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Patent applications and USPTO patent grants for Chiang; Chen-Chia.The latest application filed is for "pvd apparatus and method with deposition chamber having multiple targets and magnets".
Patent | Date |
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PVD apparatus and method with deposition chamber having multiple targets and magnets Grant 10,190,209 - Kao , et al. Ja | 2019-01-29 |
Pvd Apparatus And Method With Deposition Chamber Having Multiple Targets And Magnets App 20170314121 - Kao; Chung-En ;   et al. | 2017-11-02 |
PVD apparatus and method with deposition chamber having multiple targets and magnets Grant 9,708,706 - Kao , et al. July 18, 2 | 2017-07-18 |
Closed loop control for reliability Grant 9,026,241 - Yang , et al. May 5, 2 | 2015-05-05 |
Novel Closed Loop Control For Reliability App 20130226327 - Yang; Wen-Cheng ;   et al. | 2013-08-29 |
Apparatus And Method With Deposition Chamber Having Multiple Targets And Magnets App 20130136873 - KAO; Chung-En ;   et al. | 2013-05-30 |
Method of reducing spiral defects by adding an isopropyl alcohol rinse step before depositing sog Grant 6,071,831 - Chiang , et al. June 6, 2 | 2000-06-06 |
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