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Patent applications and USPTO patent grants for Cheshire; Alan.The latest application filed is for "etch processing chamber".
Patent | Date |
---|---|
Methods for etching a substrate Grant 9,318,341 - Chebi , et al. April 19, 2 | 2016-04-19 |
Method and apparatus for etching Grant 8,937,017 - Cheshire , et al. January 20, 2 | 2015-01-20 |
Method and apparatus for etching Grant 8,298,959 - Cheshire October 30, 2 | 2012-10-30 |
Etch Processing Chamber App 20120208300 - Cheshire; Alan ;   et al. | 2012-08-16 |
Methods And Apparatus For Gas Delivery Into Plasma Processing Chambers App 20120152900 - CHEBI; ROBERT P. ;   et al. | 2012-06-21 |
Methods For Etching A Substrate App 20120152895 - CHEBI; ROBERT P. ;   et al. | 2012-06-21 |
Plasma Processing Apparatus With Reduced Effects Of Process Chamber Asymmetry App 20120103524 - CHEBI; Robert ;   et al. | 2012-05-03 |
Method And Apparatus For Etching App 20100308014 - Cheshire; Alan | 2010-12-09 |
Method And Apparatus For Etching App 20100197138 - Cheshire; Alan ;   et al. | 2010-08-05 |
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