| Patent | Date |
|---|
Method And Apparatus For Removing Contamination
App 20220308465 - HUANG; Yu-Chih ; et al. | 2022-09-29 |
Semiconductor Processing Method And Apparatus
App 20220310431 - DENG; Shang-Shiuan ; et al. | 2022-09-29 |
System And Method For Detecting Debris In A Photolithography System
App 20220299883 - TU; Shih-Yu ; et al. | 2022-09-22 |
Radiation Source Apparatus And Method For Using The Same
App 20220304131 - CHENG; Chiao-Hua ; et al. | 2022-09-22 |
Shock wave visualization for extreme ultraviolet plasma optimization
Grant 11,452,197 - Su , et al. September 20, 2 | 2022-09-20 |
EUV photolithography system and methods of operating the same
Grant 11,442,365 - Sun , et al. September 13, 2 | 2022-09-13 |
Target Control In Extreme Ultraviolet Lithography Systems Using Aberration Of Reflection Image
App 20220283507 - CHENG; Ting-Ya ; et al. | 2022-09-08 |
Substrate Stage, Substrate Processing System Using The Same, And Method For Processing Substrate
App 20220283517 - CHEN; Yu-Huan ; et al. | 2022-09-08 |
Lithography apparatus and method for using the same
Grant 11,437,161 - Chang , et al. September 6, 2 | 2022-09-06 |
Droplet Generator And Method Of Servicing A Photolithographic Tool
App 20220276572 - CHEN; Yu-Huan ; et al. | 2022-09-01 |
Light Source, Euv Lithography System, And Method For Performing Circuit Layout Patterning Process
App 20220276574 - YANG; Chi ; et al. | 2022-09-01 |
System And Method For Omnidirectional Real Time Detection Of Photolithography Characteristics
App 20220269182 - CHEN; Tai-Yu ; et al. | 2022-08-25 |
Method For Controlling Extreme Ultraviolet Light
App 20220260927 - CHEN; Ssu-Yu ; et al. | 2022-08-18 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20220260922 - HSIEH; Chieh ; et al. | 2022-08-18 |
Method Of Lithography Process Using Reticle Container With Discharging Device
App 20220260901 - CHANG; Hsiao-Lun ; et al. | 2022-08-18 |
EUV radiation modification methods and systems
Grant 11,419,203 - Chang , et al. August 16, 2 | 2022-08-16 |
System And Method For Monitoring And Controlling Extreme Ultraviolet Photolithography Processes
App 20220229371 - CHEN; Tai-Yu ; et al. | 2022-07-21 |
Particle removal device and method
Grant 11,392,041 - Wu , et al. July 19, 2 | 2022-07-19 |
System and method for performing extreme ultraviolet photolithography processes
Grant 11,392,040 - Chen , et al. July 19, 2 | 2022-07-19 |
Extreme Ultraviolet Lithography System With Heated Tin Vane Bucket Having A Heated Cover
App 20220225490 - CHEN; Ssu-Yu ; et al. | 2022-07-14 |
Radiation Source For Lithography Process
App 20220197160 - WU; Shang-Ying ; et al. | 2022-06-23 |
Euv Light Source And Apparatus For Lithography
App 20220191999 - CHIEN; Shang-Chieh ; et al. | 2022-06-16 |
Photolithography device having illuminator and method for adjusting intensity uniformity
Grant 11,360,392 - Hsu , et al. June 14, 2 | 2022-06-14 |
Target control in extreme ultraviolet lithography systems using aberration of reflection image
Grant 11,340,531 - Cheng , et al. May 24, 2 | 2022-05-24 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 11,333,983 - Yang , et al. May 17, 2 | 2022-05-17 |
Reticle with conductive material structure
Grant 11,320,733 - Chang , et al. May 3, 2 | 2022-05-03 |
Method and apparatus for controlling extreme ultraviolet light
Grant 11,320,744 - Chen , et al. May 3, 2 | 2022-05-03 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20220124901 - CHENG; Ting-Ya ; et al. | 2022-04-21 |
Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover
Grant 11,297,710 - Chen , et al. April 5, 2 | 2022-04-05 |
Particle Removal Device And Method
App 20220100100 - Wu; Cheng-Hsuan ; et al. | 2022-03-31 |
Euv Wafer Defect Improvement And Method Of Collecting Nonconductive Particles
App 20220100105 - CHEN; Tao-Hsin ; et al. | 2022-03-31 |
Lithography system and cleaning method thereof
Grant 11,287,755 - Lin , et al. March 29, 2 | 2022-03-29 |
Droplet generator and method of servicing a photolithographic tool
Grant 11,275,317 - Chen , et al. March 15, 2 | 2022-03-15 |
Radiation source for lithography process
Grant 11,275,318 - Wu , et al. March 15, 2 | 2022-03-15 |
EUV light source and apparatus for lithography
