CHEN; Zhong-wei

Patent Applications and Registrations

Patent applications and USPTO patent grants for CHEN; Zhong-wei.The latest application filed is for "multiple landing energy scanning electron microscopy systems and methods".

Company Profile

18.25.39

CHEN; Zhong-wei - San Jose CA
Chen; Zhong-Wei - Palo Alto CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multiple Landing Energy Scanning Electron Microscopy Systems And Methods App 20220254599 - FANG; Wei ; et al.	2022-08-11
Apparatus Using Multiple Beams Of Charged Particles App 20220223366 - HU; Xuerang ; et al.	2022-07-14
Electron Emitter And Method Of Fabricating Same App 20220189725 - DOU; Juying ; et al.	2022-06-16
System And Method For Alignment Of Secondary Beams In Multi-beam Inspection Apparatus App 20220189726 - XI; Qingpo ; et al.	2022-06-16
Apparatus using multiple beams of charged particles Grant 11,289,304 - Hu , et al. March 29, 2	2022-03-29
Multi-beam inspection apparatus with improved detection performance of signal electrons Grant 11,282,675 - Ren , et al. March 22, 2	2022-03-22
Apparatus For Obtaining Optical Measurements In A Charged Particle Apparatus App 20220084777 - VAN DER TOORN; Jan-Gerard Cornelis ; et al.	2022-03-17
Multi-cell detector for charged particles Grant 11,222,766 - Wang , et al. January 11, 2	2022-01-11
Apparatus Using Multiple Charged Particle Beams App 20220005665 - REN; Weiming ; et al.	2022-01-06
Apparatus using multiple charged particle beams Grant 11,062,874 - Ren , et al. July 13, 2	2021-07-13
Multiple Charged-particle Beam Apparatus With Low Crosstalk App 20210193437 - REN; Weiming ; et al.	2021-06-24
Multi-beam Inspection Apparatus App 20210151280 - HU; Xuerang ; et al.	2021-05-20
Multi-beam Inspection Apparatus With Improved Detection Performance Of Signal Electrons App 20210151291 - REN; Weiming ; et al.	2021-05-20
Systems And Methods For Voltage Contrast Defect Detection App 20210116398 - REN; Weiming ; et al.	2021-04-22
Multi-beam inspection apparatus with improved detection performance of signal electrons Grant 10,892,138 - Ren , et al. January 12, 2	2021-01-12
Multi-beam inspection apparatus Grant 10,879,032 - Hu , et al. December 29, 2	2020-12-29
Multiple Charged-particle Beam Apparatus And Methods Of Operating The Same App 20200381212 - REN; Weiming ; et al.	2020-12-03
Multiple Charged-particle Beam Apparatus And Methods App 20200381211 - REN; Weiming ; et al.	2020-12-03
Multi-beam Inspection Apparatus With Single-beam Mode App 20200321191 - REN; Weiming ; et al.	2020-10-08
An Apparatus Using Charged Particle Beams App 20200303155 - HU; Xuerang ; et al.	2020-09-24
Multi-cell Detector For Charged Particles App 20200286708 - WANG; Joe ; et al.	2020-09-10
Dynamic Determination Of A Sample Inspection Recipe Of Charged Particle Beam Inspection App 20200286710 - CHEN; Zhong-wei ; et al.	2020-09-10
Methods Of Inspecting Samples With Multiple Beams Of Charged Particles App 20200271598 - TSENG; Kuo-Feng ; et al.	2020-08-27
In-die Metrology Methods And Systems For Process Control App 20200211845 - PU; Lingling ; et al.	2020-07-02
An Apparatus Using Multiple Beams Of Charged Particles App 20200203114 - HU; Xuerang ; et al.	2020-06-25
Apparatus Of Plural Charged Particle Beams App 20200161079 - REN; Weiming ; et al.	2020-05-21
Multi-beam Inspection Apparatus App 20190341222 - HU; Xuerang ; et al.	2019-11-07
An Apparatus Using Multiple Charged Particle Beams App 20190333732 - REN; Weiming ; et al.	2019-10-31
Multi-beam Inspection Apparatus With Improved Detection Performance Of Signal Electrons App 20190279844 - REN; Weiming ; et al.	2019-09-12
Electron Emitter And Method Of Fabricating Same App 20190172674 - DOU; Juying ; et al.	2019-06-06
