| Patent | Date |
|---|
Semiconductor Devices Including Backside Power Rails and Methods of Manufacture
App 20220310785 - Wu; Chun-Hung ; et al. | 2022-09-29 |
Semiconductor device and method
Grant 11,456,373 - Chan , et al. September 27, 2 | 2022-09-27 |
Semiconductor device having a contact plug with an air gap spacer
Grant 11,456,383 - Liu , et al. September 27, 2 | 2022-09-27 |
Ion implant process for defect elimination in metal layer planarization
Grant 11,450,565 - Chen , et al. September 20, 2 | 2022-09-20 |
Doping for semiconductor device with conductive feature
Grant 11,450,741 - Liu , et al. September 20, 2 | 2022-09-20 |
Wafer Positioning Method and Apparatus
App 20220293448 - Chen; Chia-Cheng ; et al. | 2022-09-15 |
Reducing Spacing Between Conductive Features Through Implantation
App 20220230911 - Chen; Kuo-Ju ; et al. | 2022-07-21 |
Ion exposure method and apparatus
Grant 11,393,695 - Chen , et al. July 19, 2 | 2022-07-19 |
Semiconductor Device And Methods Of Forming The Same
App 20220216147 - Chou; Pei-Yu ; et al. | 2022-07-07 |
Variable size fin structures
Grant 11,380,782 - Liu , et al. July 5, 2 | 2022-07-05 |
Sacrificial Layer For Semiconductor Process
App 20220181451 - Wang; Tsan-Chun ; et al. | 2022-06-09 |
Source/Drain Structure
App 20220173239 - Liu; Su-Hao ; et al. | 2022-06-02 |
Melt Anneal Source and Drain Regions
App 20220140079 - Liu; Su-Hao ; et al. | 2022-05-05 |
Metal Loss Prevention Using Implantation
App 20220122884 - Wu; Li-Chieh ; et al. | 2022-04-21 |
System And Method For Multiple Step Directional Patterning
App 20220102139 - YANG; Chih-Kai ; et al. | 2022-03-31 |
Semiconductor device and methods of forming the same
Grant 11,289,417 - Chou , et al. March 29, 2 | 2022-03-29 |
Semiconductor Device and Method
App 20220093758 - Chen; Kuo-Ju ; et al. | 2022-03-24 |
Bottom Lateral Expansion of Contact Plugs Through Implantation
App 20220059405 - Chou; Meng-Han ; et al. | 2022-02-24 |
Variable Size Fin Structures
App 20220059679 - LIU; Su-Hao ; et al. | 2022-02-24 |
Semiconductor Device and Method of Manufacture
App 20220059700 - Chien; Wei-Ting ; et al. | 2022-02-24 |
Sacrificial layer for semiconductor process
Grant 11,257,911 - Wang , et al. February 22, 2 | 2022-02-22 |
High surface dopant concentration formation processes and structures formed thereby
Grant 11,257,906 - Chen , et al. February 22, 2 | 2022-02-22 |
Source/drain structure
Grant 11,257,952 - Liu , et al. February 22, 2 | 2022-02-22 |
Melt anneal source and drain regions
Grant 11,227,918 - Liu , et al. January 18, 2 | 2022-01-18 |
Deposition Window Enlargement
App 20210407808 - Chou; Meng-Han ; et al. | 2021-12-30 |
Metal loss prevention using implantation
Grant 11,211,289 - Wu , et al. December 28, 2 | 2021-12-28 |
Semiconductor Device And Method For Forming The Same
App 20210335719 - Chen; Kuo-Ju ; et al. | 2021-10-28 |
Connecting Structure And Method For Forming The Same
App 20210327818 - Chen; Kuo-Ju ; et al. | 2021-10-21 |
Semiconductor structure with doped contact plug and method for forming the same
Grant 11,145,751 - Chen , et al. October 12, 2 | 2021-10-12 |
Sacrificial Layer for Semiconductor Process
App 20210313435 - Wang; Tsan-Chun ; et al. | 2021-10-07 |