Grant 11,272,606 - Chien , et al. March 8, 2 | 2022-03-08 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,269,257 - Hsieh , et al. March 8, 2 | 2022-03-08 |
Lithography System And Method Thereof
App 20220066331 - WANG; Shao-Hua ; et al. | 2022-03-03 |
Method of operating semiconductor apparatus and semiconductor apparatus
Grant 11,243,479 - Chen , et al. February 8, 2 | 2022-02-08 |
Process system and operating method thereof
Grant 11,237,482 - Chang , et al. February 1, 2 | 2022-02-01 |
EUV light source and apparatus for lithography
Grant 11,226,564 - Yeh , et al. January 18, 2 | 2022-01-18 |
Target Control In Extreme Ultraviolet Lithography Systems Using Aberration Of Reflection Image
App 20220011675 - CHENG; Ting-Ya ; et al. | 2022-01-13 |
System and method for extreme ultraviolet source control
Grant 11,224,115 - Hsu , et al. January 11, 2 | 2022-01-11 |
Detection Using Semiconductor Detector
App 20210407764 - KING; Ya-Chin ; et al. | 2021-12-30 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,212,903 - Cheng , et al. December 28, 2 | 2021-12-28 |
Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source
Grant 11,204,556 - Huang , et al. December 21, 2 | 2021-12-21 |
Plasma Position Control For Extreme Ultraviolet Lithography Light Sources
App 20210389678 - CHEN; Ssu-Yu ; et al. | 2021-12-16 |
Method And Apparatus For Controlling Extreme Ultraviolet Light
App 20210364931 - CHEN; Ssu-Yu ; et al. | 2021-11-25 |
EUV Lithography Mask With A Porous Reflective Multilayer Structure
App 20210364907 - Shih; Chih-Tsung ; et al. | 2021-11-25 |
Extreme Ultraviolet Lithography System
App 20210364934 - Chen; Ssu-Yu ; et al. | 2021-11-25 |
System And Method For Performing Extreme Ultraviolet Photolithography Processes
App 20210349396 - CHEN; Tai-Yu ; et al. | 2021-11-11 |
Droplet generator, EUV lithography device and method of generating a series of droplets using a droplet generator
Grant 11,172,566 - Hsiao , et al. November 9, 2 | 2021-11-09 |
Method and device for measuring contamination in EUV source
Grant 11,166,361 - Chen , et al. November 2, 2 | 2021-11-02 |
Laser source device, extreme ultraviolet lithography device and method
Grant 11,158,989 - Tong , et al. October 26, 2 | 2021-10-26 |
Extreme ultraviolet photolithography method
Grant 11,153,958 - Tsai , et al. October 19, 2 | 2021-10-19 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,153,959 - Hsu , et al. October 19, 2 | 2021-10-19 |
Method and apparatus for collecting information used in image-error compensation
Grant 11,150,561 - Cho , et al. October 19, 2 | 2021-10-19 |
EUV wafer defect improvement and method of collecting nonconductive particles
Grant 11,150,564 - Chen , et al. October 19, 2 | 2021-10-19 |
Thermal Controlling Method In Lithography System
App 20210318625 - YANG; Chi ; et al. | 2021-10-14 |
Droplet generator assembly and method for using the same and radiation source apparatus
Grant 11,134,558 - Tu , et al. September 28, 2 | 2021-09-28 |
Particle Image Velocimetry Of Extreme Ultraviolet Lithography Systems
App 20210294220 - LAI; En Hao ; et al. | 2021-09-23 |
Droplet Generator And Method Of Servicing Extreme Ultraviolet Radiation Source Apparatus
App 20210294226 - CHEN; Yen-Hsun ; et al. | 2021-09-23 |
Replacement Method For Droplet Generator
App 20210298161 - TU; Shih-Yu ; et al. | 2021-09-23 |
Layout Modification Method For Exposure Manufacturing Process
App 20210296303 - CHO; Hung-Wen ; et al. | 2021-09-23 |
Droplet Catcher, Droplet Catcher System Of Euv Lithography Apparatus, And Maintenance Method Of The Euv Lithography Apparatus
App 20210286273 - Tu; Shih-Yu ; et al. | 2021-09-16 |
Method and apparatus for lithography in semiconductor fabrication
Grant 11,121,018 - Kuo , et al. September 14, 2 | 2021-09-14 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20210274627 - LAI; Wei-Chih ; et al. | 2021-09-02 |
Reticle Backside Inspection Method
App 20210256686 - CHEN; Zi-Wen ; et al. | 2021-08-19 |
EUV vessel inspection method and related system
Grant 11,092,555 - Chang , et al. August 17, 2 | 2021-08-17 |
Extreme Ultraviolet Lithography System With Heated Tin Vane Bucket Having A Heated Cover
App 20210247702 - CHEN; Ssu-Yu ; et al. | 2021-08-12 |
