Chen; Tzu-Shin
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Tzu-Shin.The latest application filed is for "system, control method and apparatus for chemical mechanical polishing".
- Chen; Tzu-Shin - Tainan TW
- Chen; Tzu-Shin - Tainan City TW
- Chen; Tzu-Shin - Yun-Lin County TW
- Chen; Tzu-Shin - Taipei Hsien TW
- Chen; Tzu-Shin - Tai-nan TW
- Chen, Tzu-Shin - Tai-Nan City TW
- Chen, Tzu-Shin - Taipei TW
| Patent | Date |
|---|---|
| Method for bonding wafers and bonding tool Grant 10,872,873 - Chen , et al. December 22, 2 | 2020-12-22 |
| System, control method and apparatus for chemical mechanical polishing Grant 10,792,783 - Hu , et al. October 6, 2 | 2020-10-06 |
| System, Control Method And Apparatus For Chemical Mechanical Polishing App 20190160625 - Hu; Hsiang-Chu ; et al. | 2019-05-30 |
| Method For Bonding Wafers And Bonding Tool App 20190148333 - CHEN; Chien-Chih ; et al. | 2019-05-16 |
| Lens structure Grant 10,050,159 - Chen , et al. August 14, 2 | 2018-08-14 |
| Lens Structure And Method For Fabricating The Same App 20180166594 - Chen; Chien-Chih ; et al. | 2018-06-14 |
| Wafer Processing Apparatus And Wafer Processing Method Using The Same App 20170358446 - WU; Cheng-Yi ; et al. | 2017-12-14 |
| Wafer Cleaning Roller App 20100043160 - Chen; Tzu-Shin | 2010-02-25 |
| Retaining Ring For Chemical Mechanical Polishing, Its Operational Method And Application System App 20090023362 - Chen; Tzu-Shin ; et al. | 2009-01-22 |
| Vacuum suction membrane for holding silicon wafer Grant 7,070,490 - Chen , et al. July 4, 2 | 2006-07-04 |
| Polishing head with a floating knife-edge Grant 6,755,726 - Chen , et al. June 29, 2 | 2004-06-29 |
| Polishing head with a floating knife-edge App 20030181153 - Chen, Tzu-Shin ; et al. | 2003-09-25 |
| Vacuum suction membrane for holding silicon wafer App 20030157870 - Chen, Tzu-Shin ; et al. | 2003-08-21 |
| Carrier Head For Chemical Mechanical Polishing App 20030079836 - Lin, Juen-Kuen ; et al. | 2003-05-01 |
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