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Patent applications and USPTO patent grants for Cheung; David W..The latest application filed is for "method of depositing low k films".
Patent | Date |
---|---|
Dynamic access policies Grant 9,838,429 - Cheung , et al. December 5, 2 | 2017-12-05 |
Dynamic access policies Grant 8,819,763 - Cheung , et al. August 26, 2 | 2014-08-26 |
Integrated low k dielectrics and etch stops Grant 7,227,244 - Bjorkman , et al. June 5, 2 | 2007-06-05 |
Method of depositing low k films Grant 7,160,821 - Huang , et al. January 9, 2 | 2007-01-09 |
Method of depositing low k films App 20050260864 - Huang, Tzu-Fang ;   et al. | 2005-11-24 |
Integrated low K dielectrics and etch stops Grant 6,858,153 - Bjorkman , et al. February 22, 2 | 2005-02-22 |
Integrated low k dielectrics and etch stops App 20050023694 - Bjorkman, Claes H. ;   et al. | 2005-02-03 |
Method of depositing low K films Grant 6,806,207 - Huang , et al. October 19, 2 | 2004-10-19 |
Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds Grant 6,709,715 - Lang , et al. March 23, 2 | 2004-03-23 |
Integrated low k dielectrics and etch stops Grant 6,669,858 - Bjorkman , et al. December 30, 2 | 2003-12-30 |
Method of depositing low K films App 20030162410 - Huang, Tzu-Fang ;   et al. | 2003-08-28 |
Method of depositing low k films using an oxidizing plasma Grant 6,593,247 - Huang , et al. July 15, 2 | 2003-07-15 |
Intergrated low k dielectrics and etch stops App 20020084257 - Bjorkman, Claes H. ;   et al. | 2002-07-04 |
Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound Grant 6,413,583 - Moghadam , et al. July 2, 2 | 2002-07-02 |
Integrated low k dielectrics and etch stops App 20020074309 - Bjorkman, Claes H. ;   et al. | 2002-06-20 |
Integrated low K dielectrics and etch stops Grant 6,340,435 - Bjorkman , et al. January 22, 2 | 2002-01-22 |
Ceramic susceptor with embedded metal electrode and brazing material connection Grant 5,817,406 - Cheung , et al. October 6, 1 | 1998-10-06 |
Ceramic susceptor with embedded metal electrode and eutectic connection Grant 5,633,073 - Cheung , et al. May 27, 1 | 1997-05-27 |
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