Lithography system and method thereof
Grant 11,086,225 - Cheng , et al. August 10, 2 | 2021-08-10 |
EUV lithography mask with a porous reflective multilayer structure
Grant 11,086,209 - Shih , et al. August 10, 2 | 2021-08-10 |
Extreme ultraviolet lithography system
Grant 11,086,237 - Chen , et al. August 10, 2 | 2021-08-10 |
Light Source For Lithography Exposure Process
App 20210243875 - HSIEH; Chieh ; et al. | 2021-08-05 |
Residual gain monitoring and reduction for EUV drive laser
App 20210235572 - Chang; Chun-Lin Louis ; et al. | 2021-07-29 |
Extreme Ultraviolet Control System
App 20210223701 - CHUNG; Jen-Yang ; et al. | 2021-07-22 |
Euv Light Source And Apparatus For Euv Lithography
App 20210227676 - CHENG; Wei-Shin ; et al. | 2021-07-22 |
Euv Lithography System And Method For Decreasing Debris In Euv Lithography System
App 20210223708 - YANG; Chi ; et al. | 2021-07-22 |
Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method
Grant 11,067,906 - Tu , et al. July 20, 2 | 2021-07-20 |
Extreme ultraviolet radiation source and cleaning method thereof
Grant 11,071,191 - Yang , et al. July 20, 2 | 2021-07-20 |
System And Apparatus For Lithography In Semiconductor Fabrication
App 20210216015 - WU; Cheng-Kuan ; et al. | 2021-07-15 |
Euv Radiation Source Apparatus For Lithography
App 20210208508 - CHEN; Yu-Chih ; et al. | 2021-07-08 |
Lithography System And Cleaning Method Thereof
App 20210191284 - Lin; Sheng-Ta ; et al. | 2021-06-24 |
Radiation Source For Lithography Process
App 20210173316 - WU; Shang-Ying ; et al. | 2021-06-10 |
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
Grant 11,029,613 - Chen , et al. June 8, 2 | 2021-06-08 |
Particle image velocimetry of extreme ultraviolet lithography systems
Grant 11,029,324 - Lai , et al. June 8, 2 | 2021-06-08 |
Refill and replacement method for droplet generator
Grant 11,032,897 - Tu , et al. June 8, 2 | 2021-06-08 |
Euv Radiation Modification Methods And Systems
App 20210168923 - CHANG; Chun-Lin Louis ; et al. | 2021-06-03 |
Layout modification method for exposure manufacturing process
Grant 11,024,623 - Cho , et al. June 1, 2 | 2021-06-01 |
Method Of Operating Semiconductor Apparatus And Semiconductor Apparatus
App 20210149317 - CHEN; Hsiang ; et al. | 2021-05-20 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,013,097 - Lai , et al. May 18, 2 | 2021-05-18 |
Pressurized tin collection bucket with in-line draining mechanism
Grant 11,003,067 - Yang , et al. May 11, 2 | 2021-05-11 |
Reticle backside inspection method
Grant 10,997,706 - Chen , et al. May 4, 2 | 2021-05-04 |
Light source for lithography exposure process
Grant 10,993,308 - Hsieh , et al. April 27, 2 | 2021-04-27 |
Lithography apparatus and cleaning method thereof
Grant 10,990,026 - Yang , et al. April 27, 2 | 2021-04-27 |
Residual gain monitoring and reduction for EUV drive laser
Grant 10,980,100 - Chang , et al. April 13, 2 | 2021-04-13 |
Extreme ultraviolet control system for adjusting droplet illumination parameters
Grant 10,969,690 - Chung , et al. April 6, 2 | 2021-04-06 |
Method and apparatus for lithography in semiconductor fabrication
Grant 10,962,881 - Wu , et al. March 30, 2 | 2021-03-30 |
Radiation source apparatus and method for decreasing debris in radiation source apparatus
Grant 10,955,762 - Yang , et al. March 23, 2 | 2021-03-23 |
Lithography system and method thereof
Grant 10,955,750 - Yen , et al. March 23, 2 | 2021-03-23 |
EUV radiation source apparatus for lithography
Grant 10,955,752 - Chen , et al. March 23, 2 | 2021-03-23 |
Lithography system and cleaning method thereof
Grant 10,942,459 - Lin , et al. March 9, 2 | 2021-03-09 |
System and Method for Extreme Ultraviolet Source Control
App 20210068241 - Hsu; Chun-Chia ; et al. | 2021-03-04 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20210055664 - YANG; Chi ; et al. | 2021-02-25 |
Refill And Replacement Method For Droplet Generator
App 20210059036 - TU; Shih-Yu ; et al. | 2021-02-25 |
Radiation source for lithography process
Grant 10,928,741 - Wu , et al. February 23, 2 | 2021-02-23 |
EUV radiation source for lithography exposure process
Grant 10,925,142 - Hsu , et al. February 16, 2 | 2021-02-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20210041787 - HSIEH; Chieh ; et al. | 2021-02-11 |
