loadpatents
Patent applications and USPTO patent grants for Chen; Tzu-Shin.The latest application filed is for "system, control method and apparatus for chemical mechanical polishing".
Patent | Date |
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Method for bonding wafers and bonding tool Grant 10,872,873 - Chen , et al. December 22, 2 | 2020-12-22 |
System, control method and apparatus for chemical mechanical polishing Grant 10,792,783 - Hu , et al. October 6, 2 | 2020-10-06 |
System, Control Method And Apparatus For Chemical Mechanical Polishing App 20190160625 - Hu; Hsiang-Chu ;   et al. | 2019-05-30 |
Method For Bonding Wafers And Bonding Tool App 20190148333 - CHEN; Chien-Chih ;   et al. | 2019-05-16 |
Lens structure Grant 10,050,159 - Chen , et al. August 14, 2 | 2018-08-14 |
Lens Structure And Method For Fabricating The Same App 20180166594 - Chen; Chien-Chih ;   et al. | 2018-06-14 |
Wafer Processing Apparatus And Wafer Processing Method Using The Same App 20170358446 - WU; Cheng-Yi ;   et al. | 2017-12-14 |
Wafer Cleaning Roller App 20100043160 - Chen; Tzu-Shin | 2010-02-25 |
Retaining Ring For Chemical Mechanical Polishing, Its Operational Method And Application System App 20090023362 - Chen; Tzu-Shin ;   et al. | 2009-01-22 |
Vacuum suction membrane for holding silicon wafer Grant 7,070,490 - Chen , et al. July 4, 2 | 2006-07-04 |
Polishing head with a floating knife-edge Grant 6,755,726 - Chen , et al. June 29, 2 | 2004-06-29 |
Polishing head with a floating knife-edge App 20030181153 - Chen, Tzu-Shin ;   et al. | 2003-09-25 |
Vacuum suction membrane for holding silicon wafer App 20030157870 - Chen, Tzu-Shin ;   et al. | 2003-08-21 |
Carrier Head For Chemical Mechanical Polishing App 20030079836 - Lin, Juen-Kuen ;   et al. | 2003-05-01 |
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