| Patent | Date |
|---|
Molding Apparatus, Molding Method, And Template
App 20220066316 - Kobayashi; Masatoshi ; et al. | 2022-03-03 |
Planarization Method And Photocurable Composition
App 20210394230 - Ito; Toshiki ; et al. | 2021-12-23 |
Pattern forming method and methods for manufacturing processed substrate, optical component and quartz mold replica as well as coating material for imprint pretreatment and set thereof with imprint resist
Grant 10,935,884 - Chiba , et al. March 2, 2 | 2021-03-02 |
Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
Grant 10,883,006 - Chiba , et al. January 5, 2 | 2021-01-05 |
Method of forming pattern on a substrate
Grant 10,856,422 - Ito , et al. December 1, 2 | 2020-12-01 |
Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
Grant 10,845,700 - Chiba , et al. November 24, 2 | 2020-11-24 |
Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
Grant 10,754,245 - Ito , et al. A | 2020-08-25 |
Pattern Forming Method And Methods For Manufacturing Processed Substrate, Optical Component And Quartz Mold Replica As Well As C
App 20190391484 - Chiba; Keiko ; et al. | 2019-12-26 |
Photocurable composition, methods for producing film, optical component, circuit board, and electronic component by using the same, and cured product
Grant 10,456,974 - Yonezawa , et al. Oc | 2019-10-29 |
Method of producing a patterned film
Grant 10,293,543 - Honma , et al. | 2019-05-21 |
Imprinting method and curable composition for imprinting
Grant 9,957,340 - Chiba , et al. May 1, 2 | 2018-05-01 |
Method Of Forming Pattern And Method Of Producing Processing Substrate,optical Part, Circuit Board, Or Electronic Part
App 20180042117 - Ito; Toshiki ; et al. | 2018-02-08 |
Pattern Forming Method As Well As Production Methods For Processed Substrate, Optical Component, Circuit Board, Electronic Component And Imprint Mold
App 20170285464 - Ito; Toshiki ; et al. | 2017-10-05 |
Pattern Forming Method As Well As Production Methods For Processed Substrate, Optical Component, Circuit Board, Electronic Component And Imprint Mold
App 20170283632 - Chiba; Keiko ; et al. | 2017-10-05 |
Pattern Forming Method As Well As Production Methods For Processed Substrate, Optical Component, Circuit Board, Electronic Component And Imprint Mold
App 20170285466 - Chiba; Keiko ; et al. | 2017-10-05 |
Imprint Apparatus And Method, And Method Of Manufacturing Article
App 20160158998 - Chiba; Keiko | 2016-06-09 |
Photocurable Composition, Methods For Producing Film, Optical Component, Circuit Board, And Electronic Component By Using The Same, And Cured Product
App 20160144554 - Yonezawa; Shiori ; et al. | 2016-05-26 |
Photocurable Composition, Methods For Producing Film, Optical Component, Circuit Board, And Electronic Component By Using The Same, And Cured Product
App 20160144555 - Honma; Takeshi ; et al. | 2016-05-26 |
Imprinting Method And Curable Composition For Imprinting
App 20150315322 - Chiba; Keiko ; et al. | 2015-11-05 |
Method Of Cleaning Pipe Of Immersion Exposure Apparatus, And Method Of Manufacturing Device
App 20120257180 - TANABE; Masayuki ; et al. | 2012-10-11 |
Exposure apparatus and device manufacturing method
Grant 7,916,273 - Nyui , et al. March 29, 2 | 2011-03-29 |
Exposure Apparatus And Device Fabrication Method
App 20090225290 - Shima; Shinichi ; et al. | 2009-09-10 |
Exposure Apparatus And Device Manufacturing Method
App 20070177119 - Chiba; Keiko | 2007-08-02 |
Exposure Apparatus And Device Manufacturing Method
App 20070109514 - Nyui; Masaru ; et al. | 2007-05-17 |
Reflection type mask
Grant 7,072,438 - Chiba , et al. July 4, 2 | 2006-07-04 |
Three-dimensional structure forming method
Grant 7,027,227 - Chiba , et al. April 11, 2 | 2006-04-11 |
Optical system and optical instrument with diffractive optical element
Grant 6,829,091 - Kato , et al. December 7, 2 | 2004-12-07 |
Three-dimensional structure forming method
App 20040152021 - Chiba, Keiko ; et al. | 2004-08-05 |
Reflection type mask
App 20040125911 - Chiba, Keiko ; et al. | 2004-07-01 |
X-ray mask, and exposure method and apparatus using the same
Grant 6,728,332 - Chiba , et al. April 27, 2 | 2004-04-27 |
Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device
Grant 6,723,475 - Tsukamoto , et al. April 20, 2 | 2004-04-20 |
Device manufacturing method
Grant 6,645,707 - Amemiya , et al. November 11, 2 | 2003-11-11 |
Method for manufacturing optical element, optical element, optical system using optical element, optical apparatus and exposure apparatus using optical system, and method for manufacturing device
Grant 6,627,468 - Chiba September 30, 2 | 2003-09-30 |
X-ray mask structure, and X-ray exposure method and apparatus using the same
Grant 6,605,392 - Matsumoto , et al. August 12, 2 | 2003-08-12 |
Device Manufacturing Method
App 20030143496 - Amemiya, Mitsuaki ; et al. | 2003-07-31 |
Optical System And Optical Instrument With Diffractive Optical Element
App 20030016447 - KATO, TAKASHI ; et al. | 2003-01-23 |
Exposure apparatus, and device manufacturing method
Grant 6,449,332 - Chiba September 10, 2 | 2002-09-10 |
X-ray mask, and exposure method and apparatus using the same
App 20020021781 - Chiba, Keiko ; et al. | 2002-02-21 |
X-ray Mask Structure, And X-ray Exposure Method And Apparatus Using The Same
App 20020018941 - MATSUMOTO, TAKAHIRO ; et al. | 2002-02-14 |
Mask structure exposure method
Grant 6,337,161 - Chiba , et al. January 8, 2 | 2002-01-08 |
Method for manufacturing optical element, optical element, optical system using optical element, optical apparatus and exposure apparatus using optical system, and method for manufacturing device
App 20010055826 - Chiba, Keiko | 2001-12-27 |
X-ray mask, and exposure method and apparatus using the same
Grant 6,317,479 - Chiba , et al. November 13, 2 | 2001-11-13 |
Mask Structure Exposure Method
App 20010038950 - CHIBA, KEIKO ; et al. | 2001-11-08 |
Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device
App 20010038953 - Tsukamoto, Masami ; et al. | 2001-11-08 |
X-ray mask and X-ray exposure method using the same
Grant 6,101,237 - Miyachi , et al. August 8, 2 | 2000-08-08 |
Mask and exposure apparatus using the same
Grant 5,770,335 - Miyake , et al. June 23, 1 | 1998-06-23 |
Lithographic mask structure and lithographic process
Grant 4,735,877 - Kato , et al. April 5, 1 | 1988-04-05 |
| 