EUV radiation modification methods and systems
Grant 10,917,959 - Chang , et al. February 9, 2 | 2021-02-09 |
Droplet Generator, Euv Lithography Device And Method Of Generating A Series Of Droplets Using A Droplet Generator
App 20210037634 - Hsiao; Jen-Hung ; et al. | 2021-02-04 |
Lithography System And Cleaning Method Thereof
App 20210033990 - Lin; Sheng-Ta ; et al. | 2021-02-04 |
Droplet Catcher System of EUV Lithography Apparatus and EUV Lithography Apparatus Maintenance Method
App 20210033986 - Tu; Shih-Yu ; et al. | 2021-02-04 |
Extreme Ultraviolet Lithography System
App 20210033983 - Chen; Ssu-Yu ; et al. | 2021-02-04 |
Photography Device Having Illuminator And Method For Adjusting Intensity Uniformity
App 20210033982 - Hsu; Che-Chang ; et al. | 2021-02-04 |
Reticle With Conductive Material Structure
App 20210026236 - CHANG; Hsiao-Lun ; et al. | 2021-01-28 |
Lithography System And Method Thereof
App 20210018845 - YEN; Wei-Chun ; et al. | 2021-01-21 |
Extreme Ultraviolet Photolithography Method
App 20200413526 - TSAI; Ming-Hsun ; et al. | 2020-12-31 |
Extreme ultraviolet radiation source
Grant 10,877,190 - Yang , et al. December 29, 2 | 2020-12-29 |
Vessel for extreme ultraviolet radiation source
Grant 10,877,378 - Chen , et al. December 29, 2 | 2020-12-29 |
Collector pellicle
Grant 10,880,981 - Chien , et al. December 29, 2 | 2020-12-29 |
Pressurized tin collection bucket with in-line draining mechanism
Grant 10,877,366 - Yang , et al. December 29, 2 | 2020-12-29 |
Method and apparatus for removing debris from collector
Grant 10,875,060 - Wu , et al. December 29, 2 | 2020-12-29 |
EUV light source and apparatus for EUV lithography
Grant 10,880,980 - Cheng , et al. December 29, 2 | 2020-12-29 |
Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source
Grant 10,871,647 - Liu , et al. December 22, 2 | 2020-12-22 |
EUV metal droplet catchers
Grant 10,871,719 - Lin , et al. December 22, 2 | 2020-12-22 |
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning
Grant 10,871,713 - Cho , et al. December 22, 2 | 2020-12-22 |
Semiconductor apparatus and method of operating the same
Grant 10,859,918 - Chen , et al. December 8, 2 | 2020-12-08 |
EUV light source and apparatus for lithography
Grant 10,859,928 - Chen , et al. December 8, 2 | 2020-12-08 |
Apparatus And Method For Monitoring Reflectivity Of The Collector For Extreme Ultraviolet Radiation Source
App 20200379357 - HUANG; Yu-Chih ; et al. | 2020-12-03 |
Light source system and polarization angle adjusting method
Grant 10,852,191 - Yeh , et al. December 1, 2 | 2020-12-01 |
Methods and apparatus for removing contamination from lithographic tool
Grant 10,852,649 - Chen , et al. December 1, 2 | 2020-12-01 |
System and method for extreme ultraviolet source control
Grant 10,842,009 - Hsu , et al. November 17, 2 | 2020-11-17 |
Droplet Generator And Method Of Servicing Extreme Ultraviolet Radiation Source Apparatus
App 20200348608 - CHEN; Yen-Hsun ; et al. | 2020-11-05 |
Radiation Source Apparatus And Method For Decreasing Debris In Radiation Source Apparatus
App 20200348607 - YANG; Chi ; et al. | 2020-11-05 |
Method And Apparatus For Collecting Information Used In Image-error Compensation
App 20200348586 - CHO; Hung-Wen ; et al. | 2020-11-05 |
Euv Vessel Inspection Method And Related System
App 20200348241 - CHANG; Chun-Lin Louis ; et al. | 2020-11-05 |
Layout Modification Method For Exposure Manufacturing Process
App 20200350306 - CHO; Hung-Wen ; et al. | 2020-11-05 |
Method And Apparatus For Lithography In Semiconductor Fabrication
App 20200350194 - KUO; Chueh-Chi ; et al. | 2020-11-05 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 10,824,083 - Yang , et al. November 3, 2 | 2020-11-03 |
Method And Apparatus For Removing Debris From Collector
App 20200331038 - WU; Shang-Ying ; et al. | 2020-10-22 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 10,802,406 - Hsieh , et al. October 13, 2 | 2020-10-13 |
Radiation source for lithography exposure process
Grant 10,802,405 - Hsieh , et al. October 13, 2 | 2020-10-13 |
Method for discharging static charges on reticle
Grant 10,802,394 - Chang , et al. October 13, 2 | 2020-10-13 |