Ion Implant Process For Defect Elimination In Metal Layer Planarization
App 20210305092 - CHEN; Chia-Cheng ; et al. | 2021-09-30 |
Melting Laser Anneal of Epitaxy Regions
App 20210257255 - Liu; Su-Hao ; et al. | 2021-08-19 |
Doping for Semiconductor Device with Conductive Feature
App 20210226008 - Liu; Su-Hao ; et al. | 2021-07-22 |
Formation method of semiconductor device with low resistance contact
Grant 11,049,972 - Chen , et al. June 29, 2 | 2021-06-29 |
Semiconductor Device and Method of Manufacture
App 20210134660 - Wang; Yu Shih ; et al. | 2021-05-06 |
Process for Making Multi-Gate Transistors and Resulting Structures
App 20210111035 - Liu; Su-Hao ; et al. | 2021-04-15 |
Melting laser anneal of epitaxy regions
Grant 10,978,344 - Liu , et al. April 13, 2 | 2021-04-13 |
Method Of Manufacturing Semiconductor Devices
App 20210096473 - LIU; Ru-Gun ; et al. | 2021-04-01 |
Semiconductor Device And Methods Of Forming The Same
App 20210098365 - Chou; Pei-Yu ; et al. | 2021-04-01 |
Gate Spacer Structure and Method of Forming Same
App 20210098599 - Chien; Wei-Ting ; et al. | 2021-04-01 |
FinFET Devices and Methods of Forming
App 20210091209 - Chen; Chia-Cheng ; et al. | 2021-03-25 |
Doping for semiconductor device with conductive feature
Grant 10,950,694 - Liu , et al. March 16, 2 | 2021-03-16 |
Finfet Device And Method
App 20210066500 - Liu; Su-Hao ; et al. | 2021-03-04 |
Melting Laser Anneal Of Epitaxy Regions
App 20210057276 - Liu; Su-Hao ; et al. | 2021-02-25 |
Semiconductor Structure With Doped Via Plug
App 20200402853 - HSIEH; Tung-Po ; et al. | 2020-12-24 |
Field effect transistor contact with reduced contact resistance using implantation process
Grant 10,868,178 - Liu , et al. December 15, 2 | 2020-12-15 |
Gate spacer structure and method of forming same
Grant 10,868,142 - Chien , et al. December 15, 2 | 2020-12-15 |
FinFET devices and methods of forming
Grant 10,861,957 - Chen , et al. December 8, 2 | 2020-12-08 |
Process for making multi-gate transistors and resulting structures
Grant 10,854,471 - Liu , et al. December 1, 2 | 2020-12-01 |
Method For Forming Semiconductor Structure
App 20200343242 - CHEN; Chia-Cheng ; et al. | 2020-10-29 |
High Surface Dopant Concentration Formation Processes and Structures Formed Thereby
App 20200295135 - Chen; Chia-Cheng ; et al. | 2020-09-17 |
Source/Drain Structure
App 20200279944 - Liu; Su-Hao ; et al. | 2020-09-03 |
Semiconductor structure with doped via plug and method for forming the same
Grant 10,763,168 - Hsieh , et al. Sep | 2020-09-01 |
Fin field effect transistors having conformal oxide layers and methods of forming same
Grant 10,756,199 - Chen , et al. A | 2020-08-25 |
Formation Method Of Semiconductor Device With Low Resistance Contact
App 20200266299 - CHEN; Chia-Cheng ; et al. | 2020-08-20 |
Semiconductor Device and Method
App 20200259001 - A1 | 2020-08-13 |
Semiconductor structure and method for forming the same
Grant 10,727,226 - Chen , et al. | 2020-07-28 |
High surface dopant concentration formation processes and structures formed thereby
Grant 10,672,871 - Chen , et al. | 2020-06-02 |
Semiconductor device and method
Grant 10,665,697 - Chan , et al. | 2020-05-26 |
