| Patent | Date |
|---|
Piezoelectric Anti-stiction Structure For Microelectromechanical Systems
App 20220306452 - Hu; Fan ; et al. | 2022-09-29 |
Piezoelectric anti-stiction structure for microelectromechanical systems
Grant 11,365,115 - Hu , et al. June 21, 2 | 2022-06-21 |
Manufacturing Method Of Semiconductor Structure
App 20220185656 - CHANG; YI-HSIEN ; et al. | 2022-06-16 |
Direct sensing BioFETs and methods of manufacture
Grant 11,353,421 - Chang , et al. June 7, 2 | 2022-06-07 |
BioFET and method of manufacturing the same
Grant 11,320,395 - Lin , et al. May 3, 2 | 2022-05-03 |
Reduction of electric field enhanced moisture penetration by metal shielding
Grant 11,289,568 - Shih , et al. March 29, 2 | 2022-03-29 |
Method for forming biochips and biochips with non-organic landings for improved thermal budget
Grant 11,280,786 - Chu , et al. March 22, 2 | 2022-03-22 |
Manufacturing method of semiconductor structure
Grant 11,267,693 - Chang , et al. March 8, 2 | 2022-03-08 |
MEMS device
Grant 11,220,422 - Hu , et al. January 11, 2 | 2022-01-11 |
Integrated Circuit Devices And Method Of Manufacturing The Same
App 20210389273 - Lin; Ching-Hui ; et al. | 2021-12-16 |
Integration Scheme For Breakdown Voltage Enhancement Of A Piezoelectric Metal-insulator-metal Device
App 20210383972 - Lin; Anderson ; et al. | 2021-12-09 |
Biochip Having A Channel
App 20210302367 - LIU; Yi-Shao ; et al. | 2021-09-30 |
Integration scheme for breakdown voltage enhancement of a piezoelectric metal-insulator-metal device
Grant 11,107,630 - Lin , et al. August 31, 2 | 2021-08-31 |
MEMS devices and methods of fabrication thereof
Grant 11,104,129 - Peng , et al. August 31, 2 | 2021-08-31 |
Method of fabricating semiconductor structure
Grant 11,097,941 - Chang , et al. August 24, 2 | 2021-08-24 |
Backside CMOS compatible BioFET with no plasma induced damage
Grant 11,099,152 - Liu , et al. August 24, 2 | 2021-08-24 |
Semiconductor Device With Biofet And Biometric Sensors
App 20210240959 - LIN; Ching-Hui ; et al. | 2021-08-05 |
Differential Sensing With Biofet Sensors
App 20210231603 - LIN; Ching-Hui ; et al. | 2021-07-29 |
Hybrid Ultrasonic Transducer And Method Of Forming The Same
App 20210193904 - TSAI; YI HENG ; et al. | 2021-06-24 |
Method of using biochip with biosensors
Grant 10,989,685 - Liu , et al. April 27, 2 | 2021-04-27 |
Optical Detection for Bio-Entities
App 20210115507 - Chang; Allen Timothy ; et al. | 2021-04-22 |
Bio-field Effect Transistor Device
App 20210116413 - HUANG; Jui-Cheng ; et al. | 2021-04-22 |
Semiconductor Device With Biofet And Biometric Sensors
App 20210117636 - LIN; Ching-Hui ; et al. | 2021-04-22 |
Semiconductor device with bioFET and biometric sensors
Grant 10,984,211 - Lin , et al. April 20, 2 | 2021-04-20 |
Differential sensing with BioFET sensors
Grant 10,955,379 - Lin , et al. March 23, 2 | 2021-03-23 |
Hybrid Ultrasonic Transducer And Method Of Forming The Same
App 20210078857 - TSAI; YI HENG ; et al. | 2021-03-18 |
Hybrid ultrasonic transducer and method of forming the same
Grant 10,944,041 - Tsai , et al. March 9, 2 | 2021-03-09 |
