| Patent | Date |
|---|
Sulfur and fluorine containing etch chemistry for improvement of distortion and bow control for har etch
Grant 9,484,215 - Choi , et al. November 1, 2 | 2016-11-01 |
Sulfur And Fluorine Containing Etch Chemistry For Improvement Of Distortion And Bow Control For Har Etch
App 20160293430 - CHOI; Sanghyuk ; et al. | 2016-10-06 |
Methods of fabricating integrated circuit capacitors having u-shaped lower capacitor electrodes
Grant 8,941,165 - Cho , et al. January 27, 2 | 2015-01-27 |
Ultra-high aspect ratio dielectric etch
Grant 8,906,194 - Chi , et al. December 9, 2 | 2014-12-09 |
Profile control in dielectric etch
Grant 8,501,627 - Chi , et al. August 6, 2 | 2013-08-06 |
CD bias loading control with ARC layer open
Grant 8,470,715 - Chi , et al. June 25, 2 | 2013-06-25 |
Line width roughness control with arc layer open
Grant 8,158,524 - Chi , et al. April 17, 2 | 2012-04-17 |
Profile Control In Dielectric Etch
App 20110053379 - Chi; Kyeong-Koo ; et al. | 2011-03-03 |
Cd Bias Loading Control With Arc Layer Open
App 20100323525 - Chi; Kyeong-Koo ; et al. | 2010-12-23 |
Method of forming fine pattern of semiconductor device using sige layer as sacrificial layer, and method of forming self-aligned contacts using the same
Grant 7,763,544 - Bai , et al. July 27, 2 | 2010-07-27 |
Method of fabricating semiconductor device having capacitor
Grant 7,736,970 - Cho , et al. June 15, 2 | 2010-06-15 |
Ultra-high Aspect Ratio Dielectric Etch
App 20100132889 - CHI; Kyeong-Koo ; et al. | 2010-06-03 |
Method of fabricating a semiconductor device
Grant 7,709,389 - Kim , et al. May 4, 2 | 2010-05-04 |
Semiconductor device with trench gate type transistor and method of manufacturing the same
Grant 7,709,346 - Kim , et al. May 4, 2 | 2010-05-04 |
Ultra-high aspect ratio dielectric etch
Grant 7,682,986 - Chi , et al. March 23, 2 | 2010-03-23 |
Method Of Forming Fine Pattern Of Semiconductor Device Using Sige Layer As Sacrificial Layer, And Method Of Forming Self-aligned Contacts Using The Same
App 20090263970 - BAI; Keun-Hee ; et al. | 2009-10-22 |
Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same
Grant 7,566,659 - Bai , et al. July 28, 2 | 2009-07-28 |
Pulsed ultra-high aspect ratio dielectric etch
Grant 7,547,636 - Chi , et al. June 16, 2 | 2009-06-16 |
Methods of fabricating a semiconductor device
Grant 7,540,970 - Koh , et al. June 2, 2 | 2009-06-02 |
Line Width Roughness Control With Arc Layer Open
App 20090087996 - Chi; Kyeong-Koo ; et al. | 2009-04-02 |
Methods of fabricating nonvolatile memory devices
Grant 7,510,934 - Chung , et al. March 31, 2 | 2009-03-31 |
Method for etching an object using a plasma and an object etched by a plasma
Grant 7,491,344 - Park , et al. February 17, 2 | 2009-02-17 |
Methods of forming field effect transistors having t-shaped gate electrodes using carbon-based etching masks
Grant 7,479,445 - Kim , et al. January 20, 2 | 2009-01-20 |
Pulsed Ultra-high Aspect Ratio Dielectric Etch
App 20080188082 - Chi; Kyeong-Koo ; et al. | 2008-08-07 |
Ultra-high Aspect Ratio Dielectric Etch
App 20080188081 - Chi; Kyeong-Koo ; et al. | 2008-08-07 |
Method of manufacturing a semiconductor memory device
Grant 7,402,488 - Cho , et al. July 22, 2 | 2008-07-22 |
Method of fabricating flash memory device including control gate extensions
Grant 7,384,843 - Kim , et al. June 10, 2 | 2008-06-10 |
Method Of Fabricating Semiconductor Device Having Capacitor
App 20080087931 - Cho; Sung-Il ; et al. | 2008-04-17 |
Semiconductor Device With Trench Gate Type Transistor And Method Of Manufacturing The Same
App 20080081432 - KIM; Yong-Jin ; et al. | 2008-04-03 |
Methods of fabricating flash memory devices and flash memory devices fabricated thereby
Grant 7,338,849 - Kim , et al. March 4, 2 | 2008-03-04 |
Methods of forming capacitor electrodes using fluorine and oxygen
Grant 7,329,574 - Cho , et al. February 12, 2 | 2008-02-12 |
Semiconductor device including a metal gate electrode formed in a trench and method of forming thereof
Grant 7,319,255 - Hwang , et al. January 15, 2 | 2008-01-15 |