Structure and formation method of semiconductor device with low resistance contact
Grant 10,658,508 - Chen , et al. | 2020-05-19 |
Source/drain structure
Grant 10,658,510 - Liu , et al. | 2020-05-19 |
Metal loss prevention using implantation
Grant 10,643,892 - Wu , et al. | 2020-05-05 |
Gate Spacer Structure And Method Of Forming Same
App 20200135889 - Chien; Wei-Ting ; et al. | 2020-04-30 |
Forming Epitaxial Structures in Fin Field Effect Transistors
App 20200135894 - Chan; Chia-Ling ; et al. | 2020-04-30 |
Field Effect Transistor Contact with Reduced Contact Resistance Using Implantation Process
App 20200119195 - Liu; Su-Hao ; et al. | 2020-04-16 |
Minimization of plasma doping induced fin height loss
Grant 10,566,242 - Chan , et al. Feb | 2020-02-18 |
Melt Anneal Source and Drain Regions
App 20200044025 - Liu; Su-Hao ; et al. | 2020-02-06 |
High Surface Dopant Concentration Formation Processes and Structures Formed Thereby
App 20200006486 - Chen; Chia-Cheng ; et al. | 2020-01-02 |
Source/Drain Structure
App 20200006545 - Liu; Su-Hao ; et al. | 2020-01-02 |
Forming epitaxial structures in fin field effect transistors
Grant 10,522,656 - Chan , et al. Dec | 2019-12-31 |
Semiconductor Device and Method
App 20190386118 - Chan; Chia-Ling ; et al. | 2019-12-19 |
Metal Loss Prevention Using Implantation
App 20190385909 - Wu; Li-Chieh ; et al. | 2019-12-19 |
Field effect transistor contact with reduced contact resistance using implantation process
Grant 10,510,891 - Liu , et al. Dec | 2019-12-17 |
High surface dopant concentration formation processes and structures formed thereby
Grant 10,510,838 - Chen , et al. Dec | 2019-12-17 |
Field Effect Transistor Contact with Reduced Contact Resistance Using Implantation Process
App 20190378928 - Liu; Su-Hao ; et al. | 2019-12-12 |
Metal Loss Prevention Using Implantation
App 20190371664 - Wu; Li-Chieh ; et al. | 2019-12-05 |
Process for Making Multi-Gate Transistors and Resulting Structures
App 20190348298 - Liu; Su-Hao ; et al. | 2019-11-14 |
Semiconductor Structure With Doped Contact Plug And Method For Forming The Same
App 20190305107 - CHEN; Kuo-Ju ; et al. | 2019-10-03 |
Doping for Semiconductor Device with Conductive Feature
App 20190288068 - Liu; Su-Hao ; et al. | 2019-09-19 |
Forming Epitaxial Structures in Fin Field Effect Transistors
App 20190267471 - Chan; Chia-Ling ; et al. | 2019-08-29 |
Fin Field Effect Transistors having Conformal Oxide Layers and Methods of Forming Same
App 20190245057 - Chen; Chia-Cheng ; et al. | 2019-08-08 |
Process for making multi-gate transistors and resulting structures
Grant 10,361,094 - Liu , et al. | 2019-07-23 |
Doping for semiconductor device with conductive feature
Grant 10,347,720 - Liu , et al. July 9, 2 | 2019-07-09 |
Field effect transistor contact with reduced contact resistance using implantation process
Grant 10,347,762 - Liu , et al. July 9, 2 | 2019-07-09 |
FinFET device and methods of forming
Grant 10,326,003 - Chen , et al. | 2019-06-18 |
High Surface Dopant Concentration Formation Processes And Structures Formed Thereby
App 20190165099 - CHEN; Chia-Cheng ; et al. | 2019-05-30 |
Structure And Formation Method Of Semiconductor Device With Low Resistance Contact