Piezoelectric Anti-stiction Structure For Microelectromechanical Systems
App 20210061641 - Hu; Fan ; et al. | 2021-03-04 |
Bio-field effect transistor device
Grant 10,876,997 - Huang , et al. December 29, 2 | 2020-12-29 |
Optical detection for bio-entities
Grant 10,865,443 - Chang , et al. December 15, 2 | 2020-12-15 |
Manufacturing Method Of Semiconductor Struture
App 20200361763 - CHANG; YI-HSIEN ; et al. | 2020-11-19 |
MEMS transducer and method for manufacturing the same
Grant 10,829,364 - Cheng , et al. November 10, 2 | 2020-11-10 |
Semiconductor Structure And Method For Fabricating The Same
App 20200346926 - SHEN; WEI-CHENG ; et al. | 2020-11-05 |
Method For Manufacturing Semiconductor And Structure And Operation Of The Same
App 20200350311 - Huang; Fu-Chun ; et al. | 2020-11-05 |
Mems Device
App 20200290863 - HU; FAN ; et al. | 2020-09-17 |
Method for manufacturing semiconductor and structure and operation of the same
Grant 10,756,086 - Huang , et al. A | 2020-08-25 |
Semiconductor structure and manufacturing method thereof
Grant 10,737,931 - Chang , et al. A | 2020-08-11 |
Semiconductor structure and method for fabricating the same
Grant 10,737,936 - Shen , et al. A | 2020-08-11 |
MEMS devices and methods of fabrication thereof
Grant 10,688,786 - Peng , et al. | 2020-06-23 |
Cmos Compatible Biofet
App 20200150080 - KALNITSKY; Alexander ; et al. | 2020-05-14 |
Differential Sensing With Biofet Sensors
App 20200103369 - LIN; Ching-Hui ; et al. | 2020-04-02 |
Piezoelectric Biosensor And Related Method Of Formation
App 20200105996 - Lin; Ching-Hui ; et al. | 2020-04-02 |
Integrated Heater (and Related Method) To Recover Degraded Piezoelectric Device Performance
App 20200098969 - Kalnitsky; Alexander ; et al. | 2020-03-26 |
Novel Integration Scheme For Breakdown Voltage Enhancement Of A Piezoelectric Metal-insulator-metal Device
App 20200098517 - Lin; Anderson ; et al. | 2020-03-26 |
Backside CMOS Compatible BioFET with No Plasma Induced Damage
App 20200072789 - LIU; Yi-Shao ; et al. | 2020-03-05 |
MEMS Devices and Methods of Fabrication Thereof
App 20200023642 - Peng; Jung-Huei ; et al. | 2020-01-23 |
Method Of Using Integrated Electro-microfluidic Probe Card
App 20200025713 - LIU; Yi-Shao ; et al. | 2020-01-23 |
Direct Sensing BioFETs and Methods of Manufacture
App 20200025712 - Chang; Yi-Hsien ; et al. | 2020-01-23 |
Reduction Of Electric Field Enhanced Moisture Penetration By Metal Shielding
App 20200006469 - Shih; Chi-Yuan ; et al. | 2020-01-02 |
CMOS compatible BioFET
Grant 10,520,467 - Kalnitsky , et al. Dec | 2019-12-31 |
Embedded temperature control system for a biosensor
Grant 10,522,400 - Kalnitsky , et al. Dec | 2019-12-31 |
Direct sensing BioFETs and methods of manufacture
Grant 10,502,706 - Chang , et al. Dec | 2019-12-10 |
Backside CMOS compatible BioFET with no plasma induced damage
Grant 10,473,616 - Liu , et al. Nov | 2019-11-12 |
Method of using integrated electro-microfluidic probe card
Grant 10,429,341 - Liu , et al. October 1, 2 | 2019-10-01 |
Method Of Fabricating Semiconductor Structure
App 20190256347 - CHANG; Yi-Hsien ; et al. | 2019-08-22 |
Optical Detection for Bio-Entities
