| Patent | Date |
|---|
Processing Tool Capable For Forming Carbon Layers On Substrates
App 20220246428 - LEESER; Karl Frederick ; et al. | 2022-08-04 |
System and method for an adaptive TCP SYN cookie with time validation
Grant RE49,053 - Chen , et al. April 26, 2 | 2022-04-26 |
Substrate Processing Tool Capable Of Modulating One Or More Plasma Temporally And/or Spatially
App 20220119954 - CHEN; Lee ; et al. | 2022-04-21 |
Compact High Density Plasma Source
App 20210183619 - Patrick; Roger ; et al. | 2021-06-17 |
Microwave plasma device
Grant 10,796,916 - Funk , et al. October 6, 2 | 2020-10-06 |
Determining an application delivery server based on geo-location information
Grant 10,735,267 - Chen , et al. | 2020-08-04 |
Mono-energetic neutral beam activated chemical processing system and method of using
Grant 10,734,200 - Chen | 2020-08-04 |
RF antenna producing a uniform near-field Poynting vector
Grant 10,685,810 - Mopidevi , et al. | 2020-06-16 |
Rf Antenna Producing A Uniform Near-field Poynting Vector
App 20200118792 - Mopidevi; Hema Swaroop ; et al. | 2020-04-16 |
System and method to balance servers based on server load status
Grant 10,447,775 - Kannan , et al. Oc | 2019-10-15 |
Self-sustained non-ambipolar direct current (DC) plasma at low power
Grant 10,395,903 - Chen , et al. A | 2019-08-27 |
Non-ambipolar electric pressure plasma uniformity control
Grant 10,388,528 - Chen , et al. A | 2019-08-20 |
Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus
Grant 10,375,812 - Zhao , et al. | 2019-08-06 |
Plasma generation and control using a DC ring
Grant 10,354,841 - Zhao , et al. July 16, 2 | 2019-07-16 |
RF antenna producing a uniform near-field Poynting vector
Grant 10,354,838 - Mopidevi , et al. July 16, 2 | 2019-07-16 |
Applying security policy to an application session
Grant 10,305,859 - Chen , et al. | 2019-05-28 |
Network proxy layer for policy-based application proxies
Grant 10,230,770 - Xu , et al. | 2019-03-12 |
System and method for an adaptive TCP SYN cookie with time validation
Grant RE47,296 - Chen , et al. | 2019-03-12 |
Neutral beam etching of Cu-containing layers in an organic compound gas environment
Grant 10,147,613 - Chen , et al. De | 2018-12-04 |
Self-sustained Non-ambipolar Direct Current (dc) Plasma At Low Power
App 20180269041 - Chen; Zhiying ; et al. | 2018-09-20 |
Microwave Plasma Device
App 20180226255 - Funk; Merritt ; et al. | 2018-08-09 |
System And Method To Balance Servers Based On Server Load Status
App 20180213031 - Kannan; Lalgudi Narayanan ; et al. | 2018-07-26 |
Determining An Application Delivery Server Based On Geo-location Information
App 20180212835 - Chen; Lee ; et al. | 2018-07-26 |
System and method for controlling plasma density
Grant 10,002,744 - Chen , et al. June 19, 2 | 2018-06-19 |
Self-sustained non-ambipolar direct current (DC) plasma at low power
Grant 9,978,568 - Chen , et al. May 22, 2 | 2018-05-22 |
Non-ambipolar plasma enhanced DC/VHF phasor
Grant 9,966,239 - Chen , et al. May 8, 2 | 2018-05-08 |
Determining an application delivery server based on geo-location information
Grant 9,960,967 - Chen , et al. May 1, 2 | 2018-05-01 |
System and method to balance servers based on server load status
Grant 9,961,135 - Kannan , et al. May 1, 2 | 2018-05-01 |
System and method to associate a private user identity with a public user identity
Grant 9,954,868 - Wang , et al. April 24, 2 | 2018-04-24 |
Applying a network traffic policy to an application session
Grant 9,954,899 - Chen , et al. April 24, 2 | 2018-04-24 |
Microwave surface-wave plasma device
Grant 9,947,515 - Funk , et al. April 17, 2 | 2018-04-17 |
Microwave plasma device
Grant 9,941,126 - Funk , et al. April 10, 2 | 2018-04-10 |
