loadpatents
Patent applications and USPTO patent grants for Cheng; Wei Chang.The latest application filed is for "photolithography method and photolithography system".
Patent | Date |
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Photolithography Method and Photolithography System App 20210372946 - Liao; Chi-Hung ;   et al. | 2021-12-02 |
Temperature Controlling Apparatus App 20210333714 - Liao; Chi-Hung ;   et al. | 2021-10-28 |
Method for providing deionized water with dynamic electrical resistivity Grant 11,130,107 - Liao , et al. September 28, 2 | 2021-09-28 |
Photolithography method and photolithography system Grant 11,099,139 - Liao , et al. August 24, 2 | 2021-08-24 |
Temperature controlling apparatus Grant 11,067,891 - Liao , et al. July 20, 2 | 2021-07-20 |
Reticle Cleaning System App 20210216010 - CHENG; Wei-Chang ;   et al. | 2021-07-15 |
Apparatus And Methods For Exhaust Cleaning App 20210205861 - CHENG; Wei Chang ;   et al. | 2021-07-08 |
Dispensing Nozzle Design and Dispensing Method Thereof App 20210200095 - Cheng; Wei Chang ;   et al. | 2021-07-01 |
Drainage for temperature and humidity controlling system Grant 11,035,619 - Cheng , et al. June 15, 2 | 2021-06-15 |
Exhaust system and method of using Grant 11,022,018 - Cheng , et al. June 1, 2 | 2021-06-01 |
Apparatus and methods for exhaust cleaning Grant 10,987,706 - Cheng , et al. April 27, 2 | 2021-04-27 |
Reticle cleaning system and method for using the same Grant 10,955,741 - Cheng , et al. March 23, 2 | 2021-03-23 |
Dispensing nozzle design and dispensing method thereof Grant 10,948,824 - Cheng , et al. March 16, 2 | 2021-03-16 |
Method Of Operating Drippage Prevention System App 20210016316 - WANG; Chien-Hung ;   et al. | 2021-01-21 |
Drippage prevention system and method of operating same Grant 10,792,697 - Wang , et al. October 6, 2 | 2020-10-06 |
Photolithography Method and Photolithography System App 20200292470 - Liao; Chi-Hung ;   et al. | 2020-09-17 |
Temperature Controlling Apparatus App 20200264510 - Liao; Chi-Hung ;   et al. | 2020-08-20 |
Apparatus And Methods For Exhaust Cleaning App 20200197987 - CHENG; Wei Chang ;   et al. | 2020-06-25 |
Method for forming photoresist layer Grant 10,678,133 - Liao , et al. | 2020-06-09 |
Photolithography method and photolithography system Grant 10,670,540 - Liao , et al. | 2020-06-02 |
Method For Forming Photoresist Layer App 20200117090 - Liao; Chi-Hung ;   et al. | 2020-04-16 |
Apparatus and methods for exhaust cleaning Grant 10,618,085 - Cheng , et al. | 2020-04-14 |
Exhaust System And Method Of Using App 20200080463 - CHENG; Wei Chang ;   et al. | 2020-03-12 |
Method For Providing Deionized Water With Dynamic Electrical Resistivity App 20200061559 - LIAO; Chi-Hung ;   et al. | 2020-02-27 |
Chemical Mechanical Polishing Method And Apparatus App 20200055160 - CHENG; Wei-Chang ;   et al. | 2020-02-20 |
Reticle Cleaning System And Method For Using The Same App 20200057367 - CHENG; Wei-Chang ;   et al. | 2020-02-20 |
Dispensing Nozzle Design and Dispensing Method Thereof App 20200004153 - Cheng; Wei Chang ;   et al. | 2020-01-02 |
Photolithography Method and Photolithography System App 20200003701 - Liao; Chi-Hung ;   et al. | 2020-01-02 |
Temperature controlling apparatus and method for forming coating layer Grant 10,509,321 - Liao , et al. Dec | 2019-12-17 |
Exhaust system and method of using Grant 10,473,021 - Cheng , et al. Nov | 2019-11-12 |
System and method for providing deionized water with dynamic electrical resistivity Grant 10,464,032 - Liao , et al. No | 2019-11-05 |
Temperature Controlling Apparatus And Method For Forming Coating Layer App 20190235384 - Liao; Chi-Hung ;   et al. | 2019-08-01 |
Apparatus And Methods For Exhaust Cleaning App 20180345334 - Cheng; Wei Chang ;   et al. | 2018-12-06 |
Drippage Prevention System And Method Of Operating Same App 20180333738 - WANG; Chien-Hung ;   et al. | 2018-11-22 |
System And Method For Providing Deionized Water With Dynamic Electrical Resistivity App 20180304215 - LIAO; Chi-Hung ;   et al. | 2018-10-25 |
Drainage for Temperature Humidity Controlling System App 20180164839 - Cheng; Wei-Chang ;   et al. | 2018-06-14 |
Exhaust System And Method Of Using App 20180149067 - CHENG; Wei Chang ;   et al. | 2018-05-31 |
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