24, 2 | 2012-01-24 |
| Wafer Edge Exposure Module App 20110194086 - CHIEN; Tsung-Chih ; et al. | 2011-08-11 |
| Method of Inhibiting Photoresist Pattern Collapse App 20070264594 - Chang; Ching-Yu ; et al. | 2007-11-15 |
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