| Patent | Date |
|---|
System And Method For Detecting Debris In A Photolithography System
App 20220299883 - TU; Shih-Yu ; et al. | 2022-09-22 |
Radiation Source Apparatus And Method For Using The Same
App 20220304131 - CHENG; Chiao-Hua ; et al. | 2022-09-22 |
EUV photolithography system and methods of operating the same
Grant 11,442,365 - Sun , et al. September 13, 2 | 2022-09-13 |
Substrate Stage, Substrate Processing System Using The Same, And Method For Processing Substrate
App 20220283517 - CHEN; Yu-Huan ; et al. | 2022-09-08 |
Lithography apparatus and method for using the same
Grant 11,437,161 - Chang , et al. September 6, 2 | 2022-09-06 |
Droplet Generator And Method Of Servicing A Photolithographic Tool
App 20220276572 - CHEN; Yu-Huan ; et al. | 2022-09-01 |
Light Source, Euv Lithography System, And Method For Performing Circuit Layout Patterning Process
App 20220276574 - YANG; Chi ; et al. | 2022-09-01 |
System And Method For Omnidirectional Real Time Detection Of Photolithography Characteristics
App 20220269182 - CHEN; Tai-Yu ; et al. | 2022-08-25 |
Method For Controlling Extreme Ultraviolet Light
App 20220260927 - CHEN; Ssu-Yu ; et al. | 2022-08-18 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20220260922 - HSIEH; Chieh ; et al. | 2022-08-18 |
System And Method For Monitoring And Controlling Extreme Ultraviolet Photolithography Processes
App 20220229371 - CHEN; Tai-Yu ; et al. | 2022-07-21 |
System and method for performing extreme ultraviolet photolithography processes
Grant 11,392,040 - Chen , et al. July 19, 2 | 2022-07-19 |
Particle removal device and method
Grant 11,392,041 - Wu , et al. July 19, 2 | 2022-07-19 |
Extreme Ultraviolet Lithography System With Heated Tin Vane Bucket Having A Heated Cover
App 20220225490 - CHEN; Ssu-Yu ; et al. | 2022-07-14 |
Lithography system with an embedded cleaning module
Grant 11,378,894 - Chien , et al. July 5, 2 | 2022-07-05 |
Radiation Source For Lithography Process
App 20220197160 - WU; Shang-Ying ; et al. | 2022-06-23 |
Euv Light Source And Apparatus For Lithography
App 20220191999 - CHIEN; Shang-Chieh ; et al. | 2022-06-16 |
Photolithography device having illuminator and method for adjusting intensity uniformity
Grant 11,360,392 - Hsu , et al. June 14, 2 | 2022-06-14 |
Mask Cleaning
App 20220179326 - Chang; Shu-Hao ; et al. | 2022-06-09 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 11,333,983 - Yang , et al. May 17, 2 | 2022-05-17 |
Method and apparatus for controlling extreme ultraviolet light
Grant 11,320,744 - Chen , et al. May 3, 2 | 2022-05-03 |
Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover
Grant 11,297,710 - Chen , et al. April 5, 2 | 2022-04-05 |
Particle Removal Device And Method
App 20220100100 - Wu; Cheng-Hsuan ; et al. | 2022-03-31 |
Protective Ring Structure For Vacuum Interface And Method Of Using The Same
App 20220100101 - TSAI; Ming-Hsun ; et al. | 2022-03-31 |
Lithography system and cleaning method thereof
Grant 11,287,755 - Lin , et al. March 29, 2 | 2022-03-29 |
Radiation source for lithography process
Grant 11,275,318 - Wu , et al. March 15, 2 | 2022-03-15 |
Droplet generator and method of servicing a photolithographic tool
Grant 11,275,317 - Chen , et al. March 15, 2 | 2022-03-15 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,269,257 - Hsieh , et al. March 8, 2 | 2022-03-08 |
EUV light source and apparatus for lithography
Grant 11,272,606 - Chien , et al. March 8, 2 | 2022-03-08 |
Mask cleaning
Grant 11,256,179 - Chang , et al. February 22, 2 | 2022-02-22 |
Method of operating semiconductor apparatus and semiconductor apparatus
Grant 11,243,479 - Chen , et al. February 8, 2 | 2022-02-08 |
Process system and operating method thereof
Grant 11,237,482 - Chang , et al. February 1, 2 | 2022-02-01 |
System and method for extreme ultraviolet source control
Grant 11,224,115 - Hsu , et al. January 11, 2 | 2022-01-11 |