App 20190256910 - Chang; Allen Timothy ; et al. | 2019-08-22 |
Optical detection for bio-entities
Grant 10,280,456 - Chang , et al. | 2019-05-07 |
Substrate structure, semiconductor structure and method for fabricating the same
Grant 10,273,140 - Chang , et al. | 2019-04-30 |
Method for Forming Biochips and Biochips With Non-Organic Landings for Improved Thermal Budget
App 20190101531 - Chu; Chia-Hua ; et al. | 2019-04-04 |
Bio-field Effect Transistor Device
App 20190033252 - HUANG; Jui-Cheng ; et al. | 2019-01-31 |
Method for forming biochips and biochips with non-organic landings for improved thermal budget
Grant 10,145,847 - Chu , et al. De | 2018-12-04 |
MEMS Devices and Methods of Fabrication Thereof
App 20180311955 - Peng; Jung-Huei ; et al. | 2018-11-01 |
On-chip reference electrode for biologically sensitive field effect transistor
Grant 10,101,295 - Chang , et al. October 16, 2 | 2018-10-16 |
Semiconductor structure and manufacturing method thereof
Grant 10,077,187 - Yen , et al. September 18, 2 | 2018-09-18 |
Method Of Using Biochip With Biosensors
App 20180195999 - LIU; Yi-Shao ; et al. | 2018-07-12 |
Cmos Compatible Biofet
App 20180195998 - Kalnitsky; Alexander ; et al. | 2018-07-12 |
On-chip Reference Electrode For Biologically Sensitive Field Effect Transistor
App 20180172627 - Chang; Yi-Hsien ; et al. | 2018-06-21 |
Mems Transducer And Method For Manufacturing The Same
App 20180141800 - CHENG; Chun-Ren ; et al. | 2018-05-24 |
Semiconductor structure and manufacturing method thereof
Grant 9,975,754 - Huang , et al. May 22, 2 | 2018-05-22 |
Semiconductor arrangement and formation thereof
Grant 9,976,983 - Chang , et al. May 22, 2 | 2018-05-22 |
Optical biosensor device
Grant 9,968,927 - Liu , et al. May 15, 2 | 2018-05-15 |
Signal enhancement mechanism for dual-gate ion sensitive field effect transistor in on-chip disease diagnostic platform
Grant 9,958,443 - Lin , et al. May 1, 2 | 2018-05-01 |
MEMS devices and methods of fabrication thereof
Grant 9,950,522 - Peng , et al. April 24, 2 | 2018-04-24 |
Biochip with biosensors and fluidic devices
Grant 9,915,630 - Liu , et al. March 13, 2 | 2018-03-13 |
CMOS compatible BioFET
Grant 9,910,009 - Kalnitsky , et al. March 6, 2 | 2018-03-06 |
MEMS transducer and method for manufacturing the same
Grant 9,862,592 - Cheng , et al. January 9, 2 | 2018-01-09 |
Semiconductor Structure And Method For Fabricating The Same
App 20170341933 - SHEN; WEI-CHENG ; et al. | 2017-11-30 |
Embedded Temperature Control System For A Biosensor
App 20170343498 - Kalnitsky; Alexander ; et al. | 2017-11-30 |
Semiconductor sensing structure and manufacturing method thereof
Grant 9,815,685 - Chang , et al. November 14, 2 | 2017-11-14 |
CMOS Compatible BioFET
App 20170322177 - Kalnitsky; Alexander ; et al. | 2017-11-09 |
Backside CMOS Compatible BioFET With No Plasma Induced Damage
App 20170315085 - LIU; Yi-Shao ; et al. | 2017-11-02 |
Semiconductor Structure And Manufacturing Method Thereof
App 20170297901 - HUANG; FU-CHUN ; et al. | 2017-10-19 |
CMOS compatible BioFET
Grant 9,791,406 - Kalnitsky , et al. October 17, 2 | 2017-10-17 |