Microwave plasma device
Grant 9,934,974 - Zhao , et al. April 3, 2 | 2018-04-03 |
Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus
Grant 9,852,893 - Chen , et al. December 26, 2 | 2017-12-26 |
Energetic negative ion impact ionization plasma
Grant 9,799,494 - Chen , et al. October 24, 2 | 2017-10-24 |
Microwave surface-wave plasma device
Grant 9,793,095 - Funk , et al. October 17, 2 | 2017-10-17 |
System And Method To Associate A Private User Identity With A Public User Identity
App 20170295185 - Wang; Xin ; et al. | 2017-10-12 |
Applying Security Policy To An Application Session
App 20170289106 - CHEN; Lee ; et al. | 2017-10-05 |
Non-ambipolar Plasma Ehncanced Dc/vhf Phasor
App 20170278684 - Chen; Lee ; et al. | 2017-09-28 |
Plasma tuning rods in microwave resonator plasma sources
Grant 9,728,416 - Zhao , et al. August 8, 2 | 2017-08-08 |
System and method to associate a private user identity with a public user identity
Grant 9,712,493 - Wang , et al. July 18, 2 | 2017-07-18 |
Non-ambipolar plasma ehncanced DC/VHF phasor
Grant 9,697,993 - Chen , et al. July 4, 2 | 2017-07-04 |
Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma
Grant 9,668,332 - Chen , et al. May 30, 2 | 2017-05-30 |
Applying security policy to an application session
Grant 9,661,026 - Chen , et al. May 23, 2 | 2017-05-23 |
Mono-energetic Neutral Beam Activated Chemical Processing System And Method Of Using
App 20170062188 - CHEN; Lee | 2017-03-02 |
Applying Security Policy to an Application Session
App 20170041350 - Chen; Lee ; et al. | 2017-02-09 |
Integrated induction coil and microwave antenna as an all-planar source
Grant 9,530,621 - Ventzek , et al. December 27, 2 | 2016-12-27 |
Mono-energetic neutral beam activated chemical processing system and method of using
Grant 9,520,275 - Chen December 13, 2 | 2016-12-13 |
Applying security policy to an application session
Grant 9,497,201 - Chen , et al. November 15, 2 | 2016-11-15 |
Plasma Generation and Control Using a DC Ring
App 20160300738 - Zhao; Jianping ; et al. | 2016-10-13 |
Dipole Ring Magnet Assisted Microwave Radial Line Slot Antenna Plasma Processing Method And Apparatus
App 20160293389 - Chen; Lee ; et al. | 2016-10-06 |
Pneumatic Counterbalance For Electrode Gap Control
App 20160293388 - Chen; Lee ; et al. | 2016-10-06 |
Energetic Negative Ion Impact Ionization Plasma
App 20160293386 - Chen; Lee ; et al. | 2016-10-06 |
Hollow cathode device and method for using the device to control the uniformity of a plasma process
Grant 9,455,133 - Denpoh , et al. September 27, 2 | 2016-09-27 |
Non-ambipolar Electric Pressure Plasma Uniformity Control
App 20160268136 - Chen; Lee ; et al. | 2016-09-15 |
Applying a Network Traffic Policy to an Application Session
App 20160261642 - Chen; Lee ; et al. | 2016-09-08 |
Scalable and uniformity controllable diffusion plasma source
Grant 9,431,218 - Zhao , et al. August 30, 2 | 2016-08-30 |
Low Electron Temperature, Edge-density Enhanced, Surface-wave Plasma (swp) Processing Method And Apparatus
App 20160212833 - Zhao; Jianping ; et al. | 2016-07-21 |
Plasma tuning rods in microwave resonator processing systems
Grant 9,396,955 - Zhao , et al. July 19, 2 | 2016-07-19 |
Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties
Grant 9,396,900 - Lane , et al. July 19, 2 | 2016-07-19 |
Method And Apparatus For Providing An Anisotropic And Mono-energetic Neutral Beam By Non-ambipolar Electron Plasma
App 20160198559 - Chen; Lee ; et al. | 2016-07-07 |
System and Method to Associate a Private User Identity with a Public User Identity
App 20160182456 - Wang; Xin ; et al. | 2016-06-23 |
Applying a packet routing policy to an application session
Grant 9,356,910 - Chen , et al. May 31, 2 | 2016-05-31 |
