loadpatents
Patent applications and USPTO patent grants for CHEN; Meng-Wei.The latest application filed is for "method of fabricating reticle".
Patent | Date |
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Method Of Fabricating Reticle App 20210263425 - CHUNG; Hsueh-Yi ;   et al. | 2021-08-26 |
Method of fabricating reticle Grant 11,003,091 - Chung , et al. May 11, 2 | 2021-05-11 |
Method for forming semiconductor device structure with overlay grating Grant 10,867,933 - Chen , et al. December 15, 2 | 2020-12-15 |
Method For Forming Semiconductor Device Structure With Overlay Grating App 20200365520 - CHEN; Long-Yi ;   et al. | 2020-11-19 |
Method for forming semiconductor device structure with overlay grating Grant 10,734,325 - Chen , et al. | 2020-08-04 |
Method Of Fabricating Reticle App 20200150546 - CHUNG; Hsueh-Yi ;   et al. | 2020-05-14 |
Method For Forming Semiconductor Device Structure With Overlay Grating App 20200058595 - CHEN; Long-Yi ;   et al. | 2020-02-20 |
Method of fabricating reticle Grant 10,534,272 - Chung , et al. Ja | 2020-01-14 |
Method for forming semiconductor device structure with overlay grating Grant 10,461,037 - Chen , et al. Oc | 2019-10-29 |
Method For Forming Semiconductor Device Structure With Overlay Grating App 20190131190 - CHEN; Long-Yi ;   et al. | 2019-05-02 |
Method Of Fabricating Reticle App 20190004436 - CHUNG; Hsueh-Yi ;   et al. | 2019-01-03 |
Lithography process and system with enhanced overlay quality Grant 10,146,141 - Hung , et al. De | 2018-12-04 |
Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool Grant 10,073,354 - Chung , et al. September 11, 2 | 2018-09-11 |
Material composition and process for mitigating assist feature pattern transfer Grant 9,773,671 - Chen , et al. September 26, 2 | 2017-09-26 |
Exposure Method Of Wafer Substrate, Manufacturing Method Of Semiconductor Device, And Exposure Tool App 20160124323 - CHUNG; Hsueh-Yi ;   et al. | 2016-05-05 |
Lithography Process and System with Enhanced Overlay Quality App 20160062250 - Hung; Chi-Cheng ;   et al. | 2016-03-03 |
Enhanced FinFET process overlay mark Grant 9,129,974 - Hsieh , et al. September 8, 2 | 2015-09-08 |
Enhanced FinFET Process Overlay Mark App 20140367869 - Hsieh; Chi-Wen ;   et al. | 2014-12-18 |
Metal cut process flow Grant 8,850,369 - Lung , et al. September 30, 2 | 2014-09-30 |
Integrated circuit method with triple patterning Grant 8,840,796 - Liu , et al. September 23, 2 | 2014-09-23 |
Enhanced FinFET process overlay mark Grant 8,822,343 - Hsieh , et al. September 2, 2 | 2014-09-02 |
Method of patterning a semiconductor device Grant 8,716,139 - Liu , et al. May 6, 2 | 2014-05-06 |
Enhanced Finfet Process Overlay Mark App 20140065832 - Hsieh; Chi-Wen ;   et al. | 2014-03-06 |
Integrated Circuit Method With Triple Patterning App 20140024218 - Liu; Chia-Chu ;   et al. | 2014-01-23 |
Metal Cut Process Flow App 20130280909 - Lung; Yuan-Hsiang ;   et al. | 2013-10-24 |
Integrated circuit method with triple patterning Grant 8,562,843 - Liu , et al. October 22, 2 | 2013-10-22 |
Photoresist Structures Having Resistance To Peeling App 20130230980 - LIU; George ;   et al. | 2013-09-05 |
Overlay mark enhancement feature Grant 8,455,982 - Chen , et al. June 4, 2 | 2013-06-04 |
Integrated Circuit Method With Triple Patterning App 20130095662 - Liu; Chia-Chu ;   et al. | 2013-04-18 |
System and method for providing alignment mark for high-k metal gate process Grant 8,237,297 - Chen , et al. August 7, 2 | 2012-08-07 |
Overlay Mark Enhancement Feature App 20120153441 - Chen; Meng-Wei ;   et al. | 2012-06-21 |
Cover structure Grant 8,203,836 - Chen , et al. June 19, 2 | 2012-06-19 |
Overlay mark enhancement feature Grant 8,148,232 - Chen , et al. April 3, 2 | 2012-04-03 |
Overlay Mark Enhancement Feature App 20120038021 - Chen; Meng-Wei ;   et al. | 2012-02-16 |
System And Method For Providing Alignment Mark For High-k Metal Gate Process App 20110241119 - Chen; Kuei Shun ;   et al. | 2011-10-06 |
Cover Structure App 20100214731 - Chen; Hsin-Chih ;   et al. | 2010-08-26 |
Maintenance apparatuses for fluid injectors and fluid injection devices integrated therewith App 20070040865 - Chou; Chung Cheng ;   et al. | 2007-02-22 |
Method of reducing critical dimension bias of dense pattern and isolation pattern Grant 7,097,945 - Chang , et al. August 29, 2 | 2006-08-29 |
Method Of Reducing Critical Dimension Bias Of Dense Pattern And Isolation Pattern App 20050009341 - Chang, Ching-Yu ;   et al. | 2005-01-13 |
[microlithographic Process] App 20040209196 - CHEN, MENG-WEI ;   et al. | 2004-10-21 |
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