Signal Enhancement Mechanism For Dual-Gate ION Sensitive Field Effect Transistor In On-Chip Disease Diagnostic Platform
App 20170227533 - Lin; Ching-Hui ; et al. | 2017-08-10 |
Semiconductor Structure And Manufacturing Method Thereof
App 20170217769 - YEN; LI-CHEN ; et al. | 2017-08-03 |
Semiconductor structure and manufacturing method thereof
Grant 9,718,677 - Chang , et al. August 1, 2 | 2017-08-01 |
Semiconductor Structure And Manufacturing Method Thereof
App 20170203961 - CHANG; YI-HSIEN ; et al. | 2017-07-20 |
Backside CMOS compatible BioFET with no plasma induced damage
Grant 9,709,525 - Liu , et al. July 18, 2 | 2017-07-18 |
Methods of forming a gyroscope sensor and a structure for a gyroscope sensors
Grant 9,677,884 - Wu , et al. June 13, 2 | 2017-06-13 |
Semiconductor structure and manufacturing method thereof
Grant 9,656,855 - Huang , et al. May 23, 2 | 2017-05-23 |
Process control monitoring for biochips
Grant 9,625,493 - Liu , et al. April 18, 2 | 2017-04-18 |
Scalable biochip and method for making
Grant 9,616,617 - Shen , et al. April 11, 2 | 2017-04-11 |
On-Chip Disease Diagnostic Platform for Dual-Gate Ion Sensitive Field Effect Transistor
App 20170067890 - Lin; Ching-Hui ; et al. | 2017-03-09 |
Method Of Using Integrated Electro-microfluidic Probe Card
App 20170059515 - LIU; Yi-Shao ; et al. | 2017-03-02 |
Semiconductor Structure And Manufacturing Method Thereof
App 20170029268 - CHANG; YI-HSIEN ; et al. | 2017-02-02 |
Cmos Compatible Biofet
App 20170023521 - KALNITSKY; Alexander ; et al. | 2017-01-26 |
Integrated electro-microfluidic probe card, system and method for using the same
Grant 9,523,642 - Liu , et al. December 20, 2 | 2016-12-20 |
Semiconductor Structure And Manufacturing Method Thereof
App 20160362292 - CHANG; YI-HSIEN ; et al. | 2016-12-15 |
Optical Biosensor Device
App 20160341656 - Liu; Yi-Shao ; et al. | 2016-11-24 |
Capacitor with planarized bonding for CMOS-MEMS integration
Grant 9,493,346 - Shen , et al. November 15, 2 | 2016-11-15 |
Method of forming a semiconductor device
Grant 9,493,347 - Chang , et al. November 15, 2 | 2016-11-15 |
CMOS compatible BioFET
Grant 9,459,234 - Kalnitsky , et al. October 4, 2 | 2016-10-04 |
Optical Detection for Bio-Entities
App 20160281158 - Chang; Allen Timothy ; et al. | 2016-09-29 |
VHF etch barrier for semiconductor integrated microsystem
Grant 9,449,867 - Wu , et al. September 20, 2 | 2016-09-20 |
Isolation structure for MEMS 3D IC integration
Grant 9,446,945 - Tsai , et al. September 20, 2 | 2016-09-20 |
Mems Transducer And Method For Manufacturing The Same
App 20160264399 - CHENG; Chun-Ren ; et al. | 2016-09-15 |
Biosensing well array with protective layer
Grant 9,417,209 - Shen , et al. August 16, 2 | 2016-08-16 |
Substrate Structure, Semiconductor Structure And Method For Fabricating The Same
App 20160207756 - CHANG; Yi-Hsien ; et al. | 2016-07-21 |
Optical detection for bio-entities
Grant 9,366,647 - Chang , et al. June 14, 2 | 2016-06-14 |
Mechanisms for forming micro-electro mechanical system device
Grant 9,352,953 - Cheng May 31, 2 | 2016-05-31 |
Isolation Structure For Mems 3d Ic Integration