Method And Apparatus For Controlling Extreme Ultraviolet Light
App 20210364931 - CHEN; Ssu-Yu ; et al. | 2021-11-25 |
System And Method For Performing Extreme Ultraviolet Photolithography Processes
App 20210349396 - CHEN; Tai-Yu ; et al. | 2021-11-11 |
Droplet generator, EUV lithography device and method of generating a series of droplets using a droplet generator
Grant 11,172,566 - Hsiao , et al. November 9, 2 | 2021-11-09 |
Method and device for measuring contamination in EUV source
Grant 11,166,361 - Chen , et al. November 2, 2 | 2021-11-02 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,153,959 - Hsu , et al. October 19, 2 | 2021-10-19 |
Particle Image Velocimetry Of Extreme Ultraviolet Lithography Systems
App 20210294220 - LAI; En Hao ; et al. | 2021-09-23 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20210274627 - LAI; Wei-Chih ; et al. | 2021-09-02 |
EUV vessel inspection method and related system
Grant 11,092,555 - Chang , et al. August 17, 2 | 2021-08-17 |
Extreme Ultraviolet Lithography System With Heated Tin Vane Bucket Having A Heated Cover
App 20210247702 - CHEN; Ssu-Yu ; et al. | 2021-08-12 |
Light Source For Lithography Exposure Process
App 20210243875 - HSIEH; Chieh ; et al. | 2021-08-05 |
Image-capturing assembly
Grant 11,073,746 - Peng , et al. July 27, 2 | 2021-07-27 |
Euv Lithography System And Method For Decreasing Debris In Euv Lithography System
App 20210223708 - YANG; Chi ; et al. | 2021-07-22 |
Extreme Ultraviolet Control System
App 20210223701 - CHUNG; Jen-Yang ; et al. | 2021-07-22 |
Extreme ultraviolet radiation source and cleaning method thereof
Grant 11,071,191 - Yang , et al. July 20, 2 | 2021-07-20 |
Euv Radiation Source Apparatus For Lithography
App 20210208508 - CHEN; Yu-Chih ; et al. | 2021-07-08 |
Lithography System And Cleaning Method Thereof
App 20210191284 - Lin; Sheng-Ta ; et al. | 2021-06-24 |
Radiation Source For Lithography Process
App 20210173316 - WU; Shang-Ying ; et al. | 2021-06-10 |
Particle image velocimetry of extreme ultraviolet lithography systems
Grant 11,029,324 - Lai , et al. June 8, 2 | 2021-06-08 |
Method Of Operating Semiconductor Apparatus And Semiconductor Apparatus
App 20210149317 - CHEN; Hsiang ; et al. | 2021-05-20 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,013,097 - Lai , et al. May 18, 2 | 2021-05-18 |
Lithography apparatus and cleaning method thereof
Grant 10,990,026 - Yang , et al. April 27, 2 | 2021-04-27 |
Light source for lithography exposure process
Grant 10,993,308 - Hsieh , et al. April 27, 2 | 2021-04-27 |
System and method for performing lithography process in semiconductor device fabrication
Grant 10,976,672 - Wu , et al. April 13, 2 | 2021-04-13 |
Extreme ultraviolet control system for adjusting droplet illumination parameters
Grant 10,969,690 - Chung , et al. April 6, 2 | 2021-04-06 |
EUV radiation source apparatus for lithography
Grant 10,955,752 - Chen , et al. March 23, 2 | 2021-03-23 |
Radiation source apparatus and method for decreasing debris in radiation source apparatus
Grant 10,955,762 - Yang , et al. March 23, 2 | 2021-03-23 |
Lithography system and method thereof
Grant 10,955,750 - Yen , et al. March 23, 2 | 2021-03-23 |
Lithography system and cleaning method thereof
Grant 10,942,459 - Lin , et al. March 9, 2 | 2021-03-09 |
System and Method for Extreme Ultraviolet Source Control
App 20210068241 - Hsu; Chun-Chia ; et al. | 2021-03-04 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20210055664 - YANG; Chi ; et al. | 2021-02-25 |
Radiation source for lithography process
Grant 10,928,741 - Wu , et al. February 23, 2 | 2021-02-23 |
EUV radiation source for lithography exposure process
Grant 10,925,142 - Hsu , et al. February 16, 2 | 2021-02-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20210041787 - HSIEH; Chieh ; et al. | 2021-02-11 |
Photography Device Having Illuminator And Method For Adjusting Intensity Uniformity
App 20210033982 - Hsu; Che-Chang ; et al. | 2021-02-04 |