Applying forwarding policy to an application session
Grant 9,350,744 - Chen , et al. May 24, 2 | 2016-05-24 |
Distributed multi-processing security gateway
Grant 9,344,456 - Chen , et al. May 17, 2 | 2016-05-17 |
User access authentication based on network access point
Grant 9,344,421 - Chen , et al. May 17, 2 | 2016-05-17 |
Applying Security Policy to an Application Session
App 20160119382 - Chen; Lee ; et al. | 2016-04-28 |
Applying Forwarding Policy To An Application Session
App 20160105446 - Chen; Lee ; et al. | 2016-04-14 |
Applying a Packet Routing Policy to an Application Session
App 20160105395 - Chen; Lee ; et al. | 2016-04-14 |
Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus
Grant 9,301,383 - Zhao , et al. March 29, 2 | 2016-03-29 |
System and Method to Balance Servers Based on Server Load Status
App 20160088074 - Kannan; Lalgudi Narayanan ; et al. | 2016-03-24 |
Anisotropic etch of copper using passivation
Grant 9,290,848 - Chen , et al. March 22, 2 | 2016-03-22 |
System and method to associate a private user identity with a public user identity
Grant 9,294,467 - Wang , et al. March 22, 2 | 2016-03-22 |
Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma
Grant 9,288,890 - Chen , et al. March 15, 2 | 2016-03-15 |
Distributed Multi-Processing Security Gateway
App 20160065619 - Chen; Lee ; et al. | 2016-03-03 |
Electric Pressure Systems For Control Of Plasma Properties And Uniformity
App 20160056018 - Zhao; Jianping ; et al. | 2016-02-25 |
Applying security policy to an application session
Grant 9,270,705 - Chen , et al. February 23, 2 | 2016-02-23 |
Applying Security Policy To An Application Session
App 20160050233 - Chen; Lee ; et al. | 2016-02-18 |
Distributed multi-processing security gateway
Grant 9,258,332 - Chen , et al. February 9, 2 | 2016-02-09 |
Applying A Packet Routing Policy To An Application Session
App 20160036778 - Chen; Lee ; et al. | 2016-02-04 |
Applying a packet routing policy to an application session
Grant 9,253,152 - Chen , et al. February 2, 2 | 2016-02-02 |
Neutral Beam Etching Of Cu-containing Layers In An Organic Compound Gas Environment
App 20150380271 - CHEN; Lee ; et al. | 2015-12-31 |
Anisotropic Etch Of Copper Using Passivation
App 20150376797 - Chen; Lee ; et al. | 2015-12-31 |
System and method to apply forwarding policy to an application session
Grant 9,219,751 - Chen , et al. December 22, 2 | 2015-12-22 |
System and method to balance servers based on server load status
Grant 9,215,275 - Kannan , et al. December 15, 2 | 2015-12-15 |
Electric pressure systems for control of plasma properties and uniformity
Grant 9,209,032 - Zhao , et al. December 8, 2 | 2015-12-08 |
Integrated Induction Coil & Microwave Anntenna As An All-planar Source
App 20150348756 - Ventzek; Peter L.G. ; et al. | 2015-12-03 |
Mineral paper
Grant 9,200,411 - Chen December 1, 2 | 2015-12-01 |
System and Method to Associate a Private User Identity with a Public User Identity
App 20150312237 - Wang; Xin ; et al. | 2015-10-29 |
Processing chamber integrated pressure control
Grant 9,151,286 - Funk , et al. October 6, 2 | 2015-10-06 |
Distributed multi-processing security gateway
Grant 9,124,550 - Chen , et al. September 1, 2 | 2015-09-01 |
Plasma tuning rods in microwave resonator plasma sources
Grant 9,111,727 - Zhao , et al. August 18, 2 | 2015-08-18 |
Low profile magnetic filter
Grant 9,111,873 - Chen , et al. August 18, 2 | 2015-08-18 |
Method and system for intelligently forwarding multicast packets
Grant 9,112,715 - Jain , et al. August 18, 2 | 2015-08-18 |
Methods of electrical signaling in an ion energy analyzer
Grant 9,087,677 - Funk , et al. July 21, 2 | 2015-07-21 |
System And Method For Controlling Plasma Density
