Cheng; Nai-Han
Patent Applications and Registrations
Patent applications and USPTO patent grants for Cheng; Nai-Han.The latest application filed is for "broadband wafer defect detection".
Company Profile
11.41.42
- Cheng; Nai-Han - Zhudong Township TW
- CHENG; Nai-Han - Hsinchu County TW
- Cheng; Nai-Han - Hsinchu TW
- Cheng; Nai-Han - Hsin-Chu TW
- CHENG; Nai-Han - Hsinchu City TW
- - Hsinchu County TW
- Cheng; Nai-Han - Hsin-Chu City TW
Patent Activity
| Patent | Date |
|---|---|
| Ion implantation system and source bushing thereof Grant 11,282,673 - Meng , et al. March 22, 2 | 2022-03-22 |
| Broadband Wafer Defect Detection App 20210333220 - CHENG; Nai-Han ; et al. | 2021-10-28 |
| Ion Implantation Gas Supply System App 20210319978 - Hsu; Hsing-Piao ; et al. | 2021-10-14 |
| Ion impantation gas supply system Grant 11,081,315 - Hsu , et al. August 3, 2 | 2021-08-03 |
| 3D IC bump height metrology APC Grant 11,075,097 - Cheng , et al. July 27, 2 | 2021-07-27 |
| Broadband wafer defect detection Grant 11,060,980 - Cheng , et al. July 13, 2 | 2021-07-13 |
| Method For Manufacturing Semiconductor Structure App 20200402806 - CHENG; NAI-HAN ; et al. | 2020-12-24 |
| Ion Impantation Gas Supply System App 20200395193 - HSU; Hsing-Piao ; et al. | 2020-12-17 |
| Ion Implantation System And Source Bushing Thereof App 20200381210 - MENG; Ying-Chieh ; et al. | 2020-12-03 |
| Ion implantation system and source bushing thereof Grant 10,784,079 - Meng , et al. Sept | 2020-09-22 |
| Semiconductor manufacturing apparatus and method thereof Grant 10,763,117 - Cheng , et al. Sep | 2020-09-01 |
| 3d Ic Bump Height Metrology Apc App 20200152495 - Cheng; Nai-Han ; et al. | 2020-05-14 |
| Ion Implantation System And Source Bushing Thereof App 20200098544 - MENG; Ying-Chieh ; et al. | 2020-03-26 |
| 3D IC bump height metrology APC Grant 10,541,164 - Cheng , et al. Ja | 2020-01-21 |
| Broadband Wafer Defect Detection App 20190162676 - CHENG; Nai-Han ; et al. | 2019-05-30 |
| 3d Ic Bump Height Metrology Apc App 20190139800 - Cheng; Nai-Han ; et al. | 2019-05-09 |
| Ion beam source for semiconductor ion implantation Grant 10,269,530 - Hsu , et al. | 2019-04-23 |
| 3D IC bump height metrology APC Grant 10,181,415 - Cheng , et al. Ja | 2019-01-15 |
| Semiconductor Manufacturing Apparatus And Method Thereof App 20180166291 - CHENG; NAI-HAN ; et al. | 2018-06-14 |
| 3d Ic Bump Height Metrology Apc App 20180096872 - Cheng; Nai-Han ; et al. | 2018-04-05 |
| Defect inspection and repairing method and associated system and non-transitory computer readable medium Grant 9,929,045 - Cheng , et al. March 27, 2 | 2018-03-27 |
| Wafer processing system using multi-zone chuck Grant 9,892,954 - Cheng , et al. February 13, 2 | 2018-02-13 |
| Semiconductor manufacturing apparatus and method thereof Grant 9,892,931 - Cheng , et al. February 13, 2 | 2018-02-13 |
| Defect Inspection And Repairing Method And Associated System And Non-transitory Computer Readable Medium App 20180019166 - CHENG; NAI-HAN ; et al. | 2018-01-18 |
| Ion implantation with charge and direction control Grant 9,865,429 - Hwang , et al. January 9, 2 | 2018-01-09 |
| 3D IC bump height metrology APC Grant 9,859,139 - Cheng , et al. January 2, 2 | 2018-01-02 |
| Ion beam dimension control for ion implantation process and apparatus, and advanced process control Grant 9,805,913 - Hwang , et al. October 31, 2 | 2017-10-31 |
| 3d Ic Bump Height Metrology Apc App 20170018445 - Cheng; Nai-Han ; et al. | 2017-01-19 |
| Method for monitoring ion implantation Grant 9,449,889 - Chang , et al. September 20, 2 | 2016-09-20 |
| Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressure Grant 9,315,892 - Cheng , et al. April 19, 2 | 2016-04-19 |
| Substrate rapid thermal heating system and methods Grant 9,239,192 - Cheng , et al. January 19, 2 | 2016-01-19 |
| Beam monitoring device, method, and system Grant 9,218,938 - Cheng December 22, 2 | 2015-12-22 |
| Ion Beam Dimension Control For Ion Implantation Process And Apparatus, And Advanced Process Control App 20150270103 - HWANG; Chih-Hong ; et al. | 2015-09-24 |
| Method for Monitoring Ion Implantation App 20150221561 - Chang; Chun-Lin ; et al. | 2015-08-06 |
