| Patent | Date |
|---|
Template replication
Grant 11,454,883 - Choi , et al. September 27, 2 | 2022-09-27 |
Nanoimprint lithography system and method for adjusting a radiation pattern that compensates for slippage of a template
Grant 11,366,384 - Cherala , et al. June 21, 2 | 2022-06-21 |
Overlay improvement in nanoimprint lithography
Grant 11,347,144 - Cherala , et al. May 31, 2 | 2022-05-31 |
Systems and methods for curing an imprinted field
Grant 11,327,409 - Roy , et al. May 10, 2 | 2022-05-10 |
Nanofabrication method with correction of distortion within an imprint system
Grant 11,262,652 - Cherala , et al. March 1, 2 | 2022-03-01 |
Nanofabrication Method With Correction Of Distortion Within An Imprint System
App 20210405524 - Cherala; Anshuman ; et al. | 2021-12-30 |
Method and apparatus to improve frame cure imaging resolution for extrusion control
Grant 11,199,774 - Roy , et al. December 14, 2 | 2021-12-14 |
Method And Apparatus To Improve Frame Cure Imaging Resolution For Extrusion Control
App 20210302829 - Roy; Nilabh K. ; et al. | 2021-09-30 |
Nanofabrication Method with Correction of Distortion Within an Imprint System
App 20210191257 - Choi; Byung-Jin ; et al. | 2021-06-24 |
Nanoimprint Lithography System and Method for Adjusting a Radiation Pattern that Compensates for Slippage of a Template
App 20210191256 - Cherala; Anshuman ; et al. | 2021-06-24 |
Safe separation for nano imprinting
Grant 11,020,894 - Im , et al. June 1, 2 | 2021-06-01 |
Systems and Methods for Curing a Shaped Film
App 20210157229 - Cherala; Anshuman ; et al. | 2021-05-27 |
Real-time correction of template deformation in nanoimprint lithography
Grant 10,996,560 - Cherala , et al. May 4, 2 | 2021-05-04 |
Systems and Methods for Curing an Imprinted Field
App 20210124274 - Roy; Nilabh K. ; et al. | 2021-04-29 |
Overlay Improvement In Nanoimprint Lithography
App 20210063870 - Cherala; Anshuman ; et al. | 2021-03-04 |
Overlay improvement in nanoimprint lithography
Grant 10,866,510 - Cherala , et al. December 15, 2 | 2020-12-15 |
Adaptive chucking system
Grant 10,578,984 - Meissl , et al. | 2020-03-03 |
Apparatus for use in forming an adaptive layer and a method of using the same
Grant 10,553,501 - Cherala , et al. Fe | 2020-02-04 |
Apparatus For Use In Forming An Adaptive Layer And A Method Of Using The Same
App 20190304850 - CHERALA; Anshuman ; et al. | 2019-10-03 |
Imprint apparatus and article manufacturing method
Grant 10,335,984 - Choi , et al. | 2019-07-02 |
Safe Separation for Nano Imprinting
App 20190061228 - Im; Se-Hyuk ; et al. | 2019-02-28 |
Imprint apparatus, and method of manufacturing article
Grant 10,199,244 - Kawahara , et al. Fe | 2019-02-05 |
Real-time Correction Of Template Deformation In Nanoimprint Lithography
App 20190033708 - Cherala; Anshuman ; et al. | 2019-01-31 |
Overlay Improvement In Nanoimprint Lithography
App 20190033709 - Cherala; Anshuman ; et al. | 2019-01-31 |
Multi-field overlay control in jet and flash imprint lithography
Grant 10,191,368 - Sreenivasan , et al. Ja | 2019-01-29 |
Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures
Grant 10,026,609 - Sreenivasan , et al. July 17, 2 | 2018-07-17 |
Adaptive Chucking System
App 20180173119 - Meissl; Mario Johannes ; et al. | 2018-06-21 |
Method of imprinting to correct for a distortion within an imprint system
Grant 9,993,962 - Cherala June 12, 2 | 2018-06-12 |
Template Replication
App 20180136556 - Choi; Byung-Jin ; et al. | 2018-05-17 |
Method Of Imprinting To Correct For A Distortion Within An Imprint System
App 20170334126 - Cherala; Anshuman | 2017-11-23 |
Porous template and imprinting stack for nano-imprint lithography
Grant 9,778,562 - Xu , et al. October 3, 2 | 2017-10-03 |
Low contact imprint lithography template chuck system for improved overlay correction
Grant 9,778,578 - Meissl , et al. October 3, 2 | 2017-10-03 |
Multi-field Overlay Control In Jet And Flash Imprint Lithography
App 20170131640 - Sreenivasan; Sidlgata V. ; et al. | 2017-05-11 |
Imprint Apparatus, And Method Of Manufacturing Article
App 20170047234 - Kawahara; Nobuto ; et al. | 2017-02-16 |
Imprint Apparatus And Article Manufacturing Method
App 20170028598 - Choi; Byung-jin ; et al. | 2017-02-02 |
Nanoshape Patterning Techniques That Allow High-speed And Low-cost Fabrication Of Nanoshape Structures
App 20160118249 - Sreenivasan; Sidlgata V. ; et al. | 2016-04-28 |
Safe Separation For Nano Imprinting
App 20150165671 - Im; Se-Hyuk ; et al. | 2015-06-18 |
Low Contact Imprint Lithography Template Chuck System For Improved Overlay Correction
