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Fast freeform source and mask co-optimization method Grant 11,042,687 - Chen , et al. June 22, 2 | 2021-06-22 |
Three-dimensional Mask Model For Photolithography Simulation App 20210064811A1 - | 2021-03-04 |
Three-dimensional mask model for photolithography simulation Grant 10,839,131 - Liu , et al. November 17, 2 | 2020-11-17 |
Fast Freeform Source And Mask Co-optimization Method App 20200218850 - CHEN; Luoqi ;   et al. | 2020-07-09 |
Fast freeform source and mask co-optimization method Grant 10,592,633 - Chen , et al. | 2020-03-17 |
Correction for flare effects in lithography system Grant 10,423,745 - Liu , et al. Sept | 2019-09-24 |
Computation pipeline of single-pass multiple variant calls Grant 10,424,395 - Ye , et al. Sept | 2019-09-24 |
Computation pipeline of location-dependent variant calls Grant 10,424,396 - Ye , et al. Sept | 2019-09-24 |
Optimization flows of source, mask and projection optics Grant 10,401,732 - Hsu , et al. Sep | 2019-09-03 |
Three-dimensional Mask Model For Photolithography Simulation App 20190163866 - Liu; Peng ;   et al. | 2019-05-30 |
Three-dimensional mask model for photolithography simulation Grant 10,198,549 - Liu , et al. Fe | 2019-02-05 |
Fast Freeform Source And Mask Co-optimization Method App 20180239861 - Chen; Luoqi ;   et al. | 2018-08-23 |
Fast freeform source and mask co-optimization method Grant 9,953,127 - Chen , et al. April 24, 2 | 2018-04-24 |
Optimization Flows Of Source, Mask And Projection Optics App 20170176864 - HSU; Duan-Fu ;   et al. | 2017-06-22 |
Optimization flows of source, mask and projection optics Grant 9,588,438 - Hsu , et al. March 7, 2 | 2017-03-07 |
Three-dimensional Mask Model For Photolithography Simulation App 20160357900 - LIU; Peng ;   et al. | 2016-12-08 |
Computation Pipeline Of Single-pass Multiple Variant Calls App 20160283654 - Ye; Jun ;   et al. | 2016-09-29 |
Computation Pipeline Of Location-dependent Variant Calls App 20160283655 - Ye; Jun ;   et al. | 2016-09-29 |
Three-dimensional mask model for photolithography simulation Grant 9,372,957 - Liu , et al. June 21, 2 | 2016-06-21 |
Integration of lithography apparatus and mask optimization process with multiple patterning process Grant 9,262,579 - Chen , et al. February 16, 2 | 2016-02-16 |
Fast Freeform Source And Mask Co-optimization Method App 20150356234 - CHEN; Luoqi ;   et al. | 2015-12-10 |
Source polarization optimization Grant 9,110,382 - Chen August 18, 2 | 2015-08-18 |
Fast freeform source and mask co-optimization method Grant 9,111,062 - Chen , et al. August 18, 2 | 2015-08-18 |
Three-dimensional Mask Model For Photolithography Simulation App 20150135146 - Liu; Peng ;   et al. | 2015-05-14 |
Correction For Flare Effects In Lithography System App 20150058815 - LIU; Hua-Yu ;   et al. | 2015-02-26 |
Harmonic resist model for use in a lithographic apparatus and a device manufacturing method Grant 8,942,463 - Cao , et al. January 27, 2 | 2015-01-27 |
Three-dimensional mask model for photolithography simulation Grant 8,938,694 - Liu , et al. January 20, 2 | 2015-01-20 |
Integration Of Lithography Apparatus And Mask Optimization Process With Multiple Patterning Process App 20140365983 - CHEN; Luoqi ;   et al. | 2014-12-11 |
System and method for lithography simulation Grant 8,893,067 - Ye , et al. November 18, 2 | 2014-11-18 |
Correction for flare effects in lithography system Grant 8,887,104 - Liu , et al. November 11, 2 | 2014-11-11 |
Integration of lithography apparatus and mask optimization process with multiple patterning process Grant 8,819,601 - Chen , et al. August 26, 2 | 2014-08-26 |
Harmonic Resist Model For Use In A Lithographic Apparatus And A Device Manufacturing Method App 20140198972 - CAO; Yu ;   et al. | 2014-07-17 |
Three-dimensional Mask Model For Photolithography Simulation App 20140195993 - LIU; Peng ;   et al. | 2014-07-10 |
Method of pattern selection for source and mask optimization Grant 8,739,082 - Liu , et al. May 27, 2 | 2014-05-27 |
Harmonic resist model for use in a lithographic apparatus and a device manufacturing method Grant 8,682,059 - Cao , et al. March 25, 2 | 2014-03-25 |
Fast Freeform Source And Mask Co-optimization Method App 20140068530 - CHEN; Luoqi ;   et al. | 2014-03-06 |
Content-based Bidding In Online Advertising App 20140012672 - Ye; Jun ;   et al. | 2014-01-09 |
Content-based Targeted Online Advertisement App 20140012671 - Ye; Jun ;   et al. | 2014-01-09 |
Three-dimensional mask model for photolithography simulation Grant 8,589,829 - Liu , et al. November 19, 2 | 2013-11-19 |