App 20150170925 - Chen; Lee ; et al. | 2015-06-18 |
System and method to associate a private user identity with a public user identity
Grant 9,060,003 - Wang , et al. June 16, 2 | 2015-06-16 |
Network Proxy Layer For Policy-based Application Proxies
App 20150156223 - Xu; Feilong ; et al. | 2015-06-04 |
System and method for distributed multi-processing security gateway
Grant 9,032,502 - Chen , et al. May 12, 2 | 2015-05-12 |
Non-ambipolar Plasma Ehncanced Dc/vhf Phasor
App 20150126037 - Chen; Lee ; et al. | 2015-05-07 |
Mineral Paper
App 20150097310 - Chen; Lee | 2015-04-09 |
Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus
Grant 8,968,588 - Zhao , et al. March 3, 2 | 2015-03-03 |
Self-sustained Non-ambipolar Direct Current (dc) Plasma At Low Power
App 20150041432 - Chen; Zhiying ; et al. | 2015-02-12 |
System And Method For Distributed Multi-processing Security Gateway
App 20150047012 - Chen; Lee ; et al. | 2015-02-12 |
Distributed multi-processing security gateway
Grant 8,943,577 - Chen , et al. January 27, 2 | 2015-01-27 |
Microwave Plasma Device
App 20140374025 - Zhao; Jianping ; et al. | 2014-12-25 |
Microwave Plasma Device
App 20140377966 - Funk; Merritt ; et al. | 2014-12-25 |
Distributed multi-processing security gateway
Grant 8,918,857 - Chen , et al. December 23, 2 | 2014-12-23 |
Distributed multi-processing security gateway
Grant 8,914,871 - Chen , et al. December 16, 2 | 2014-12-16 |
Processing System For Non-ambipolar Electron Plasma (nep) Treatment Of A Substrate With Sheath Potential
App 20140360670 - Chen; Lee ; et al. | 2014-12-11 |
Distributed multi-processing security gateway
Grant 8,904,512 - Chen , et al. December 2, 2 | 2014-12-02 |
Using vacuum ultra-violet (VUV) data in radio frequency (RF) sources
Grant 8,883,024 - Chen , et al. November 11, 2 | 2014-11-11 |
Using vacuum ultra-violet (VUV) data in microwave sources
Grant 8,877,080 - Chen , et al. November 4, 2 | 2014-11-04 |
System and method to associate a private user identity with a public user identity
Grant 8,868,765 - Chen , et al. October 21, 2 | 2014-10-21 |
Ion energy analyzer
Grant 8,847,159 - Chen , et al. September 30, 2 | 2014-09-30 |
Dc Pulse Etcher
App 20140263182 - Chen; Lee ; et al. | 2014-09-18 |
Microwave Surface-Wave Plasma Device
App 20140262041 - Funk; Merritt ; et al. | 2014-09-18 |
Method And System Using Plasma Tuning Rods For Plasma Processing
App 20140262040 - Zhao; Jianping ; et al. | 2014-09-18 |
Scalable And Uniformity Controllable Diffusion Plasma Source
App 20140265846 - Zhao; Jianping ; et al. | 2014-09-18 |
Microwave Surface-Wave Plasma Device
App 20140262042 - Funk; Merritt ; et al. | 2014-09-18 |
Electric Pressure Systems For Control Of Plasma Properties And Uniformity
App 20140273485 - Zhao; Jianping ; et al. | 2014-09-18 |
Non-ambipolar Electric Pressure Plasma Uniformity Control
App 20140273538 - Chen; Lee ; et al. | 2014-09-18 |
Applying a packet routing policy to an application session
Grant 8,826,372 - Chen , et al. September 2, 2 | 2014-09-02 |
Ion energy analyzer and methods of manufacturing the same
Grant 8,816,281 - Funk , et al. August 26, 2 | 2014-08-26 |
Plasma tuning rods in microwave processing systems
Grant 8,808,496 - Zhao , et al. August 19, 2 | 2014-08-19 |
Applying network traffic policy to an application session
Grant 8,813,180 - Chen , et al. August 19, 2 | 2014-08-19 |
Systems and methods for user access authentication based on network access point
Grant 8,782,751 - Chen , et al. July 15, 2 | 2014-07-15 |
Plasma source pumping and gas injection baffle
Grant 8,747,610 - Chen , et al. June 10, 2 | 2014-06-10 |
Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof
Grant 8,721,833 - Chen , et al. May 13, 2 | 2014-05-13 |
