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Patent applications and USPTO patent grants for Chervenak; Steve.The latest application filed is for "sputtering cathode adapter assembly and method".
Patent | Date |
---|---|
Sputtering cathode adapter assembly and method App 20060032741 - Lawson; John ;   et al. | 2006-02-16 |
Sputtering cathode adapter assembly and method Grant 6,998,033 - Lawson , et al. February 14, 2 | 2006-02-14 |
Single piece pod shield for vertical plenum wafer processing machine Grant 6,837,974 - Lawson , et al. January 4, 2 | 2005-01-04 |
Sputtering cathode adapter assembly and method App 20040020759 - Lawson, John ;   et al. | 2004-02-05 |
Single piece pod shield for vertical plenum wafer processing machine App 20030146085 - Lawson, John ;   et al. | 2003-08-07 |
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