Method of fabricating a flash memory device
Grant 7,303,957 - Chi , et al. December 4, 2 | 2007-12-04 |
Method of fabricating semiconductor device having capacitor
Grant 7,291,531 - Cho , et al. November 6, 2 | 2007-11-06 |
Methods of fabricating nonvolatile memory devices
App 20070231989 - Chung; Seung-Pil ; et al. | 2007-10-04 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
Grant 7,258,811 - Chu , et al. August 21, 2 | 2007-08-21 |
Semiconductor device having self-aligned contact plug and method for fabricating the same
Grant 7,256,143 - Kim , et al. August 14, 2 | 2007-08-14 |
Methods of forming field effect transistors having recessed channel regions
Grant 7,247,540 - Chung , et al. July 24, 2 | 2007-07-24 |
Nonvolatile memory devices
Grant 7,242,054 - Chung , et al. July 10, 2 | 2007-07-10 |
Method of forming micro-patterns using multiple photolithography process
App 20070082296 - Yang; Song-yi ; et al. | 2007-04-12 |
Method of fabricating a flash memory device
App 20070059876 - Chi; Kyeong-koo ; et al. | 2007-03-15 |
Semiconductor device with trench gate type transistor and method of manufacturing the same
Grant 7,183,600 - Kim , et al. February 27, 2 | 2007-02-27 |
Methods of fabricating a semiconductor device
App 20070020565 - Koh; Cha-Won ; et al. | 2007-01-25 |
Method of fabricating a semiconductor device
App 20070009840 - Kim; Dong-chan ; et al. | 2007-01-11 |
Method of optimizing seasoning recipe for etch process
App 20060293781 - Cho; Hong ; et al. | 2006-12-28 |
Semiconductor device including bit line formed using damascene technique and method of fabricating the same
App 20060284277 - Chung; Seung-pil ; et al. | 2006-12-21 |
Method of fabricating flash memory with u-shape floating gate
App 20060246666 - Han; Jeong-nam ; et al. | 2006-11-02 |
Method of forming capacitor for semiconductor device
Grant 7,125,766 - Kim , et al. October 24, 2 | 2006-10-24 |
Method of optimizing seasoning recipe for etch process
Grant 7,118,926 - Cho , et al. October 10, 2 | 2006-10-10 |
Semiconductor etching apparatus and method of etching semiconductor devices using same
App 20060205190 - Chi; Kyeong-koo ; et al. | 2006-09-14 |
Semiconductor device including bit line formed using damascene technique and method of fabricating the same
Grant 7,098,135 - Chung , et al. August 29, 2 | 2006-08-29 |
Method of fabricating flash memory device including control gate extensions
App 20060128099 - Kim; Dong-Chan ; et al. | 2006-06-15 |
Method for forming wire line by damascene process using hard mask formed from contacts
Grant 7,052,952 - Bae , et al. May 30, 2 | 2006-05-30 |
Methods of fabricating flash memory devices and flash memory devices fabricated thereby
App 20060094188 - Kim; Dong-Chan ; et al. | 2006-05-04 |
Methods of forming field effect transistors having t-shaped gate electrodes using carbon-based etching masks
App 20060079076 - Kim; Dong-Chan ; et al. | 2006-04-13 |
Methods of forming capacitor electrodes using fluorine and oxygen
App 20060040443 - Cho; Sung-Il ; et al. | 2006-02-23 |
Nonvolatile memory devices and methods of fabricating the same
App 20060027856 - Chung; Seung-Pil ; et al. | 2006-02-09 |
Methods of forming semiconductor devices including removing a thickness of a polysilicon gate layer
App 20060024932 - Park; Heung-Sik ; et al. | 2006-02-02 |
Method of manufacturing a semiconductor memory device
App 20050287738 - Cho, Sung-il ; et al. | 2005-12-29 |
Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same
App 20050282363 - Bai, Keun-Hee ; et al. | 2005-12-22 |
Semiconductor device including a field effect transistor and method of forming thereof
App 20050275042 - Hwang, Sung-Wook ; et al. | 2005-12-15 |
Methods of forming field effect transistors having recessed channel regions
App 20050266648 - Chung, Sung-hoon ; et al. | 2005-12-01 |
Method of forming capacitor for semiconductor device
App 20050245026 - Kim, Dong-Chan ; et al. | 2005-11-03 |
Semiconductor device having self-aligned contact plug and method for fabricating the same
App 20050158948 - Kim, Myeong-Cheol ; et al. | 2005-07-21 |