Method of providing stable and adhesive interface between fluorine based low k material and metal barrier layer
App 20140127902 - ZHAO; Jianping ; et al. | 2014-05-08 |
Low Profile Magnetic Filter
App 20140113454 - Chen; Lee ; et al. | 2014-04-24 |
Stable surface wave plasma source
Grant 8,669,705 - Chen , et al. March 11, 2 | 2014-03-11 |
System and Method to Associate a Private User Identity with a Public User Identity
App 20140059702 - Wang; Xin ; et al. | 2014-02-27 |
System and method for an adaptive TCP SYN cookie with time validation
Grant RE44,701 - Chen , et al. January 14, 2 | 2014-01-14 |
System and method to apply network traffic policy to an application session
Grant 8,595,791 - Chen , et al. November 26, 2 | 2013-11-26 |
System and method to associate a private user identity with a public user identity
Grant 8,595,383 - Chen , et al. November 26, 2 | 2013-11-26 |
System and method for distributed multi-processing security gateway
Grant 8,595,819 - Chen , et al. November 26, 2 | 2013-11-26 |
System and method to apply a packet routing policy to an application session
Grant 8,584,199 - Chen , et al. November 12, 2 | 2013-11-12 |
Low Electron Temperature, Edge-density Enhanced, Surface Wave Plasma (swp) Processing Method And Apparatus
App 20130270997 - Zhao; Jianping ; et al. | 2013-10-17 |
Stable Surface Wave Plasma Source
App 20130264938 - Chen; Lee ; et al. | 2013-10-10 |
Plasma Source Pumping And Gas Injection Baffle
App 20130256268 - Chen; Lee ; et al. | 2013-10-03 |
Low Electron Temperature Microwave Surface-wave Plasma (swp) Processing Method And Apparatus
App 20130256272 - Zhao; Jianping ; et al. | 2013-10-03 |
Hollow Cathode Device And Method For Using The Device To Control The Uniformity Of A Plasma Process
App 20130228284 - DENPOH; Kazuki ; et al. | 2013-09-05 |
Plasma Tuning Rods In Microwave Resonator Plasma Sources
App 20130224961 - Zhao; Jianping ; et al. | 2013-08-29 |
Plasma Tuning Rods In Microwave Resonator Processing Systems
App 20130203261 - Zhao; Jianping ; et al. | 2013-08-08 |
Variable Capacitance Chamber Component Incorporating A Semiconductor Junction And Methods Of Manufacturing And Using Thereof
App 20130200494 - CHEN; Zhiying ; et al. | 2013-08-08 |
Variable Capacitance Chamber Component Incorporating Ferroelectric Materials And Methods Of Manufacturing And Using Thereof
App 20130203258 - CHEN; Zhiying ; et al. | 2013-08-08 |
Adaptive recipe selector
Grant 8,501,499 - Sundararajan , et al. August 6, 2 | 2013-08-06 |
Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof
Grant 8,486,798 - Chen , et al. July 16, 2 | 2013-07-16 |
System and method for distributed multi-processing security gateway
Grant 8,464,333 - Chen , et al. June 11, 2 | 2013-06-11 |
Method and system for etching a MEM device
Grant 8,460,567 - Chen June 11, 2 | 2013-06-11 |
Radio Frequency (rf) Power Coupling System Utilizing Multiple Rf Power Coupling Elements For Control Of Plasma Properties
App 20130119854 - Lane; Barton ; et al. | 2013-05-16 |
Method and system for intelligently forwarding multicast packets
Grant 8,443,103 - Jain , et al. May 14, 2 | 2013-05-14 |
Processing Chamber Integrated Pressure Control
App 20130115110 - Funk; Merritt ; et al. | 2013-05-09 |
System and method to associate a private user identity with a public user identity
Grant 8,423,676 - Chen , et al. April 16, 2 | 2013-04-16 |
Stable surface wave plasma source
Grant 8,415,884 - Chen , et al. April 9, 2 | 2013-04-09 |
Plasma-Tuning Rods in Surface Wave Antenna (SWA) Sources
App 20130084706 - Zhao; Jianping ; et al. | 2013-04-04 |
Plasma Tuning Rods in Microwave Processing Systems
App 20130081762 - Zhao; Jianping ; et al. | 2013-04-04 |
Plasma Tuning Rods in Microwave Resonator Plasma Sources
