Cheng; Siu F.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Cheng; Siu F..The latest application filed is for "shadow ring for modifying wafer edge and bevel deposition".

Company Profile

3.10.11

Cheng; Siu F. - Culver City CA
Cheng; Siu F. - Los Angeles CA US
Cheng; Siu F. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Shadow ring for modifying wafer edge and bevel deposition Grant 11,136,665 - Bois , et al. October 5, 2	2021-10-05
Shadow Ring For Modifying Wafer Edge And Bevel Deposition App 20190153592 - BOIS; Dale Du ; et al.	2019-05-23
Shadow ring for modifying wafer edge and bevel deposition Grant 10,227,695 - Du Bois , et al.	2019-03-12
Preparing tool surfaces for composites Grant 10,118,315 - Cheng , et al. November 6, 2	2018-11-06
Nitrogen Doped Amorphous Carbon Hardmask App 20160086794 - CHENG; Siu F. ; et al.	2016-03-24
Nitrogen Doped Amorphous Carbon Hardmask App 20140370711 - CHENG; Siu F. ; et al.	2014-12-18
Passivating glue layer to improve amorphous carbon to metal adhesion Grant 8,569,105 - Cheng , et al. October 29, 2	2013-10-29
Amorphous carbon deposition method for improved stack defectivity Grant 8,349,741 - Yu , et al. January 8, 2	2013-01-08
Passivating glue layer to improve amorphous carbon to metal adhesion Grant 8,278,139 - Cheng , et al. October 2, 2	2012-10-02
Amorphous Carbon Deposition Method For Improved Stack Defectivity App 20120208374 - Yu; Hang ; et al.	2012-08-16
Passivating Glue Layer To Improve Amorphous Carbon To Metal Adhesion App 20120208339 - Cheng; Siu F. ; et al.	2012-08-16
Amorphous carbon deposition method for improved stack defectivity Grant 8,227,352 - Yu , et al. July 24, 2	2012-07-24
Variable Resistance Memory Element And Fabrication Methods App 20120043518 - CHENG; Siu F. ; et al.	2012-02-23
Amorphous Carbon Deposition Method For Improved Stack Defectivity App 20120015521 - Yu; Hang ; et al.	2012-01-19
Nonplanar faceplate for a plasma processing chamber Grant 8,097,082 - Zhou , et al. January 17, 2	2012-01-17
Nitrogen Doped Amorphous Carbon Hardmask App 20110244142 - CHENG; SIU F. ; et al.	2011-10-06
Shadow Ring For Modifying Wafer Edge And Bevel Deposition App 20110159211 - Du Bois; Dale R. ; et al.	2011-06-30
Passivating Glue Layer To Improve Amorphous Carbon To Metal Adhesion App 20110076826 - Cheng; Siu F. ; et al.	2011-03-31
Nonplanar Faceplate For A Plasma Processing Chamber App 20090269512 - Zhou; Jianhua ; et al.	2009-10-29

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