App 20190157456 - CHEN; Chia-Cheng ; et al. | 2019-05-23 |
Semiconductor Structure With Doped Via Plug And Method For Forming The Same
App 20190157148 - HSIEH; Tung-Po ; et al. | 2019-05-23 |
Doping for Semiconductor Device with Conductive Feature
App 20190131399 - LIU; Su-Hao ; et al. | 2019-05-02 |
FinFET Devices and Methods of Forming
App 20190123181 - Chen; Chia-Cheng ; et al. | 2019-04-25 |
Flowable CVD quality control in STI loop
Grant 10,269,656 - Wang , et al. | 2019-04-23 |
Fin field effect transistors having conformal oxide layers and methods of forming same
Grant 10,269,921 - Chen , et al. | 2019-04-23 |
Multiple gate field effect transistors having oxygen-scavenged gate stack
Grant 10,263,091 - Yeo , et al. | 2019-04-16 |
Semiconductor Structure And Method For Forming The Same
App 20190027473 - CHEN; Chia-Cheng ; et al. | 2019-01-24 |
Process for making multi-gate transistors and resulting structures
Grant 10,177,006 - Liu , et al. J | 2019-01-08 |
FinFET devices and methods of forming
Grant 10,164,066 - Chen , et al. Dec | 2018-12-25 |
Process for Making Multi-Gate Transistors and Resulting Structures
App 20180366341 - Liu; Su-Hao ; et al. | 2018-12-20 |
Innovative Approach To Minimize Plasma Doping Induced Fin Height Loss
App 20180166341 - CHAN; Chia-Ling ; et al. | 2018-06-14 |
FINFET Device and Methods of Forming
App 20180151701 - Chen; Chia-Cheng ; et al. | 2018-05-31 |
Process for Making Multi-Gate Transistors and Resulting Structures
App 20180151387 - Liu; Su-Hao ; et al. | 2018-05-31 |
FinFET Devices and Methods of Forming
App 20180151704 - CHEN; CHIA-CHENG ; et al. | 2018-05-31 |
Fin Field Effect Transistors having Conformal Oxide Layers and Methods of Forming Same
App 20180145143 - Chen; Chia-Cheng ; et al. | 2018-05-24 |
Flowable CVD Quality Control in STI Loop
App 20180061717 - Wang; Tsan-Chun ; et al. | 2018-03-01 |
Method of modifying capping layer in semiconductor structure
Grant 9,837,504 - Chen , et al. December 5, 2 | 2017-12-05 |
Flowable CVD quality control in STI loop
Grant 9,824,937 - Wang , et al. November 21, 2 | 2017-11-21 |
Multiple gate field-effect transistors having oxygen-scavenged gate stack
Grant 9,659,780 - Yeo , et al. May 23, 2 | 2017-05-23 |
Method Of Modifying Capping Layer In Semiconductor Structure
App 20170125536 - CHEN; Chun-Heng ; et al. | 2017-05-04 |
Multiple Gate Field Effect Transistors Having Oxygen-Scavenged Gate Stack
App 20170092732 - Yeo; Yee-Chia ; et al. | 2017-03-30 |
Multiple gate field-effect transistors having oxygen-scavenged gate stack
Grant 9,564,489 - Yeo , et al. February 7, 2 | 2017-02-07 |
Multiple Gate Field-effect Transistors Having Oxygen-scavenged Gate Stack
App 20160380056 - Yeo; Yee-Chia ; et al. | 2016-12-29 |
Multi-Gate Field Effect Transistors Having Oxygen-Scavenged Gate Stack
App 20160379831 - Yeo; Yee-Chia ; et al. | 2016-12-29 |
Fin field effect transistors having conformal oxide layers and methods of forming same
Grant 9,515,188 - Chen , et al. December 6, 2 | 2016-12-06 |
Fin Field Effect Transistors Having Conformal Oxide Layers and Methods of Forming Same
App 20160181428 - Chen; Chia-Cheng ; et al. | 2016-06-23 |
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