Light source for lithography exposure process
Grant 10,795,264 - Chen , et al. October 6, 2 | 2020-10-06 |
Radiation Source Apparatus
App 20200314990 - CHEN; Ssu-Yu ; et al. | 2020-10-01 |
Extreme Ultraviolet Radiation Source And Cleaning Method Thereof
App 20200314989 - YANG; Chi ; et al. | 2020-10-01 |
Radiation source apparatus
Grant 10,791,616 - Chen , et al. September 29, 2 | 2020-09-29 |
Lithography System And Method Thereof
App 20200292946 - CHENG; Wei-Shin ; et al. | 2020-09-17 |
Extreme ultraviolet photolithography system and method
Grant 10,779,387 - Tsai , et al. Sept | 2020-09-15 |
Radiation Source For Lithography Process
App 20200278617 - WU; Shang-Ying ; et al. | 2020-09-03 |
Method Of Controlling Reticle Masking Blade Positioning To Minimize Impact On Critical Dimension Uniformity And Device For Contr
App 20200264515 - CHO; Hung-Wen ; et al. | 2020-08-20 |
Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source
Grant 10,747,119 - Huang , et al. A | 2020-08-18 |
Laser Source Device, Extreme Ultraviolet Lithography Device And Method
App 20200245443 - Kind Code | 2020-07-30 |
Communication control method
Grant 10,725,384 - Chang , et al. | 2020-07-28 |
EUV vessel inspection method and related system
Grant 10,718,718 - Chang , et al. | 2020-07-21 |
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
Grant 10,719,020 - Chen , et al. | 2020-07-21 |
Layout modification method for exposure manufacturing process
Grant 10,720,419 - Cho , et al. | 2020-07-21 |
Method and apparatus for collecting information used in image-error compensation
Grant 10,712,651 - Cho , et al. | 2020-07-14 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,712,676 - Yang , et al. | 2020-07-14 |
Method and apparatus for lithography in semiconductor fabrication
Grant 10,714,371 - Kuo , et al. | 2020-07-14 |
Pressurized Tin Collection Bucket With In-line Draining Mechanism
App 20200209731 - YANG; Chi ; et al. | 2020-07-02 |
Extreme ultraviolet radiation source and cleaning method thereof
Grant 10,687,410 - Yang , et al. | 2020-06-16 |
Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation
Grant 10,678,138 - Yen , et al. | 2020-06-09 |
Lithography system and lithography method
Grant 10,678,148 - Chang , et al. | 2020-06-09 |
Method And Device For Measuring Contamination In Euv Source
App 20200178380 - CHEN; Kuan-Hung ; et al. | 2020-06-04 |
Lithography system and method thereof
Grant 10,670,970 - Cheng , et al. | 2020-06-02 |
Extreme Ultraviolet Photolithography System And Method
App 20200166848 - TSAI; Ming-Hsun ; et al. | 2020-05-28 |
Radiation source for lithography process
Grant 10,656,539 - Wu , et al. | 2020-05-19 |
Methods And Apparatus For Removing Contamination From Lithographic Tool
App 20200150550 - CHEN; Zi-Wen ; et al. | 2020-05-14 |
Light Source For Lithography Exposure Process
App 20200142318 - CHEN; Hsin-Feng ; et al. | 2020-05-07 |
Pressurized Tin Collection Bucket With In-line Draining Mechanism
App 20200142293 - YANG; Chi ; et al. | 2020-05-07 |
Residual gain monitoring and reduction for EUV drive laser
App 20200146137 - Chang; Chun-Lin Louis ; et al. | 2020-05-07 |
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning
Grant 10,642,158 - Cho , et al. | 2020-05-05 |
Shock Wave Visualization For Extreme Ultraviolet Plasma Optimization
App 20200137864 - SU; Yen-Shuo ; et al. | 2020-04-30 |
Semiconductor Apparatus And Method Of Operating The Same
App 20200133136 - CHEN; Kuan-Hung ; et al. | 2020-04-30 |
Laser source device and extreme ultraviolet lithography device
Grant 10,624,196 - Tong , et al. | 2020-04-14 |
Apparatus And Method For Monitoring Reflectivity Of The Collector For Extreme Ultraviolet Radiation Source
App 20200103746 - HUANG; Yu-Chih ; et al. | 2020-04-02 |
Euv Light Source And Apparatus For Euv Lithography
App 20200107426 - CHENG; Wei-Shin ; et al. | 2020-04-02 |
Droplet Generator Assembly And Method For Using The Same And Radiation Source Apparatus
App 20200107427 - TU; Shih-Yu ; et al. | 2020-04-02 |
Laser Source Device And Extreme Ultraviolet Lithography Device
App 20200107428 - TONG; Henry Yee-Shian ; et al. | 2020-04-02 |
Vessel For Extreme Ultraviolet Radiation Source