App 20160145095 - Tsai; Yi-Heng ; et al. | 2016-05-26 |
Systems and methods for an integrated bio-entity manipulation and processing semiconductor device
Grant 9,254,487 - Chang , et al. February 9, 2 | 2016-02-09 |
Capacitor With Planarized Bonding For Cmos-mems Integration
App 20160031704 - Shen; Wei-Cheng ; et al. | 2016-02-04 |
Triple-axis MEMS accelerometer
Grant 9,238,581 - Wu , et al. January 19, 2 | 2016-01-19 |
Systems and methods for an integrated bio-entity manipulation and processing semiconductor device
Grant 9,239,328 - Chang , et al. January 19, 2 | 2016-01-19 |
Backside CMOS Compatible BioFET With No Plasma Induced Damage
App 20160011144 - Liu; Yi-Shao ; et al. | 2016-01-14 |
MEMS Devices and Methods of Fabrication Thereof
App 20160009089 - Peng; Jung-Huei ; et al. | 2016-01-14 |
Biosensing well array by self-alignment and selective etching
Grant 9,228,974 - Chang , et al. January 5, 2 | 2016-01-05 |
Vhf Etch Barrier For Semiconductor Integrated Microsystem
App 20150364363 - Wu; Tzu-Heng ; et al. | 2015-12-17 |
Direct Sensing BioFETs and Methods of Manufacture
App 20150330942 - Chang; Yi-Hsien ; et al. | 2015-11-19 |
MEMS devices and methods of fabrication thereof
Grant 9,138,994 - Peng , et al. September 22, 2 | 2015-09-22 |
Semiconductor Arrangement And Formation Thereof
App 20150253283 - Chang; Yi-Hsien ; et al. | 2015-09-10 |
Biosensing Well Array With Protective Layer
App 20150233864 - Shen; Wei-Cheng ; et al. | 2015-08-20 |
Direct sensing bioFETs and methods of manufacture
Grant 9,091,647 - Chang , et al. July 28, 2 | 2015-07-28 |
Backside CMOS compatible BioFET with no plasma induced damage
Grant 9,080,969 - Liu , et al. July 14, 2 | 2015-07-14 |
Mechanisms For Forming Micro-electro Mechanical System Device
App 20150175405 - CHENG; Chun-Ren | 2015-06-25 |
Biochip With Biosensors And Fluidic Devices
App 20150139857 - LIU; Yi-Shao ; et al. | 2015-05-21 |
BioMEMS and planar light circuit with integrated package
Grant 9,034,678 - Chang , et al. May 19, 2 | 2015-05-19 |
Biosensing well array with protective layer
Grant 9,023,674 - Shen , et al. May 5, 2 | 2015-05-05 |
Mechanisms for forming micro-electro mechanical system device
Grant 8,994,129 - Cheng March 31, 2 | 2015-03-31 |
Biosensing Well Array With Protective Layer
App 20150084099 - Shen; Wei-Cheng ; et al. | 2015-03-26 |
Surface modification, functionalization and integration of microfluidics and biosensor to form a biochip
Grant 8,951,716 - Liu , et al. February 10, 2 | 2015-02-10 |
Method Of Forming A Semiconductor Device
App 20150024533 - CHANG; Yi-Hsien ; et al. | 2015-01-22 |
Mechanisms For Forming Micro-electro Mechanical System Device
App 20150021723 - CHENG; Chun-Ren | 2015-01-22 |
Method for Forming Biochips and Biochips With Non-Organic Landings for Improved Thermal Budget
App 20150011021 - Chu; Chia-Hua ; et al. | 2015-01-08 |
Biomems And Planar Light Circuit With Integrated Package
App 20140335640 - Chang; Allen Timothy ; et al. | 2014-11-13 |
MEMS nanostructures and methods of forming the same
Grant 8,883,021 - Chang , et al. November 11, 2 | 2014-11-11 |
Biosensing Well Array By Self-alignment And Selective Etching
