Chi; Keh-Fei C.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chi; Keh-Fei C..The latest application filed is for "formation of vertical polysilicon resistor having a nitride sidewall for small static ram cell".
- Chi; Keh-Fei C. - Singapore SG
- Chi; Keh-Fei C. - Garden Grove CA
- Chi; Keh-Fei C. - Torrance CA
| Patent | Date |
|---|---|
| Formation of vertical polysilicon resistor having a nitride sidewall for small static RAM cell Grant 5,330,930 - Chi July 19, 1 | 1994-07-19 |
| Double polysilicon capacitor formation compatable with submicron processing Grant 5,173,437 - Chi December 22, 1 | 1992-12-22 |
| Planarization process for double metal MOS using spin-on glass as a sacrificial layer Grant 4,676,867 - Elkins , et al. June 30, 1 | 1987-06-30 |
| Dimension monitoring technique for semiconductor fabrication Grant 4,639,142 - Chow , et al. January 27, 1 | 1987-01-27 |
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