Patent | Date |
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Fabrication Method Of Metal-free Soi Wafer App 20220139769 - Cheng; Yu-Hung ;   et al. | 2022-05-05 |
Structure and Method for Embedded Gettering in a Silicon On Insulator Wafer App 20220122849 - Chen; Pu-Fang ;   et al. | 2022-04-21 |
Apparatus And Methods For Effective Impurity Gettering App 20220059582 - LEE; Yueh-Chuan ;   et al. | 2022-02-24 |
Fabrication method of metal-free SOI wafer Grant 11,232,974 - Cheng , et al. January 25, 2 | 2022-01-25 |
Structure and method for embedded gettering in a silicon on insulator wafer Grant 11,211,259 - Chen , et al. December 28, 2 | 2021-12-28 |
Semiconductor Structure And Method For Manufacturing The Same App 20200303324 - CHEN; PU-FANG ;   et al. | 2020-09-24 |
Semiconductor structure and method for manufacturing the same Grant 10,714,433 - Chen , et al. | 2020-07-14 |
Fabrication Method Of Metal-free Soi Wafer App 20200176306 - Cheng; Yu-Hung ;   et al. | 2020-06-04 |
Semiconductor Structure And Method For Manufacturing The Same App 20190355670 - CHEN; PU-FANG ;   et al. | 2019-11-21 |
Structure and Method for Embedded Gettering in a Silicon On Insulator Wafer App 20190326128 - Chen; Pu-Fang ;   et al. | 2019-10-24 |
Wafer supporting structure and method for forming the same Grant 10,190,235 - Ho , et al. Ja | 2019-01-29 |
Semiconductor substrate and manufacturing method of the same Grant 10,170,312 - Chen , et al. J | 2019-01-01 |
Semiconductor device and manufacturing method thereof Grant 10,157,819 - Chen , et al. Dec | 2018-12-18 |
Wafer strength by control of uniformity of edge bulk micro defects Grant 10,141,413 - Huang , et al. Nov | 2018-11-27 |
Semiconductor Substrate And Manufacturing Method Of The Same App 20180308697 - CHEN; PU-FANG ;   et al. | 2018-10-25 |
Semiconductor structure and method Grant 9,945,048 - Syue , et al. April 17, 2 | 2018-04-17 |
Semiconductor Device And Manufacturing Method Thereof App 20180096914 - Chen; Pu-Fang ;   et al. | 2018-04-05 |
Semiconductor device having a through-silicon via and manufacturing method thereof Grant 9,899,297 - Chen , et al. February 20, 2 | 2018-02-20 |
Wafer Strength By Control Of Uniformity Of Edge Bulk Micro Defects App 20150357421 - Huang; I-Che ;   et al. | 2015-12-10 |
Method for qualifying a semiconductor wafer for subsequent processing Grant 9,064,823 - Huang , et al. June 23, 2 | 2015-06-23 |
Wafer alignment system and method Grant 8,932,945 - Syue , et al. January 13, 2 | 2015-01-13 |
Wafer Supporting Structure and Method for Forming the Same App 20140349466 - Ho; An-Li ;   et al. | 2014-11-27 |
Wafer Strength by Control of Uniformity of Edge Bulk Micro Defects App 20140273291 - Huang; I-Che ;   et al. | 2014-09-18 |
Wafer Alignment System and Method App 20140011348 - Syue; Sen-Hong ;   et al. | 2014-01-09 |
Semiconductor Structure and Method App 20130337631 - Syue; Sen-Hong ;   et al. | 2013-12-19 |
Dopant implantation method using multi-step implants Grant 8,008,158 - Chang , et al. August 30, 2 | 2011-08-30 |
Methods for forming field effect transistors and EPI-substrate Grant 7,713,852 - Chen May 11, 2 | 2010-05-11 |
Dopant Implantation Method And Integrated Circuits Formed Thereby App 20100009506 - Chang; Tse-En ;   et al. | 2010-01-14 |
Preventing dosage drift with duplicate dose integrators Grant 7,518,129 - Wang , et al. April 14, 2 | 2009-04-14 |
Methods For Forming Field Effect Transistors And Epi-substrate App 20080311716 - Chen; Pu-Fang | 2008-12-18 |
Wafer carrier App 20080041758 - Lin; Yen-Fei ;   et al. | 2008-02-21 |
Preventing dosage drift with duplicate dose integrators App 20070257210 - Wang; Jih-Hwa ;   et al. | 2007-11-08 |
Method for implementing poly pre-doping in deep sub-micron process App 20050118802 - Tsao, Chang-Sheng ;   et al. | 2005-06-02 |
Method and apparatus for measuring thickness of a thin oxide layer Grant 6,646,752 - Chen , et al. November 11, 2 | 2003-11-11 |
Method And Apparatus For Measuring Thickness Of A Thin Oxide Layer App 20030160972 - Chen, Pu Fang ;   et al. | 2003-08-28 |