App 20200103758 - CHEN; Ssu-Yu ; et al. | 2020-04-02 |
Particle Image Velocimetry Of Extreme Ultraviolet Lithography Systems
App 20200103433 - LAI; Allen ; et al. | 2020-04-02 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20200073261 - YANG; Chi ; et al. | 2020-03-05 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20200075190 - CHENG; Ting-Ya ; et al. | 2020-03-05 |
Light Source For Lithography Exposure Process
App 20200068696 - HSIEH; Chieh ; et al. | 2020-02-27 |
Process System And Operating Method Thereof
App 20200057381 - CHANG; Chao-Chen ; et al. | 2020-02-20 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20200057382 - HSIEH; Chieh ; et al. | 2020-02-20 |
Lithography System And Lithography Method
App 20200057376 - HSU; Chun-Chia ; et al. | 2020-02-20 |
Extreme Ultraviolet Radiation Source
App 20200057181 - YANG; Chi ; et al. | 2020-02-20 |
Communication Control Method
App 20200057384 - CHANG; Chao-Chen ; et al. | 2020-02-20 |
Euv Metal Droplet Catchers
App 20200057389 - LIN; Sheng-Ta ; et al. | 2020-02-20 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20200060015 - HSU; Chun-Chia ; et al. | 2020-02-20 |
Lithography Apparatus And Cleaning Method Thereof
App 20200057393 - Yang; Chi ; et al. | 2020-02-20 |
Euv Radiation Source For Lithography Exposure Process
App 20200045800 - HSU; Chun-Chia ; et al. | 2020-02-06 |
Lithography System And Lithography Method
App 20200041914 - CHANG; Kai-Chieh ; et al. | 2020-02-06 |
Apparatus And Method For Prevention Of Contamination On Collector Of Extreme Ultraviolet Light Source
App 20200041783 - LIU; Kuo-An ; et al. | 2020-02-06 |
Extreme Ultraviolet (euv) Radiation Source And A Method For Generating Extreme Ultraviolet Radiation
App 20200041908 - YEN; WEI-CHUN ; et al. | 2020-02-06 |
Light Source System And Polarization Angle Adjusting Method
App 20200033194 - YEH; Jen-Hao ; et al. | 2020-01-30 |
Radiation Source For Lithography Exposure Process
App 20200033732 - HSIEH; Chieh ; et al. | 2020-01-30 |
Extreme Ultraviolet Radiation Source And Cleaning Method Thereof
App 20200037427 - YANG; Chi ; et al. | 2020-01-30 |
Euv Vessel Inspection Method And Related System
App 20200025688 - CHANG; Chun-Lin Louis ; et al. | 2020-01-23 |
Euv Radiation Modification Methods And Systems
App 20200026179 - CHANG; Chun-Lin Louis ; et al. | 2020-01-23 |
Methods and apparatus for removing contamination from lithographic tool
Grant 10,534,279 - Chen , et al. Ja | 2020-01-14 |
Pressurized tin collection bucket with in-line draining mechanism
Grant 10,527,926 - Yang , et al. J | 2020-01-07 |
Droplet Generator And Method Of Sevicing Extreme Ultraviolet Radiation Source Apparatus
App 20200004168 - CHEN; Yen-Hsun ; et al. | 2020-01-02 |
Euv Light Source And Apparatus For Lithography
App 20200004159 - YEH; Jhan-Hong ; et al. | 2020-01-02 |
Euv Light Source And Apparatus For Lithography
App 20200004167 - CHEN; Yu-Chih ; et al. | 2020-01-02 |
Euv Radiation Source Apparatus For Lithography
App 20200004160 - CHEN; Yu-Chih ; et al. | 2020-01-02 |
Euv Light Source And Apparatus For Lithography
App 20200008290 - SU; Yen-Shuo ; et al. | 2020-01-02 |
Residual gain monitoring and reduction for EUV drive laser
Grant 10,524,345 - Chang , et al. Dec | 2019-12-31 |
Light source for lithography exposure process
Grant 10,509,324 - Chen , et al. Dec | 2019-12-17 |
Methods and apparatus for removing contamination from lithographic tool
Grant 10,509,334 - Chen , et al. Dec | 2019-12-17 |
Extreme ultraviolet radiation source and droplet catcher thereof
Grant 10,512,147 - Yang , et al. Dec | 2019-12-17 |
EUV source generation method and related system
Grant 10,506,698 - Chang , et al. Dec | 2019-12-10 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,495,987 - Yang , et al. De | 2019-12-03 |
Layout Modification Method For Exposure Manufacturing Process
App 20190348409 - CHO; Hung-Wen ; et al. | 2019-11-14 |
Light source for lithography exposure process
Grant 10,477,663 - Hsieh , et al. Nov | 2019-11-12 |
Light Source For Lithography Exposure Process
App 20190310556 - CHEN; Hsin-Feng ; et al. | 2019-10-10 |
EUV radiation modification methods and systems
Grant 10,429,729 - Chang , et al. O | 2019-10-01 |
