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Patent applications and USPTO patent grants for Cheng; Wing.The latest application filed is for "device and method for providing radiation occlusion and aero-thermal protection".
Patent | Date |
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Device and method for providing radiation occlusion and aero-thermal protection Grant 8,056,858 - Koehler , et al. November 15, 2 | 2011-11-15 |
Device And Method For Providing Radiation Occlusion And Aero-thermal Protection App 20100270430 - Koehler; Frederick ;   et al. | 2010-10-28 |
Chemical resistant semiconductor processing chamber bodies App 20080038448 - Kholodenko; Arnold ;   et al. | 2008-02-14 |
Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber Grant 6,795,292 - Grimard , et al. September 21, 2 | 2004-09-21 |
Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber App 20020171994 - Grimard, Dennis ;   et al. | 2002-11-21 |
Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas App 20010024349 - Shamoulian, Shamouil ;   et al. | 2001-09-27 |
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