Chi; Chiu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chi; Chiu.The latest application filed is for "plasma etching of ir and pzt using a hard mask and c12/n2/o2 and c12/chf3/o2 chemistry".

Company Profile

0.6.4

Chi; Chiu - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods of forming moisture barrier for low K film integration with anti-reflective layers Grant 8,003,549 - Li , et al. August 23, 2	2011-08-23
Methods of forming moisture barrier for low k film integration with anti-reflective layers Grant 7,642,202 - Li , et al. January 5, 2	2010-01-05
Method for patterning multilevel interconnects Grant 6,875,699 - Lassig , et al. April 5, 2	2005-04-05
Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier Grant 6,773,930 - Summerfelt , et al. August 10, 2	2004-08-10
Detection of AIOx ears for process control in FeRAM processing Grant 6,767,750 - Summerfelt , et al. July 27, 2	2004-07-27
FeRAM sidewall diffusion barrier etch Grant 6,713,342 - Celii , et al. March 30, 2	2004-03-30
Plasma etching of Ir and PZT using a hard mask and C12/N2/O2 and C12/CHF3/O2 chemistry App 20030176073 - Ying, Chentsau ; et al.	2003-09-18
Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier App 20030129771 - Summerfelt, Scott R. ; et al.	2003-07-10
FeRAM sidewall diffusion barrier etch App 20030129847 - Celii, Francis G. ; et al.	2003-07-10
Detection of AIOx ears for process control in FeRAM processing App 20030124791 - Summerfelt, Scott R. ; et al.	2003-07-03

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