Lithography System And Cleaning Method Thereof
App 20210033990 - Lin; Sheng-Ta ; et al. | 2021-02-04 |
Droplet Generator, Euv Lithography Device And Method Of Generating A Series Of Droplets Using A Droplet Generator
App 20210037634 - Hsiao; Jen-Hung ; et al. | 2021-02-04 |
Lithography System And Method Thereof
App 20210018845 - YEN; Wei-Chun ; et al. | 2021-01-21 |
Method and apparatus for removing debris from collector
Grant 10,875,060 - Wu , et al. December 29, 2 | 2020-12-29 |
Extreme ultraviolet radiation source
Grant 10,877,190 - Yang , et al. December 29, 2 | 2020-12-29 |
Vessel for extreme ultraviolet radiation source
Grant 10,877,378 - Chen , et al. December 29, 2 | 2020-12-29 |
Collector pellicle
Grant 10,880,981 - Chien , et al. December 29, 2 | 2020-12-29 |
EUV metal droplet catchers
Grant 10,871,719 - Lin , et al. December 22, 2 | 2020-12-22 |
Semiconductor apparatus and method of operating the same
Grant 10,859,918 - Chen , et al. December 8, 2 | 2020-12-08 |
EUV light source and apparatus for lithography
Grant 10,859,928 - Chen , et al. December 8, 2 | 2020-12-08 |
Optical Imaging Apparatus
App 20200371409 - Huang; Hai-Jo ; et al. | 2020-11-26 |
System and method for extreme ultraviolet source control
Grant 10,842,009 - Hsu , et al. November 17, 2 | 2020-11-17 |
Radiation Source Apparatus And Method For Decreasing Debris In Radiation Source Apparatus
App 20200348607 - YANG; Chi ; et al. | 2020-11-05 |
Euv Vessel Inspection Method And Related System
App 20200348241 - CHANG; Chun-Lin Louis ; et al. | 2020-11-05 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 10,824,083 - Yang , et al. November 3, 2 | 2020-11-03 |
Method And Apparatus For Removing Debris From Collector
App 20200331038 - WU; Shang-Ying ; et al. | 2020-10-22 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 10,802,406 - Hsieh , et al. October 13, 2 | 2020-10-13 |
Radiation source for lithography exposure process
Grant 10,802,405 - Hsieh , et al. October 13, 2 | 2020-10-13 |
Radiation Source Apparatus
App 20200314990 - CHEN; Ssu-Yu ; et al. | 2020-10-01 |
Extreme Ultraviolet Radiation Source And Cleaning Method Thereof
App 20200314989 - YANG; Chi ; et al. | 2020-10-01 |
Radiation source apparatus
Grant 10,791,616 - Chen , et al. September 29, 2 | 2020-09-29 |
Radiation Source For Lithography Process
App 20200278617 - WU; Shang-Ying ; et al. | 2020-09-03 |
Communication control method
Grant 10,725,384 - Chang , et al. | 2020-07-28 |
EUV vessel inspection method and related system
Grant 10,718,718 - Chang , et al. | 2020-07-21 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,712,676 - Yang , et al. | 2020-07-14 |
Semiconductor integrated circuit fabrication with pattern-reversing process
Grant 10,685,846 - Chien , et al. | 2020-06-16 |
Extreme ultraviolet radiation source and cleaning method thereof
Grant 10,687,410 - Yang , et al. | 2020-06-16 |
Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation
Grant 10,678,138 - Yen , et al. | 2020-06-09 |
Method And Device For Measuring Contamination In Euv Source
App 20200178380 - CHEN; Kuan-Hung ; et al. | 2020-06-04 |
Radiation source for lithography process
Grant 10,656,539 - Wu , et al. | 2020-05-19 |
Image-capturing Assembly
App 20200142281 - Peng; Kuo-Hao ; et al. | 2020-05-07 |
Semiconductor Apparatus And Method Of Operating The Same
App 20200133136 - CHEN; Kuan-Hung ; et al. | 2020-04-30 |
Particle Image Velocimetry Of Extreme Ultraviolet Lithography Systems
App 20200103433 - LAI; Allen ; et al. | 2020-04-02 |
Vessel For Extreme Ultraviolet Radiation Source
App 20200103758 - CHEN; Ssu-Yu ; et al. | 2020-04-02 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20200073261 - YANG; Chi ; et al. | 2020-03-05 |
Lithography System With An Embedded Cleaning Module
App 20200064747 - Chien; Shang-Chieh ; et al. | 2020-02-27 |
Light Source For Lithography Exposure Process
App 20200068696 - HSIEH; Chieh ; et al. | 2020-02-27 |
