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Patent applications and USPTO patent grants for Cheon; Min Ho.The latest application filed is for "substrate supporting apparatus".
Patent | Date |
---|---|
Substrate supporting apparatus Grant 11,417,562 - Chun , et al. August 16, 2 | 2022-08-16 |
Substrate Supporting Apparatus App 20210082738 - CHUN; Dong Seok ;   et al. | 2021-03-18 |
Gas Spraying Apparatus Of Substrate Processing Apparatus, Substrate Processing Apparatus And Substrate Processing Method App 20200219700 - CHEON; Min Ho ;   et al. | 2020-07-09 |
Substrate processing method Grant 10,373,821 - Shin , et al. | 2019-08-06 |
Substrate Processing Apparatus App 20190035607 - KIM; Se Young ;   et al. | 2019-01-31 |
Substrate Treatment Device And Substrate Treatment Method App 20180269078 - CHEON; Min Ho ;   et al. | 2018-09-20 |
Substrate Processing Method App 20170345647 - SHIN; Seung Chul ;   et al. | 2017-11-30 |
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