Chen; Lucy Zhiping
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Lucy Zhiping.The latest application filed is for "methods and apparatus for electron beam etching process".
- Chen; Lucy Zhiping - Santa Clara CA
- Chen, Lucy Zhiping - San Jose CA
| Patent | Date |
|---|---|
| Plasma deposition of carbon hardmask Grant 11,043,375 - Yang , et al. June 22, 2 | 2021-06-22 |
| Methods and apparatus for electron beam etching process Grant 10,790,153 - Guo , et al. September 29, 2 | 2020-09-29 |
| Etching methods Grant 10,707,086 - Yang , et al. | 2020-07-07 |
| Methods And Apparatus For Electron Beam Etching Process App 20200006036 - GUO; Yue ; et al. | 2020-01-02 |
| Etching Apparatus App 20190393053 - YANG; Yang ; et al. | 2019-12-26 |
| Etching Apparatus And Methods App 20190221437 - YANG; Yang ; et al. | 2019-07-18 |
| Plasma Deposition Of Carbon Hardmask App 20190057862 - YANG; Yang ; et al. | 2019-02-21 |
| Method and apparatus for cleaning a substrate processing chamber App 20040200498 - Wang, Xikun ; et al. | 2004-10-14 |
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