Process System And Operating Method Thereof
App 20200057381 - CHANG; Chao-Chen ; et al. | 2020-02-20 |
Euv Metal Droplet Catchers
App 20200057389 - LIN; Sheng-Ta ; et al. | 2020-02-20 |
Lithography Apparatus And Cleaning Method Thereof
App 20200057393 - Yang; Chi ; et al. | 2020-02-20 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20200060015 - HSU; Chun-Chia ; et al. | 2020-02-20 |
Communication Control Method
App 20200057384 - CHANG; Chao-Chen ; et al. | 2020-02-20 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20200057382 - HSIEH; Chieh ; et al. | 2020-02-20 |
Extreme Ultraviolet Radiation Source
App 20200057181 - YANG; Chi ; et al. | 2020-02-20 |
Lithography System And Lithography Method
App 20200057376 - HSU; Chun-Chia ; et al. | 2020-02-20 |
Mask Cleaning
App 20200050118 - Chang; Shu-Hao ; et al. | 2020-02-13 |
Extreme Ultraviolet (euv) Radiation Source And A Method For Generating Extreme Ultraviolet Radiation
App 20200041908 - YEN; WEI-CHUN ; et al. | 2020-02-06 |
Euv Radiation Source For Lithography Exposure Process
App 20200045800 - HSU; Chun-Chia ; et al. | 2020-02-06 |
Radiation Source For Lithography Exposure Process
App 20200033732 - HSIEH; Chieh ; et al. | 2020-01-30 |
Extreme Ultraviolet Radiation Source And Cleaning Method Thereof
App 20200037427 - YANG; Chi ; et al. | 2020-01-30 |
Euv Vessel Inspection Method And Related System
App 20200025688 - CHANG; Chun-Lin Louis ; et al. | 2020-01-23 |
Euv Light Source And Apparatus For Lithography
App 20200004167 - CHEN; Yu-Chih ; et al. | 2020-01-02 |
Euv Radiation Source Apparatus For Lithography
App 20200004160 - CHEN; Yu-Chih ; et al. | 2020-01-02 |
Extreme ultraviolet radiation source and droplet catcher thereof
Grant 10,512,147 - Yang , et al. Dec | 2019-12-17 |
EUV source generation method and related system
Grant 10,506,698 - Chang , et al. Dec | 2019-12-10 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,495,987 - Yang , et al. De | 2019-12-03 |
Light source for lithography exposure process
Grant 10,477,663 - Hsieh , et al. Nov | 2019-11-12 |
Lithography system with an embedded cleaning module
Grant 10,459,353 - Chien , et al. Oc | 2019-10-29 |
Mask cleaning
Grant 10,459,352 - Chang , et al. Oc | 2019-10-29 |
EUV vessel inspection method and related system
Grant 10,429,314 - Chang , et al. October 1, 2 | 2019-10-01 |
System and Method for Extreme Ultraviolet Source Control
App 20190289706 - Hsu; Chun-Chia ; et al. | 2019-09-19 |
System And Method For Performing Lithography Process In Semiconductor Device Fabrication
App 20190250522 - WU; Jui-Ching ; et al. | 2019-08-15 |
System and method for extreme ultraviolet source control
Grant 10,314,154 - Hsu , et al. | 2019-06-04 |
System and Method for Extreme Ultraviolet Source Control
App 20190166680 - Hsu; Chun-Chia ; et al. | 2019-05-30 |
Radiation Source For Lithography Process
App 20190155179 - WU; Shang-Ying ; et al. | 2019-05-23 |
Light Source For Lithography Exposure Process
App 20190150265 - HSIEH; Chieh ; et al. | 2019-05-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20190150263 - LAI; Wei-Chih ; et al. | 2019-05-16 |
Lithography apparatus and method for protecting a reticle
Grant 10,274,844 - Chung , et al. | 2019-04-30 |
System and method for performing lithography process in semiconductor device fabrication
Grant 10,274,838 - Wu , et al. | 2019-04-30 |
Extreme Ultraviolet Control System
App 20190101831 - CHUNG; Jen-Yang ; et al. | 2019-04-04 |
Collector Pellicle
App 20190104604 - CHIEN; Shang-Chieh ; et al. | 2019-04-04 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20190094718 - YANG; Chi ; et al. | 2019-03-28 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20190094717 - YANG; Chi ; et al. | 2019-03-28 |
Euv Vessel Inspection Method And Related System
App 20190033225 - CHANG; Chun-Lin Louis ; et al. | 2019-01-31 |
Euv Light Source And Apparatus For Lithography