Method of fabricating semiconductor device having capacitor
App 20050130371 - Cho, Sung-Il ; et al. | 2005-06-16 |
Semiconductor device having self-aligned contact plug and method for fabricating the same
Grant 6,875,690 - Kim , et al. April 5, 2 | 2005-04-05 |
Method of fabricating semiconductor device having capacitor
Grant 6,867,096 - Cho , et al. March 15, 2 | 2005-03-15 |
DRAM cell
Grant 6,855,597 - Shin , et al. February 15, 2 | 2005-02-15 |
Etching process including plasma pretreatment for generating fluorine-free carbon-containing polymer on a photoresist pattern
App 20050003310 - Bai, Keun-Hee ; et al. | 2005-01-06 |
Semiconductor device with trench gate type transistor and method of manufacturing the same
App 20050001252 - Kim, Yong-Jin ; et al. | 2005-01-06 |
Method of fabricating semiconductor device having capacitor
App 20040266100 - Cho, Sung-Il ; et al. | 2004-12-30 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
App 20040223286 - Chu, Chang-woong ; et al. | 2004-11-11 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
Grant 6,793,767 - Chu , et al. September 21, 2 | 2004-09-21 |
Method for forming wire line by damascene process using hard mask formed from contacts
App 20040161923 - Bae, In-deog ; et al. | 2004-08-19 |
Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module
Grant 6,767,834 - Chung , et al. July 27, 2 | 2004-07-27 |
Semiconductor device including bit line formed using damascene technique and method of fabricating the same
App 20040137743 - Chung, Seung-Pil ; et al. | 2004-07-15 |
Semiconductor device having self-aligned contact plug and method for fabricating the same
App 20040119170 - Kim, Myeong-Cheol ; et al. | 2004-06-24 |
Method for etching an object using a plasma and an object etched by a plasma
App 20040089632 - Park, Heung-Sik ; et al. | 2004-05-13 |
Method of optimizing seasoning recipe for etch process
App 20040058459 - Cho, Hong ; et al. | 2004-03-25 |
Dram Cell
App 20030203569 - Shin, Chul-Ho ; et al. | 2003-10-30 |
Methods of fabricating cylinder-type capacitors for semiconductor devices using a hard mask and a mold layer
Grant 6,607,954 - Jeon , et al. August 19, 2 | 2003-08-19 |
Methods of fabricating cylinder-type capacitors for semiconductor devices using a hard mask and a mold layer
App 20030124796 - Jeon, Jeong-sic ; et al. | 2003-07-03 |
Semiconductor etching apparatus and method of etching semiconductor devices using same
App 20030116277 - Chi, Kyeong-Koo ; et al. | 2003-06-26 |
Method of manufacturing a semiconductor device having contact pads
Grant 6,562,651 - Chung , et al. May 13, 2 | 2003-05-13 |
Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system
Grant 6,534,921 - Seo , et al. March 18, 2 | 2003-03-18 |
Dram cell and method of manufacturing the same
App 20020109155 - Shin, Chul-Ho ; et al. | 2002-08-15 |
Method of manufacturing a semiconductor device having contact pads
App 20020090837 - Chung, Seung-Pil ; et al. | 2002-07-11 |
Method of manufacturing a self-aligned contact from a conductive layer that is free of voids
App 20020090808 - Jeon, Jeong-sic ; et al. | 2002-07-11 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
App 20020078891 - Chu, Chang-Woong ; et al. | 2002-06-27 |
Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module
App 20020064944 - Chung, Seung-pil ; et al. | 2002-05-30 |
Semiconductor etching apparatus and method of etching semiconductor devices using same
App 20020025681 - Chi, Kyeong-Koo ; et al. | 2002-02-28 |
Process and apparatus for dry-etching a semiconductor layer
App 20010051438 - Shin, Kyoung-Sub ; et al. | 2001-12-13 |
Method of manufacturing self-aligned contact hole
App 20010021576 - Chi, Kyeong-koo ; et al. | 2001-09-13 |
Methods for patterning microelectronic structures using chlorine, oxygen, and fluorine
Grant 6,159,811 - Shin , et al. December 12, 2 | 2000-12-12 |
Method and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamber
Grant 5,903,351 - Jeong , et al. May 11, 1 | 1999-05-11 |
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