App 20150131072 - Meissl; Mario Johannes ; et al. | 2015-05-14 |
Safe separation for nano imprinting
Grant 8,968,620 - Im , et al. March 3, 2 | 2015-03-03 |
Safe Deparation For Nano Imprinting
App 20110260361 - Im; Se-Hyuk ; et al. | 2011-10-27 |
Chucking system comprising an array of fluid chambers
Grant 8,033,813 - Cherala , et al. October 11, 2 | 2011-10-11 |
Chucking system for nano-manufacturing
Grant 8,033,815 - Babbs , et al. October 11, 2 | 2011-10-11 |
Large Area Linear Array Nanoimprinting
App 20110084417 - Choi; Byung-Jin ; et al. | 2011-04-14 |
Chucking System for Nano-Manufacturing
App 20110014314 - Babbs; Daniel A. ; et al. | 2011-01-20 |
Chucking System for Nano-Manufacturing
App 20100314803 - Babbs; Daniel A. ; et al. | 2010-12-16 |
Method For Obtaining Force Combinations For Template Deformation Using Nullspace And Methods Optimization Techniques
App 20100259745 - Cherala; Anshuman ; et al. | 2010-10-14 |
Chucking system for nano-manufacturing
Grant 7,798,801 - Babbs , et al. September 21, 2 | 2010-09-21 |
Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques
Grant 7,768,624 - Cherala , et al. August 3, 2 | 2010-08-03 |
Chucking System Comprising an Array of Fluid Chambers
App 20100059914 - Cherala; Anshuman ; et al. | 2010-03-11 |
Method of retaining a substrate to a wafer chuck
Grant 7,636,999 - Choi , et al. December 29, 2 | 2009-12-29 |
Method of separating a mold from a solidified layer disposed on a substrate
Grant 7,635,445 - Choi , et al. December 22, 2 | 2009-12-22 |
Chucking system comprising an array of fluid chambers
Grant 7,635,263 - Cherala , et al. December 22, 2 | 2009-12-22 |
Porous Template And Imprinting Stack For Nano-imprint Lithography
App 20090140458 - Xu; Frank Y. ; et al. | 2009-06-04 |
System and method for improvement of alignment and overlay for microlithography
Grant 7,535,549 - Cherala , et al. May 19, 2 | 2009-05-19 |
Partial vacuum environment imprinting
Grant 7,462,028 - Cherala , et al. December 9, 2 | 2008-12-09 |
Method of varying dimensions of a substrate during nano-scale manufacturing
Grant 7,420,654 - Cherala , et al. September 2, 2 | 2008-09-02 |
Magnification correction employing out-of-plane distortion of a substrate
Grant 7,323,130 - Nimmakayala , et al. January 29, 2 | 2008-01-29 |
Method For Obtaining Force Combinations For Template Deformation Using Nullspace And Methods Optimization Techniques
App 20070287081 - Cherala; Anshuman ; et al. | 2007-12-13 |
Partial Vacuum Environment Imprinting
App 20070275114 - Cherala; Anshuman ; et al. | 2007-11-29 |
System for varying dimensions of a substrate during nanoscale manufacturing
Grant 7,298,456 - Cherala , et al. November 20, 2 | 2007-11-20 |
System to vary dimensions of a thin template
App 20070231422 - Cherala; Anshuman ; et al. | 2007-10-04 |
Applying imprinting material to substrates employing electromagnetic fields
Grant 7,261,830 - Cherala , et al. August 28, 2 | 2007-08-28 |
Chucking system comprising an array of fluid chambers
App 20070190200 - Cherala; Anshuman ; et al. | 2007-08-16 |
Apparatus to vary dimensions of a substrate during nano-scale manufacturing
Grant 7,170,589 - Cherala , et al. January 30, 2 | 2007-01-30 |
Method of separating a mold from a solidified layer disposed on a substrate
App 20060172549 - Choi; Byung-Jin ; et al. | 2006-08-03 |
Chucking system for nano-manufacturing
App 20060172031 - Babbs; Daniel A. ; et al. | 2006-08-03 |
Method of retaining a substrate to a wafer chuck
App 20060172553 - Choi; Byung-Jin ; et al. | 2006-08-03 |
System for varying dimensions of a substrate during nanoscale manufacturing
App 20060001194 - Cherala; Anshuman ; et al. | 2006-01-05 |
Apparatus to vary dimensions of a substrate during nano-scale manufacturing
App 20060001857 - Cherala; Anshuman ; et al. | 2006-01-05 |
Method of varying dimensions of a substrate during nano-scale manufacturing
App 20050269745 - Cherala, Anshuman ; et al. | 2005-12-08 |
System and method for improvement of alignment and overlay for microlithography
App 20050271955 - Cherala, Anshuman ; et al. | 2005-12-08 |
System for magnification and distortion correction during nano-scale manufacturing
App 20050270516 - Cherala, Anshuman ; et al. | 2005-12-08 |
Applying imprinting material to substrates employing electromagnetic fields
App 20050082253 - Cherala, Anshuman ; et al. | 2005-04-21 |
Magnification correction employing out-of-plane distortion of a substrate
App 20040146792 - Nimmakayala, Pawan K. ; et al. | 2004-07-29 |
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