App 20130082030 - Zhao; Jianping ; et al. | 2013-04-04 |
Hollow cathode device and method for using the device to control the uniformity of a plasma process
Grant 8,409,459 - Denpoh , et al. April 2, 2 | 2013-04-02 |
System and method for distributed multi-processing security gateway
Grant 8,387,128 - Chen , et al. February 26, 2 | 2013-02-26 |
Apparatus and method for improving photoresist properties using a quasi-neutral beam
Grant 8,343,371 - Funk , et al. January 1, 2 | 2013-01-01 |
System and method for distributed multi-processing security gateway
Grant 8,332,925 - Chen , et al. December 11, 2 | 2012-12-11 |
Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques
Grant 8,323,521 - Zhao , et al. December 4, 2 | 2012-12-04 |
System and method to apply network traffic policy to an application session
Grant 8,312,507 - Chen , et al. November 13, 2 | 2012-11-13 |
System and method for distributed multi-processing security gateway
Grant 8,291,487 - Chen , et al. October 16, 2 | 2012-10-16 |
Ion Energy Analyzer And Methods Of Manufacturing The Same
App 20120248311 - Funk; Merritt ; et al. | 2012-10-04 |
Adaptive Recipe Selector
App 20120252141 - Sundararajan; Radha ; et al. | 2012-10-04 |
Ion Energy Analyzer
App 20120248310 - Chen; Lee ; et al. | 2012-10-04 |
Methods Of Electrical Signaling In An Ion Energy Analyzer
App 20120248322 - Funk; Merritt ; et al. | 2012-10-04 |
Method and system for introducing process fluid through a chamber component
Grant 8,276,540 - Chen , et al. October 2, 2 | 2012-10-02 |
System And Method To Associate A Private User Identity With A Public User Identity
App 20120216266 - WANG; Xin ; et al. | 2012-08-23 |
Systems and Methods for User Access Authentication Based on Network Access Point
App 20120204236 - Chen; Lee ; et al. | 2012-08-09 |
Method and system for introducing process fluid through a chamber component
App 20120098405 - CHEN; Lee ; et al. | 2012-04-26 |
Using Vacuum Ultra-violet (vuv) Data In Microwave Sources
App 20120095586 - CHEN; Lee ; et al. | 2012-04-19 |
Using Vacuum Ultra-Violet (VUV) Data in Radio Frequency (RF) Sources
App 20120091097 - CHEN; Lee ; et al. | 2012-04-19 |
System And Method To Balance Servers Based On Server Load Status
App 20120084419 - KANNAN; Lalgudi Narayanan ; et al. | 2012-04-05 |
Systems and methods for user access authentication based on network access point
Grant 8,151,322 - Chen , et al. April 3, 2 | 2012-04-03 |
Mobile vehicle dual power adapter
Grant D656,899 - Webb , et al. April 3, 2 | 2012-04-03 |
Mobile vehicle power adapter
Grant D656,898 - Webb , et al. April 3, 2 | 2012-04-03 |
Method and system for introducing process fluid through a chamber component
Grant 8,100,082 - Chen , et al. January 24, 2 | 2012-01-24 |
Method and system for controlling the uniformity of a ballistic electron beam by RF modulation
Grant 8,083,961 - Chen , et al. December 27, 2 | 2011-12-27 |
System and method for distributed multi-processing security gateway
Grant 8,079,077 - Chen , et al. December 13, 2 | 2011-12-13 |
Method and system for controlling radical distribution
Grant 8,038,834 - Funk , et al. October 18, 2 | 2011-10-18 |
System and Method to Associate a Private User Identity with a Public User Identity
App 20110239289 - Wang; Xin ; et al. | 2011-09-29 |
Electron beam enhanced surface wave plasma source
Grant 7,998,307 - Chen , et al. August 16, 2 | 2011-08-16 |
DC and RF hybrid processing system
Grant 7,993,937 - Chen , et al. August 9, 2 | 2011-08-09 |
Dynamic control of process chemistry for improved within-substrate process uniformity
Grant 7,988,813 - Chen , et al. August 2, 2 | 2011-08-02 |
Switchable Neutral Beam Source
App 20110177694 - Chen; Lee ; et al. | 2011-07-21 |