| Ion beam dimension control for ion implantation process and apparatus, and advanced process control Grant 9,070,534 - Hwang , et al. June 30, 2 | 2015-06-30 |
| Dosage accuracy monitoring systems of implanters Grant 9,048,069 - Chen , et al. June 2, 2 | 2015-06-02 |
| Multi-factor advanced process control method and system for integrated circuit fabrication Grant 9,031,684 - Cheng , et al. May 12, 2 | 2015-05-12 |
| Semiconductor Manufacturing Apparatus And Method Thereof App 20150104949 - CHENG; NAI-HAN ; et al. | 2015-04-16 |
| Apparatus for monitoring ion implantation Grant 9,006,676 - Chang , et al. April 14, 2 | 2015-04-14 |
| ION Implantation with Charge and Direction Control App 20150069913 - Hwang; Chih-Hong ; et al. | 2015-03-12 |
| Ion implantation with charge and direction control Grant 8,922,122 - Hwang , et al. December 30, 2 | 2014-12-30 |
| Ion implantation with charge and direction control Grant 08922122 - | 2014-12-30 |
| Beam Monitoring Device, Method, and System App 20140306119 - Hwang; Chih-Hong ; et al. | 2014-10-16 |
| Ion Implantation App 20140273420 - Cheng; Nai-Han ; et al. | 2014-09-18 |
| Substrate Rapid Thermal Heating System And Methods App 20140235071 - CHENG; Nai-Han ; et al. | 2014-08-21 |
| Wafer Processing System Using Multi-zone Chuck App 20140202383 - CHENG; Nai-Han ; et al. | 2014-07-24 |
| Beam monitoring device, method, and system Grant 8,766,207 - Hwang , et al. July 1, 2 | 2014-07-01 |
| Wafer processing method and system using multi-zone chuck Grant 8,709,528 - Cheng , et al. April 29, 2 | 2014-04-29 |
| Multi-ion beam implantation apparatus and method Grant 8,592,785 - Cheng , et al. November 26, 2 | 2013-11-26 |
| Apparatus for monitoring ion implantation Grant 8,581,204 - Chang , et al. November 12, 2 | 2013-11-12 |
| Ion Beam Dimension Control For Ion Implantation Process And Apparatus, And Advanced Process Control App 20130295753 - HWANG; Chih-Hong ; et al. | 2013-11-07 |
| Apparatus for Monitoring Ion Implantation App 20130280823 - Chang; Chun-Lin ; et al. | 2013-10-24 |
| Wafer Processing Method And System Using Multi-zone Chuck App 20130171336 - CHENG; Nai-Han ; et al. | 2013-07-04 |
| Ion Implantation With Charge And Direction Control App 20130140987 - Hwang; Chih-Hong ; et al. | 2013-06-06 |
| Multi-factor Advanced Process Control Method And System For Integrated Circuit Fabrication App 20130110276 - Cheng; Nai-Han ; et al. | 2013-05-02 |
| Multi-ion Beam Implantation Apparatus And Method App 20130075623 - CHENG; Nai-Han ; et al. | 2013-03-28 |
| Beam Monitoring Device, Method, And System App 20130075624 - Hwang; Chih-Hong ; et al. | 2013-03-28 |
| Apparatus for Monitoring Ion Implantation App 20130068960 - Chang; Chun-Lin ; et al. | 2013-03-21 |
| Method and system for controlling an implantation process Grant 8,241,924 - Cheng , et al. August 14, 2 | 2012-08-14 |
| Shallow junction formation and high dopant activation rate of MOS devices Grant 8,212,253 - Nieh , et al. July 3, 2 | 2012-07-03 |
| Shallow Junction Formation and High Dopant Activation Rate of MOS Devices App 20110316079 - Nieh; Chun-Feng ; et al. | 2011-12-29 |
| Junction profile engineering using staged thermal annealing Grant 8,058,134 - Wang , et al. November 15, 2 | 2011-11-15 |
| Shallow junction formation and high dopant activation rate of MOS devices Grant 8,039,375 - Nieh , et al. October 18, 2 | 2011-10-18 |
| Method And System For Controlling An Implantation Process App 20100221849 - Cheng; Nai-Han ; et al. | 2010-09-02 |
| Junction Profile Engineering Using Staged Thermal Annealing App 20100210086 - Wang; Li-Ting ; et al. | 2010-08-19 |
| Dosage accuracy monitoring systems of implanters App 20080296472 - Chen; Juan-Lin ; et al. | 2008-12-04 |
| Shallow junction formation and high dopant activation rate of MOS devices App 20080293204 - Nieh; Chun-Feng ; et al. | 2008-11-27 |
| Systems and methods for implant dosage control Grant 7,385,208 - Cheng , et al. June 10, 2 | 2008-06-10 |
| Systems and methods for implant dosage control App 20070023695 - Cheng; Nai-Han ; et al. | 2007-02-01 |
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