EUV vessel inspection method and related system
Grant 10,429,314 - Chang , et al. October 1, 2 | 2019-10-01 |
System and Method for Extreme Ultraviolet Source Control
App 20190289706 - Hsu; Chun-Chia ; et al. | 2019-09-19 |
Layout modification method for exposure manufacturing process
Grant 10,366,973 - Cho , et al. July 30, 2 | 2019-07-30 |
Method for lithographic process and lithographic system
Grant 10,361,134 - Lai , et al. | 2019-07-23 |
Light source for lithography exposure process
Grant 10,338,475 - Chen , et al. | 2019-07-02 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 10,342,109 - Lai , et al. | 2019-07-02 |
Light source for lithography exposure process
Grant 10,331,035 - Lai , et al. | 2019-06-25 |
System and method for extreme ultraviolet source control
Grant 10,314,154 - Hsu , et al. | 2019-06-04 |
System and Method for Extreme Ultraviolet Source Control
App 20190166680 - Hsu; Chun-Chia ; et al. | 2019-05-30 |
Method Of Controlling Reticle Masking Blade Positioning To Minimize Impact On Critical Dimension Uniformity And Device For Contr
App 20190163046 - CHO; Hung-Wen ; et al. | 2019-05-30 |
Method For Discharging Static Charges On Reticle
App 20190155139 - CHANG; Hsiao-Lun ; et al. | 2019-05-23 |
Light Source For Lithography Exposure Process
App 20190155157 - Chen; Hsin-Feng ; et al. | 2019-05-23 |
Radiation Source For Lithography Process
App 20190155179 - WU; Shang-Ying ; et al. | 2019-05-23 |
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
App 20190157828 - Chang; Chun-Lin Louis ; et al. | 2019-05-23 |
Method And Apparatus For Lithography In Semiconductor Fabrication
App 20190146349 - WU; Cheng-Kuan ; et al. | 2019-05-16 |
Method And Apparatus For Lithography In Semiconductor Fabrication
App 20190148203 - KUO; Chueh-Chi ; et al. | 2019-05-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20190150262 - LAI; Wei-Chih ; et al. | 2019-05-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20190150263 - LAI; Wei-Chih ; et al. | 2019-05-16 |
Droplet Generator And Method Of Servicing Extreme Ultraviolet Imaging Tool
App 20190150266 - LAI; Wei-Chih ; et al. | 2019-05-16 |
Light Source For Lithography Exposure Process
App 20190150265 - HSIEH; Chieh ; et al. | 2019-05-16 |
Light Source For Lithography Exposure Process
App 20190137882 - LAI; Cheng-Hao ; et al. | 2019-05-09 |
Method And Apparatus For Collecting Information Used In Image-error Compensation
App 20190137866 - CHO; Hung-Wen ; et al. | 2019-05-09 |
Layout Modification Method For Exposure Manufacturing Process
App 20190131290 - CHO; Hung-Wen ; et al. | 2019-05-02 |
Lithography apparatus and method for protecting a reticle
Grant 10,274,844 - Chung , et al. | 2019-04-30 |
Methods And Apparatus For Removing Containmination From Lithographic Tool
App 20190101838 - Chen; Zi-Wen ; et al. | 2019-04-04 |
Reticle Backside Inspection Method
App 20190102875 - CHEN; Zi-Wen ; et al. | 2019-04-04 |
Extreme Ultraviolet Control System
App 20190101831 - CHUNG; Jen-Yang ; et al. | 2019-04-04 |
Collector Pellicle
App 20190104604 - CHIEN; Shang-Chieh ; et al. | 2019-04-04 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20190094718 - YANG; Chi ; et al. | 2019-03-28 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20190094717 - YANG; Chi ; et al. | 2019-03-28 |
Method For Lithographic Process And Lithographic System
App 20190067132 - LAI; Wei-Chih ; et al. | 2019-02-28 |
Euv Vessel Inspection Method And Related System
App 20190033225 - CHANG; Chun-Lin Louis ; et al. | 2019-01-31 |
Euv Light Source And Apparatus For Lithography
App 20180376575 - CHIEN; Shang-Chieh ; et al. | 2018-12-27 |
Apparatus for decontaminating windows of an EUV source module
Grant 10,165,664 - Chen , et al. Dec | 2018-12-25 |
Extreme ultraviolet lithography system with debris trapper on exhaust line
Grant 10,162,277 - Chien , et al. Dec | 2018-12-25 |
Lithography process and system with enhanced overlay quality
Grant 10,146,141 - Hung , et al. De | 2018-12-04 |
Euv Radiation Modification Methods And Systems
App 20180314145 - CHANG; Chun-Lin Louis ; et al. | 2018-11-01 |
Euv Source Generation Method And Related System
App 20180317309 - CHANG; Chun-Lin Louis ; et al. | 2018-11-01 |
