Chia; Bonnie T
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chia; Bonnie T.The latest application filed is for "method and apparatus for cleaning a substrate".
- Chia; Bonnie T - Sunnyvale CA
- Chia; Bonnie T. - Sunnyvale CA
| Patent | Date |
|---|---|
| Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes Grant 11,031,273 - Chia , et al. June 8, 2 | 2021-06-08 |
| Lift pin assembly Grant 10,892,180 - Chia , et al. January 12, 2 | 2021-01-12 |
| High conductance process kit Grant 10,763,086 - Chia , et al. Sep | 2020-09-01 |
| Method and Apparatus for cleaning a substrate App 20200230782 - AGARWAL; Pulkit ; et al. | 2020-07-23 |
| Physical Vapor Deposition (pvd) Electrostatic Chuck With Improved Thermal Coupling For Temperature Sensitive Processes App 20200185247 - CHIA; BONNIE T ; et al. | 2020-06-11 |
| High Conductance Process Kit App 20180130644 - CHIA; Bonnie T. ; et al. | 2018-05-10 |
| High conductance process kit Grant 9,865,437 - Chia , et al. January 9, 2 | 2018-01-09 |
| Methods and Apparatus for Cleaning a Substrate App 20160322239 - AGARWAL; Pulkit ; et al. | 2016-11-03 |
| High Conductance Process Kit App 20160189936 - CHIA; Bonnie T. ; et al. | 2016-06-30 |
| Lift Pin Assembly App 20150348823 - CHIA; BONNIE T. ; et al. | 2015-12-03 |
| Finned shutter disk for a substrate process chamber Grant 9,147,558 - Chia , et al. September 29, 2 | 2015-09-29 |
| Finned Shutter Disk For A Substrate Process Chamber App 20140196848 - CHIA; BONNIE T. ; et al. | 2014-07-17 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 