Fast freeform source and mask co-optimization method Grant 8,584,056 - Chen , et al. November 12, 2 | 2013-11-12 |
Harmonic Resist Model For Use In A Lithographic Apparatus And A Device Manufacturing Method App 20130251237 - CAO; Yu ;   et al. | 2013-09-26 |
Selection of optimum patterns in a design layout based on diffraction signature analysis Grant 8,543,947 - Liu , et al. September 24, 2 | 2013-09-24 |
System and method for lithography simulation Grant 8,516,405 - Ye , et al. August 20, 2 | 2013-08-20 |
Correction For Flare Effects In Lithography System App 20130185681 - Liu; Hua-Yu ;   et al. | 2013-07-18 |
Three-dimensional Mask Model For Photolithographysimulation App 20130139118 - LIU; Peng ;   et al. | 2013-05-30 |
Harmonic resist model for use in a lithographic apparatus and a device manufacturing method Grant 8,447,095 - Cao , et al. May 21, 2 | 2013-05-21 |
Sentiment-targeting For Online Advertisement App 20130066716 - Chen; Luoqi ;   et al. | 2013-03-14 |
Method Of Attention-targeting For Online Advertisement App 20130041750 - YE; Jun ;   et al. | 2013-02-14 |
Three-dimensional mask model for photolithography simulation Grant 8,352,885 - Liu , et al. January 8, 2 | 2013-01-08 |
Integration of Lithography Apparatus and Mask Optimization Process with Multiple Patterning Process App 20120254813 - Chen; Luoqi ;   et al. | 2012-10-04 |
Method of Pattern Selection for Source and Mask Optimization App 20120216156 - Liu; Hua-Yu ;   et al. | 2012-08-23 |
System and method for creating a focus-exposure model of a lithography process Grant 8,245,160 - Ye , et al. August 14, 2 | 2012-08-14 |
System and method for lithography simulation Grant 8,209,640 - Ye , et al. June 26, 2 | 2012-06-26 |
Optimization Flows of Source, Mask and Projection Optics App 20120113404 - Hsu; Duan-Fu ;   et al. | 2012-05-10 |
Source Polarization Optimization App 20120075605 - Chen; Luoqi | 2012-03-29 |
System and Method for Creating a Focus-Exposure Model of a Lithography Process App 20120017183 - Ye; Jun ;   et al. | 2012-01-19 |
System and method for creating a focus-exposure model of a lithography process Grant 8,065,636 - Ye , et al. November 22, 2 | 2011-11-22 |
Fast Freeform Source and Mask Co-Optimization Method App 20110230999 - Chen; Luoqi ;   et al. | 2011-09-22 |
Selection of Optimum Patterns in a Design Layout Based on Diffraction Signature Analysis App 20110107280 - Liu; Hua-Yu ;   et al. | 2011-05-05 |
System and Method for Lithography Simulation App 20110083113 - Ye; Jun ;   et al. | 2011-04-07 |
System and method for lithography simulation Grant 7,873,937 - Ye , et al. January 18, 2 | 2011-01-18 |
System And Method For Creating A Focus-exposure Model Of A Lithography Process App 20100229147 - YE; Jun ;   et al. | 2010-09-09 |
System and method for creating a focus-exposure model of a lithography process Grant 7,747,978 - Ye , et al. June 29, 2 | 2010-06-29 |
Three-dimensional Mask Model For Photolithography Simulation App 20100162199 - Liu; Peng ;   et al. | 2010-06-24 |
Harmonic Resist Model For Use In A Lithographic Apparatus And A Device Manufacturing Method App 20100128969 - CAO; Yu ;   et al. | 2010-05-27 |
System And Method For Creating A Focus-exposure Model Of A Lithography Process App 20070031745 - Ye; Jun ;   et al. | 2007-02-08 |
System and method for lithography simulation App 20070022402 - Ye; Jun ;   et al. | 2007-01-25 |
System and method for lithography simulation Grant 7,120,895 - Ye , et al. October 10, 2 | 2006-10-10 |
System and method for lithography simulation Grant 7,117,477 - Ye , et al. October 3, 2 | 2006-10-03 |
System and method for lithography simulation Grant 7,117,478 - Ye , et al. October 3, 2 | 2006-10-03 |
System and method for lithography simulation Grant 7,114,145 - Ye , et al. September 26, 2 | 2006-09-26 |
System and method for lithography simulation Grant 7,111,277 - Ye , et al. September 19, 2 | 2006-09-19 |
System and method for lithography simulation Grant 7,003,758 - Ye , et al. February 21, 2 | 2006-02-21 |
System and method for lithography simulation App 20050166174 - Ye, Jun ;   et al. | 2005-07-28 |
System and method for lithography simulation App 20050122500 - Ye, Jun ;   et al. | 2005-06-09 |
System and method for lithography simulation App 20050120327 - Ye, Jun ;   et al. | 2005-06-02 |
System and method for lithography simulation App 20050097500 - Ye, Jun ;   et al. | 2005-05-05 |
System and method for lithography simulation App 20050091633 - Ye, Jun ;   et al. | 2005-04-28 |
System and method for lithography simulation App 20050076322 - Ye, Jun ;   et al. | 2005-04-07 |