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Patent applications and USPTO patent grants for Chiang; Conan.The latest application filed is for "apparatus for the deposition of a conformal film on a substrate and methods therefor".
Patent | Date |
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Apparatus for the deposition of a conformal film on a substrate and methods therefor Grant 9,384,979 - Choi , et al. July 5, 2 | 2016-07-05 |
Pitch reduction using oxide spacer Grant 8,592,318 - Kim , et al. November 26, 2 | 2013-11-26 |
Apparatus For The Deposition Of A Conformal Film On A Substrate And Methods Therefor App 20130074769 - CHOI; Dae-Han ;   et al. | 2013-03-28 |
Apparatus for the deposition of a conformal film on a substrate and methods therefor Grant 8,357,434 - Choi , et al. January 22, 2 | 2013-01-22 |
Pitch Reduction Using Oxide Spacer App 20120052683 - Kim; Jisoo ;   et al. | 2012-03-01 |
Method and apparatus for detecting planarization of metal films prior to clearing Grant 7,690,966 - Gopalan , et al. April 6, 2 | 2010-04-06 |
Removable spacer Grant 7,476,610 - Kim , et al. January 13, 2 | 2009-01-13 |
Method and apparatus for detecting planarization of metal films prior to clearing Grant 7,413,988 - Gopalan , et al. August 19, 2 | 2008-08-19 |
Removable spacer App 20080111166 - Kim; Ji Soo ;   et al. | 2008-05-15 |
Reducing line edge roughness App 20070181530 - Huang; Zhi-Song ;   et al. | 2007-08-09 |
Method of plasma etching organic antireflective coating Grant 6,617,257 - Ni , et al. September 9, 2 | 2003-09-09 |
Method of plasma etching organic antireflective coating App 20020182881 - Ni, Tuqiang ;   et al. | 2002-12-05 |
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