Residual Gain Monitoring and Reduction for EUV Drive Laser
App 20180317308 - Chang; Chun-Lin Louis ; et al. | 2018-11-01 |
Euv Lithography Mask With A Porous Reflective Multilayer Structure
App 20180314144 - Shih; Chih-Tsung ; et al. | 2018-11-01 |
System and method for lithography with leveling sensor
Grant 10,048,604 - Chen August 14, 2 | 2018-08-14 |
Extreme Ultraviolet Lithography System with Debris Trapper on Exhaust Line
App 20180173117 - Chien; Shang-Chieh ; et al. | 2018-06-21 |
Wafer stage temperature control
Grant 9,575,415 - Chen , et al. February 21, 2 | 2017-02-21 |
System And Method For Lithography With Leveling Sensor
App 20160320709 - Chen; Li-Jui | 2016-11-03 |
System and method for lithography with leveling sensor
Grant 9,389,520 - Chen July 12, 2 | 2016-07-12 |
System and method for lithography patterning
Grant 9,360,778 - Chen , et al. June 7, 2 | 2016-06-07 |
Method and apparatus for maintaining depth of focus
Grant 9,360,767 - Hsieh , et al. June 7, 2 | 2016-06-07 |
Lithography Process and System with Enhanced Overlay Quality
App 20160062250 - Hung; Chi-Cheng ; et al. | 2016-03-03 |
Wafer Stage Temperature Control
App 20150338747 - Chen; Li-Jui ; et al. | 2015-11-26 |
Method of overlay prediction
Grant 9,158,209 - Chen , et al. October 13, 2 | 2015-10-13 |
Method and Apparatus For Maintaining Depth of Focus
App 20150220006 - Hsieh; Chang-Tsun ; et al. | 2015-08-06 |
Method and apparatus for maintaining depth of focus
Grant 9,025,130 - Hsieh , et al. May 5, 2 | 2015-05-05 |
Method Of Overlay Prediction
App 20140111779 - Chen; Li-Jui ; et al. | 2014-04-24 |
Method and Apparatus for Maintaining Depth of Focus
App 20130314708 - Hsieh; Chang-Tsun ; et al. | 2013-11-28 |
Method and apparatus of providing overlay
Grant 8,592,107 - Huang , et al. November 26, 2 | 2013-11-26 |
System And Method For Lithography Patterning
App 20130229638 - Chen; Li-Jui ; et al. | 2013-09-05 |
System And Method For Lithography With Leveling Sensor
App 20130201463 - Chen; Li-Jui | 2013-08-08 |
Method and Apparatus of Providing Overlay
App 20130056886 - Huang; Guo-Tsai ; et al. | 2013-03-07 |
Method and apparatus of providing overlay
Grant 8,329,360 - Huang , et al. December 11, 2 | 2012-12-11 |
In-line particle detection for immersion lithography
Grant 8,264,662 - Chen , et al. September 11, 2 | 2012-09-11 |
Method And Apparatus For Maintaining Depth Of Focus
App 20110267593 - Hsieh; Chang-Tsun ; et al. | 2011-11-03 |
Method And Apparatus Of Providing Overlay
App 20110133347 - Huang; Guo-Tsai ; et al. | 2011-06-09 |
Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control
Grant 7,751,025 - Chen , et al. July 6, 2 | 2010-07-06 |
Hood for immersion lithography
Grant 7,675,604 - Chen , et al. March 9, 2 | 2010-03-09 |
In-line Particle Detection For Immersion Lithography
App 20080309892 - Chen; Li-Jui ; et al. | 2008-12-18 |
Micro-etching method to replicate alignment marks for semiconductor wafer photolithography
Grant 7,338,909 - Lin , et al. March 4, 2 | 2008-03-04 |
Hood For Immersion Lithography
App 20070258060 - CHEN; Li-Jui ; et al. | 2007-11-08 |
Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control
App 20070068453 - Chen; Li-Jui ; et al. | 2007-03-29 |
Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control
Grant 7,135,259 - Chen , et al. November 14, 2 | 2006-11-14 |
Micro-etching method to replicate alignment marks for semiconductor wafer photolithography
App 20050282396 - Lin, Yu-Liang ; et al. | 2005-12-22 |
Method of defining forbidden pitches for a lithography exposure tool
Grant 6,973,636 - Shin , et al. December 6, 2 | 2005-12-06 |
Method of defining forbidden pitches for a lithography exposure tool
App 20050086629 - Shin, Jaw-Jung ; et al. | 2005-04-21 |
Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control
App 20040241561 - Chen, Li-Jui ; et al. | 2004-12-02 |
Fabry-Perot filter apparatus with enhanced optical discrimination
Grant 6,768,555 - Chen , et al. July 27, 2 | 2004-07-27 |
Geometric compensation method for charged particle beam irradiation
Grant 6,744,058 - Gau , et al. June 1, 2 | 2004-06-01 |
Fabry-perot filter apparatus with enhanced optical discrimination
App 20030179383 - Chen, Li-Jui ; et al. | 2003-09-25 |
| 