Apparatus and Method for Improving Photoresist Properties Using a Quasi-Neutral Beam
App 20110174606 - Funk; Merritt ; et al. | 2011-07-21 |
System and method to associate a private user identity with a public user identity
Grant 7,979,585 - Chen , et al. July 12, 2 | 2011-07-12 |
Method and apparatus for spacer-optimization (S-O)
Grant 7,939,450 - Yamashita , et al. May 10, 2 | 2011-05-10 |
Radial line slot antenna having a conductive layer
Grant 7,938,081 - Chen , et al. May 10, 2 | 2011-05-10 |
Method and System to Determine an Application Delivery Server Based on Geo-Location Information
App 20110093522 - Chen; Lee ; et al. | 2011-04-21 |
Method of depositing stable and adhesive interface between fluorine-based low-k material and metal barrier layer
App 20110081503 - ZHAO; Jianping ; et al. | 2011-04-07 |
Method of providing stable and adhesive interface between fluorine-based low-k material and metal barrier layer
App 20110081500 - Zhao; Jianping ; et al. | 2011-04-07 |
DC and RF Hybrid Processing System
App 20110070665 - Chen; Lee ; et al. | 2011-03-24 |
Method And System For Intelligently Forwarding Multicast Packets
App 20110064078 - Jain; Nitin ; et al. | 2011-03-17 |
Stable surface wave plasma source
App 20110057562 - CHEN; Lee ; et al. | 2011-03-10 |
Method and apparatus for creating a gate optimization evaluation library
Grant 7,899,637 - Yamashita , et al. March 1, 2 | 2011-03-01 |
Plasma Generation Controlled by Gravity-Induced Gas-Diffusion Separation (GIGDS) Techniques
App 20110039355 - Zhao; Jianping ; et al. | 2011-02-17 |
Method and system for intelligently forwarding multicast packets
Grant 7,877,508 - Jain , et al. January 25, 2 | 2011-01-25 |
Ion energy analyzer and methods of manufacturing and operating
Grant 7,875,859 - Chen , et al. January 25, 2 | 2011-01-25 |
Method for plasma processing over wide pressure range
Grant 7,875,555 - Chen , et al. January 25, 2 | 2011-01-25 |
Method and system for uniformity control in ballistic electron beam enhanced plasma processing system
Grant 7,829,469 - Chen , et al. November 9, 2 | 2010-11-09 |
Method And System For Intelligently Forwarding Multicast Packets
App 20100238927 - JAIN; Nitin ; et al. | 2010-09-23 |
System and Method to Apply Network Traffic Policy to an Application Session
App 20100235880 - Chen; Lee ; et al. | 2010-09-16 |
System and Method to Associate a Private User Identity with a Public User Identity
App 20100217819 - Chen; Lee ; et al. | 2010-08-26 |
Method and system for etching high-k dielectric materials
Grant 7,781,340 - Chen , et al. August 24, 2 | 2010-08-24 |
Two-grid ion energy analyzer and methods of manufacturing and operating
Grant 7,777,179 - Chen , et al. August 17, 2 | 2010-08-17 |
Neutral beam source and method for plasma heating
Grant 7,772,544 - Chen , et al. August 10, 2 | 2010-08-10 |
Method And System For Controlling Radical Distribution
App 20100193471 - FUNK; Merritt ; et al. | 2010-08-05 |
Method and apparatus for creating a Spacer-Optimization (S-O) library
Grant 7,765,077 - Yamashita , et al. July 27, 2 | 2010-07-27 |
Method and apparatus for detecting endpoint in a dry etching system by monitoring a superimposed DC current
Grant 7,754,615 - Panda , et al. July 13, 2 | 2010-07-13 |
Suppressor of hollow cathode discharge in a shower head fluid distribution system
Grant 7,744,720 - Chen , et al. June 29, 2 | 2010-06-29 |
Multi-plasma neutral beam source and method of operating
Grant 7,732,759 - Chen , et al. June 8, 2 | 2010-06-08 |
Method and system for controlling radical distribution
Grant 7,718,030 - Funk , et al. May 18, 2 | 2010-05-18 |
Method and apparatus for optimizing a gate channel
Grant 7,713,758 - Yamashita , et al. May 11, 2 | 2010-05-11 |