App 20140308752 - Chang; Yi-Hsien ; et al. | 2014-10-16 |
Systems and Methods for an Integrated Bio-Entity Manipulation and Processing Semiconductor Device
App 20140299472 - Chang; Yi-Hsien ; et al. | 2014-10-09 |
Method for forming biochips and biochips with non-organic landings for improved thermal budget
Grant 8,846,416 - Chu , et al. September 30, 2 | 2014-09-30 |
Gyroscope Sensors
App 20140283369 - WU; Ting-Hau ; et al. | 2014-09-25 |
Surface Modification, Functionalization And Integration Of Microfluidics And Biosensor To Form A Biochip
App 20140272719 - LIU; Yi-Shao ; et al. | 2014-09-18 |
Method For Forming Biochips And Biochips With Non-organic Landings For Improved Thermal Budget
App 20140273281 - Chu; Chia-Hua ; et al. | 2014-09-18 |
Optical Detection For Bio-entities
App 20140262783 - Chang; Allen Timothy ; et al. | 2014-09-18 |
Scalable Biochip and Method for Making
App 20140256030 - Shen; Wei-Cheng ; et al. | 2014-09-11 |
Backside CMOS Compatible BioFET with No Plasma Induced Damage
App 20140252421 - Liu; Yi-Shao ; et al. | 2014-09-11 |
Process Control Monitoring For Biochips
App 20140239986 - Liu; Yi-Shao ; et al. | 2014-08-28 |
Microelectromechanical device with integrated package
Grant 8,791,557 - Chang , et al. July 29, 2 | 2014-07-29 |
Gyroscope sensors
Grant 8,776,600 - Wu , et al. July 15, 2 | 2014-07-15 |
Systems and Methods for an Integrated Bio-Entity Manipulation and Processing Semiconductor Device
App 20140166484 - Chang; Yiu-Hsien ; et al. | 2014-06-19 |
Backside Cmos Compatible Biofet With No Plasma Induced Damage
App 20140151755 - Liu; Yi-Shao ; et al. | 2014-06-05 |
Backside CMOS compatible bioFET with no plasma induced damage
Grant 8,728,844 - Liu , et al. May 20, 2 | 2014-05-20 |
Integrated Electro-microfluidic Probe Card, System And Method For Using The Same
App 20140134748 - LIU; Yi-Shao ; et al. | 2014-05-15 |
Light detector with Ge film
Grant 8,723,123 - Kalnitsky , et al. May 13, 2 | 2014-05-13 |
Direct Sensing Biofets And Methods Of Manufacture
App 20140073039 - Chang; Yi-Hsien ; et al. | 2014-03-13 |
Light Detector With Ge Film
App 20140054461 - Kalnitsky; Alexander ; et al. | 2014-02-27 |
Inline process control structures
Grant 8,647,892 - Liang , et al. February 11, 2 | 2014-02-11 |
Triple-Axis MEMS Accelerometer
App 20140024160 - Wu; Ting-Hau ; et al. | 2014-01-23 |
BioMEMS and Planar Light Circuit with Integrated Package
App 20130293878 - Chang; Allen Timothy ; et al. | 2013-11-07 |
Laser bonding for stacking semiconductor substrates
Grant 8,563,400 - Wu , et al. October 22, 2 | 2013-10-22 |
Mems Nanostructures And Methods Of Forming The Same
App 20130256259 - CHANG; Yi-Hsien ; et al. | 2013-10-03 |
Laser Bonding for Stacking Semiconductor Substrates
App 20130140285 - Wu; Ting-Hau ; et al. | 2013-06-06 |
Method for reducing chip warpage
Grant 8,455,999 - Wu , et al. June 4, 2 | 2013-06-04 |
Cmos Compatible Biofet
App 20130105868 - Kalnitsky; Alexander ; et al. | 2013-05-02 |
Handling layer for transparent substrate
Grant 8,405,169 - Cheng , et al. March 26, 2 | 2013-03-26 |
Laser bonding for stacking semiconductor substrates