App 20180376575 - CHIEN; Shang-Chieh ; et al. | 2018-12-27 |
Extreme ultraviolet lithography system with debris trapper on exhaust line
Grant 10,162,277 - Chien , et al. Dec | 2018-12-25 |
Euv Source Generation Method And Related System
App 20180317309 - CHANG; Chun-Lin Louis ; et al. | 2018-11-01 |
Particle removal system and method thereof
Grant 10,067,418 - Chang , et al. September 4, 2 | 2018-09-04 |
Extreme Ultraviolet Lithography System with Debris Trapper on Exhaust Line
App 20180173117 - Chien; Shang-Chieh ; et al. | 2018-06-21 |
Method of making an extreme ultraviolet pellicle
Grant 9,664,999 - Shih , et al. May 30, 2 | 2017-05-30 |
Rotary EUV collector
Grant 9,665,007 - Chien , et al. May 30, 2 | 2017-05-30 |
System and method for photomask particle detection
Grant 9,607,833 - Chien , et al. March 28, 2 | 2017-03-28 |
Mask Cleaning
App 20170060005 - Chang; Shu-Hao ; et al. | 2017-03-02 |
System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle
Grant 9,558,944 - Hsu , et al. January 31, 2 | 2017-01-31 |
Rotary Euv Collector
App 20160370705 - Chien; Shang-Chieh ; et al. | 2016-12-22 |
Method Of Making An Extreme Ultraviolet Pellicle
App 20160363857 - Shih; Chih-Tsung ; et al. | 2016-12-15 |
Method of making an extreme ultraviolet pellicle
Grant 9,442,368 - Shih , et al. September 13, 2 | 2016-09-13 |
System And Method For Photomask Particle Detection
App 20160225610 - Chien; Shang-Chieh ; et al. | 2016-08-04 |
Method Of Making An Extreme Ultraviolet Pellicle
App 20160109798 - Shih; Chih-Tsung ; et al. | 2016-04-21 |
System And Method For Performing Lithography Process In Semiconductor Device Fabrication
App 20160054664 - Wu; Jui-Ching ; et al. | 2016-02-25 |
Method of making an extreme ultraviolet pellicle
Grant 9,256,123 - Shih , et al. February 9, 2 | 2016-02-09 |
Semiconductor Integrated Circuit Fabrication With Pattern-Reversing Process
App 20150332922 - Chien; Ming-Chin ; et al. | 2015-11-19 |
Particle Removal System And Method Thereof
App 20150323862 - Chang; Shu-Hao ; et al. | 2015-11-12 |
Method Of Making An Extreme Ultraviolet Pellicle
App 20150309405 - Shih; Chih-Tsung ; et al. | 2015-10-29 |
Lithography layer with quenchers to prevent pattern collapse
Grant 9,159,559 - Chien , et al. October 13, 2 | 2015-10-13 |
System, Method And Reticle For Improved Pattern Quality In Extreme Ultraviolet (euv) Lithography And Method For Forming The Reticle
App 20150255272 - HSU; Chia-Hao ; et al. | 2015-09-10 |
Method for Lithography Patterning
App 20150241776 - Chien; Shang-Chieh ; et al. | 2015-08-27 |
System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle
Grant 9,046,776 - Hsu , et al. June 2, 2 | 2015-06-02 |
Rotary Euv Collector
App 20150085264 - Chien; Shang-Chieh ; et al. | 2015-03-26 |
Method and apparatus for ultraviolet (UV) patterning with reduced outgassing
Grant 8,988,652 - Chang , et al. March 24, 2 | 2015-03-24 |
System And Method For Performing Lithography Process In Semiconductor Device Fabrication
App 20140347644 - Wu; Jui-Ching ; et al. | 2014-11-27 |
Lithography System with an Embedded Cleaning Module
App 20140268074 - Chien; Shang-Chieh ; et al. | 2014-09-18 |
Method and Structure to Improve Process Window for Lithography
App 20140256146 - Chien; Shang-Chieh ; et al. | 2014-09-11 |
System, Method And Reticle For Improved Pattern Quality In Extreme Ultraviolet (euv) Lithography And Method For Forming The Reticle
App 20140218714 - HSU; Chia-Hao ; et al. | 2014-08-07 |
Method And Apparatus For Ultraviolet (uv) Patterning With Reduced Outgassing
App 20140111781 - CHANG; Shu-Hao ; et al. | 2014-04-24 |
Organic electro-luminescence device with organic light emitting layer having particular ratio of contents
Grant 7,956,526 - Chen , et al. June 7, 2 | 2011-06-07 |
Polymer Solar Cell And Manufacturing Method Thereof
App 20110079285 - Chen; Fang-Chung ; et al. | 2011-04-07 |
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