Dynamic focus adjustment with optical height detection apparatus in electron beam system Grant 9,400,176 - Wang , et al. July 26, 2	2016-07-26
Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam System App 20140291517 - WANG; JOE ; et al.	2014-10-02
Electron gun with magnetic immersion double condenser lenses Grant 8,314,401 - Zhang , et al. November 20, 2	2012-11-20
Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam Grant 8,218,284 - Chen , et al. July 10, 2	2012-07-10
Thermal field emission cathode Grant 8,022,609 - Chen , et al. September 20, 2	2011-09-20
Charged particle system including segmented detection elements Grant 7,928,383 - Wang , et al. April 19, 2	2011-04-19
Thermal Field Emission Cathode App 20110084591 - CHEN; Zhong-Wei ; et al.	2011-04-14
Electron gun with magnetic immersion double condenser lenses Grant 7,893,406 - Zhang , et al. February 22, 2	2011-02-22
Electron Gun With Magnetic Immersion Double Condenser Lenses App 20110018470 - Zhang; Xu ; et al.	2011-01-27
Charged particle detection devices Grant 7,872,236 - Zhang , et al. January 18, 2	2011-01-18
Electron beam apparatus Grant 7,759,653 - Chen , et al. July 20, 2	2010-07-20
Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector Grant 7,705,301 - Tseng , et al. April 27, 2	2010-04-27
System and method to determine focus parameters during an electron beam inspection Grant 7,705,298 - Liu , et al. April 27, 2	2010-04-27
Apparatus For Increasing Electric Conductivity To A Semiconductor Wafer Substrate When Exposure To Electron Beam App 20100019462 - CHEN; Zhong-Wei ; et al.	2010-01-28
Thermal Field Emission Cathode App 20090315444 - Chen; Zhong-Wei ; et al.	2009-12-24
Electron Beam Apparatus App 20090294664 - Chen; Zhong-Wei ; et al.	2009-12-03
System And Method To Determine Focus Parameters During An Electron Beam Inspection App 20090108199 - LIU; Xuedong ; et al.	2009-04-30
Charged Particle Detection Devices App 20090090866 - ZHANG; Xu ; et al.	2009-04-09
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Grant 7,474,001 - Zhao , et al. January 6, 2	2009-01-06
Charged Particle Detection Devices App 20080315094 - WANG; Joe ; et al.	2008-12-25
System and method for sample charge control Grant 7,335,879 - Chen February 26, 2	2008-02-26
Electron Beam Apparatus To Collect Side-view And/or Plane-view Image With In-lens Sectional Detector App 20080006771 - Tseng; Chi-Hua ; et al.	2008-01-10
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing App 20060234496 - Zhao; Yan ; et al.	2006-10-19
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Grant 7,105,436 - Zhao , et al. September 12, 2	2006-09-12
System and method for sample charge control App 20060038126 - Chen; Zhong-Wei	2006-02-23
Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method Grant 6,960,766 - Chen November 1, 2	2005-11-01
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing App 20050026310 - Zhao, Yan ; et al.	2005-02-03
Method and apparatus for scanning semiconductor wafers using a scanning electron microscope Grant 6,710,342 - Jau , et al. March 23, 2	2004-03-23
Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method App 20040046125 - Chen, Zhong-Wei	2004-03-11
Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method Grant 6,605,805 - Chen August 12, 2	2003-08-12
Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method App 20020104969 - Chen, Zhong-Wei	2002-08-08
Inspecting optical masks with electron beam microscopy Grant 5,717,204 - Meisburger , et al. February 10, 1	1998-02-10
Inspecting optical masks with electron beam microscopy Grant 5,665,968 - Meisburger , et al. September 9, 1	1997-09-09
Electron beam inspection system and method Grant 5,578,821 - Meisberger , et al. November 26, 1	1996-11-26

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