Chibana; Takahito
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chibana; Takahito.The latest application filed is for "polygon mirror".
- Chibana; Takahito - Tochigi JP
- Chibana; Takahito - Utsunomiya JP
- Chibana; Takahito - Utsunomiya-shi JP
| Patent | Date |
|---|---|
| Polygon Mirror App 20220234363 - Kudo; Genichiro ; et al. | 2022-07-28 |
| Exposure apparatus and device fabrication method Grant 9,454,087 - Kobayashi , et al. September 27, 2 | 2016-09-27 |
| Exposure Apparatus And Device Fabrication Method App 20130293854 - Kobayashi; Kenichi ; et al. | 2013-11-07 |
| Exposure apparatus Grant 7,742,147 - Chibana June 22, 2 | 2010-06-22 |
| Exposure Apparatus And Device Manufacturing Method App 20090268175 - Chibana; Takahito ; et al. | 2009-10-29 |
| Exposure apparatus and device manufacturing method Grant 7,538,852 - Chibana May 26, 2 | 2009-05-26 |
| Exposure Apparatus App 20090073399 - Chibana; Takahito ; et al. | 2009-03-19 |
| Exposure Apparatus And Method Of Manufacturing Device App 20080198345 - Kawasaki; Youji ; et al. | 2008-08-21 |
| Immersion Exposure Apparatus And Method Of Manufacturing Device App 20080198347 - Kawasaki; Youji ; et al. | 2008-08-21 |
| Exposure Apparatus And Device Manufacturing Method App 20070159608 - Chibana; Takahito | 2007-07-12 |
| Exposure apparatus and device manufacturing method Grant 7,218,377 - Chibana May 15, 2 | 2007-05-15 |
| Exposure Apparatus App 20070085990 - CHIBANA; Takahito | 2007-04-19 |
| Exposure apparatus Grant 7,057,701 - Chibana , et al. June 6, 2 | 2006-06-06 |
| Exposure apparatus and device manufacturing method App 20050105067 - Chibana, Takahito | 2005-05-19 |
| Exposure apparatus App 20050030496 - Chibana, Takahito ; et al. | 2005-02-10 |
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