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Sidewall protection of low-K material during etching and ashing Grant 8,859,430 - Chiba October 14, 2 | 2014-10-14 |
Site Of Interest Extraction Device, Site Of Interest Extraction Method, And Computer-readable Recording Medium App 20140195300 - Chiba; Yuki ;   et al. | 2014-07-10 |
Sidewall Protection Of Low-k Material During Etching And Ashing App 20130344699 - Chiba; Yuki | 2013-12-26 |
Position Information Providing Apparatus, Position Information Providing System, Position Information Providing Method, Program, And Recording Medium App 20130304736 - Miyazaki; Yoji ;   et al. | 2013-11-14 |
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Power supply apparatus and power supply control method Grant 8,484,491 - Kageyama , et al. July 9, 2 | 2013-07-09 |
Interest Level Estimation Apparatus, Interest Level Estimation Method, And Computer-readable Recording Medium App 20130096982 - Miyazaki; Yoji ;   et al. | 2013-04-18 |
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Selective deposition of metal-containing cap layers for semiconductor devices Grant 8,242,019 - Ishizaka , et al. August 14, 2 | 2012-08-14 |
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Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator Grant 7,922,865 - Miyata , et al. April 12, 2 | 2011-04-12 |
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Method for preventing striation at a sidewall of an opening of a resist during an etching process Grant 7,723,238 - Chiba May 25, 2 | 2010-05-25 |
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