Grant 8,367,516 - Wu , et al. February 5, 2 | 2013-02-05 |
Triple-axis MEMS accelerometer
Grant 8,362,578 - Wu , et al. January 29, 2 | 2013-01-29 |
Gyroscope Sensors
App 20130000409 - WU; Ting-Hau ; et al. | 2013-01-03 |
Process for eliminating delamination between amorphous silicon layers
Grant 8,309,441 - Lee , et al. November 13, 2 | 2012-11-13 |
Method to produce 3-D optical gyroscope my MEMS technology
Grant 8,281,658 - Wu , et al. October 9, 2 | 2012-10-09 |
Method and apparatus for cooling an integrated circuit
Grant 8,237,263 - Wu , et al. August 7, 2 | 2012-08-07 |
Metal-ceramic multilayer structure
Grant 8,237,235 - Wu , et al. August 7, 2 | 2012-08-07 |
MEMS microphone with single polysilicon film
Grant 8,218,286 - Wu , et al. July 10, 2 | 2012-07-10 |
Inline Process Control Structures
App 20120091454 - Liang; Kai-Chih ; et al. | 2012-04-19 |
Handling Layer For Transparent Substrate
App 20120091598 - Cheng; Chun-Ren ; et al. | 2012-04-19 |
Triple-axis MEMS accelerometer having a bottom capacitor
Grant 8,106,470 - Wu , et al. January 31, 2 | 2012-01-31 |
Method for Reducing Chip Warpage
App 20120007220 - Wu; Ting-Hau ; et al. | 2012-01-12 |
Method for reducing chip warpage
Grant 8,053,336 - Wu , et al. November 8, 2 | 2011-11-08 |
Low stress photo-sensitive resin with sponge-like structure and devices manufactured employing same
Grant 8,053,377 - Tsai , et al. November 8, 2 | 2011-11-08 |
Silicon undercut prevention in sacrificial oxide release process and resulting MEMS structures
Grant 7,998,775 - Tsai , et al. August 16, 2 | 2011-08-16 |
Method and Apparatus for Cooling an Integrated Circuit
App 20110156245 - Wu; Ting-Hau ; et al. | 2011-06-30 |
Multi-step process for forming high-aspect-ratio holes for MEMS devices
Grant 7,923,379 - Lee , et al. April 12, 2 | 2011-04-12 |
Low Stress Photo-Sensitive Resin with Sponge-Like Structure and Devices Manufactured Employing Same
App 20110081740 - TSAI; SHANG-YING ; et al. | 2011-04-07 |
Triple-Axis MEMS Accelerometer Having a Bottom Capacitor
App 20100308424 - Wu; Ting-Hau ; et al. | 2010-12-09 |
Triple-Axis MEMS Accelerometer
App 20100301433 - Wu; Ting-Hau ; et al. | 2010-12-02 |
Metal-Ceramic Multilayer Structure
App 20100258883 - Wu; Ting-Hau ; et al. | 2010-10-14 |
MEMS Devices and Methods of Fabrication Thereof
App 20100225708 - Peng; Jung-Huei ; et al. | 2010-09-09 |
Silicon Undercut Prevention in Sacrificial Oxide Release Process and Resulting MEMS Structures
App 20100203664 - Tsai; Shang-Ying ; et al. | 2010-08-12 |
Method to produce 3-D optical gyroscope my MEMS technology
App 20100175479 - Wu; Ting-Hau ; et al. | 2010-07-15 |
Laser Bonding for Stacking Semiconductor Substrates
App 20100178732 - Wu; Ting-Hau ; et al. | 2010-07-15 |
MEMS Microphone with Single Polysilicon Film
App 20100117168 - Wu; Ting-Hau ; et al. | 2010-05-13 |
Method for Reducing Chip Warpage
App 20100120202 - Wu; Ting-Hau ; et al. | 2010-05-13 |
Multi-Step Process for Forming High-Aspect-Ratio Holes for MEMS Devices
App 20100120260 - Lee; Jiou-Kang ; et al. | 2010-05-13 |
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