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Semiconductor structure and method for semiconductor device fabrication with improved source drain epitaxy Grant 10,629,736 - Lee , et al. | 2020-04-21 |
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Method for Semiconductor Device Fabrication with Improved Source Drain Epitaxy App 20190123200 - Lee; Wei-Yang ;   et al. | 2019-04-25 |
Semiconductor structure and method for semiconductor device fabrication with improved source drain epitaxy Grant 10,158,017 - Lee , et al. Dec | 2018-12-18 |
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