System and method to associate a private user identity with a public user identity
Grant 7,716,378 - Chen , et al. May 11, 2 | 2010-05-11 |
Method and system for etching a high-k dielectric material
Grant 7,709,397 - Chen , et al. May 4, 2 | 2010-05-04 |
Apparatus and Method for Improving Photoresist Properties
App 20100081285 - Chen; Lee ; et al. | 2010-04-01 |
System and method for an adaptive TCP SYN cookie with time validation
Grant 7,675,854 - Chen , et al. March 9, 2 | 2010-03-09 |
Dynamic temperature backside gas control for improved within-substrate process uniformity
Grant 7,674,636 - Sundararajan , et al. March 9, 2 | 2010-03-09 |
System and method to resolve an identity interactively
Grant 7,647,635 - Chen , et al. January 12, 2 | 2010-01-12 |
Method And System For Etching A Mem Device
App 20100000964 - Chen; Lee | 2010-01-07 |
Method of treating a mask layer prior to performing an etching process
Grant 7,642,193 - Ventzek , et al. January 5, 2 | 2010-01-05 |
Hyperthermal neutral beam source and method of operating
Grant 7,638,759 - Economou , et al. December 29, 2 | 2009-12-29 |
Multi-plasma Neutral Beam Source And Method Of Operating
App 20090289179 - Chen; Lee ; et al. | 2009-11-26 |
Two-grid ion energy analyzer and methods of manufacturing and operating
App 20090242791 - CHEN; Lee ; et al. | 2009-10-01 |
Ion Energy Analyzer And Methods Of Manufacturing And Operating
App 20090242790 - Chen; Lee ; et al. | 2009-10-01 |
Mono-energetic Neutral Beam Activated Chemical Processing System And Method Of Using
App 20090236314 - Chen; Lee | 2009-09-24 |
Method and system for improving coupling between a surface wave plasma source and a plasma space
Grant 7,584,714 - Chen , et al. September 8, 2 | 2009-09-08 |
Hollow Cathode Device And Method For Using The Device To Control The Uniformity Of A Plasma Process
App 20090218212 - Denpoh; Kazuki ; et al. | 2009-09-03 |
Method of treating a mask layer prior to performing an etching process
Grant 7,572,386 - Ventzek , et al. August 11, 2 | 2009-08-11 |
Plasma etching of Cu-containing layers
Grant 7,553,427 - Ludviksson , et al. June 30, 2 | 2009-06-30 |
Access record gateway
Grant 7,552,126 - Chen , et al. June 23, 2 | 2009-06-23 |
Suppressor of hollow cathode discharge in a shower head fluid distribution system
App 20090145553 - CHEN; Lee ; et al. | 2009-06-11 |
Method for plasma processing over wide pressure range
App 20090142929 - CHEN; Lee ; et al. | 2009-06-04 |
Method and system for low pressure plasma processing
App 20090095714 - CHEN; Lee ; et al. | 2009-04-16 |
Neutral beam source and method for plasma heating
App 20090090852 - Chen; Lee ; et al. | 2009-04-09 |
Processing system for producing a negative ion plasma
App 20090084501 - CHEN; Lee ; et al. | 2009-04-02 |
Method and Apparatus for Spacer-Optimization (S-O)
App 20090081815 - Yamashita; Asao ; et al. | 2009-03-26 |
Method and Apparatus for Creating a Spacer-Optimization (S-O) Library
App 20090082983 - Yamashita; Asao ; et al. | 2009-03-26 |
System and Method for Distributed Multi-Processing Security Gateway
App 20090049537 - Chen; Lee ; et al. | 2009-02-19 |
Method and Apparatus for Optimizing a Gate Channel
App 20080311687 - Yamashita; Asao ; et al. | 2008-12-18 |
Method and Apparatus for Creating a Gate Optimization Evaluation Library
App 20080311688 - Yamashita; Asao ; et al. | 2008-12-18 |
Method And System For Introducing Process Fluid Through A Chamber Component
App 20080282979 - Chen; Lee ; et al. | 2008-11-20 |
Method of treating a mask layer prior to performing an etching process
Grant 7,449,414 - Ventzek , et al. November 11, 2 | 2008-11-11 |
Dynamic Temperature Backside Gas Control For Improved Within-substrate Process Uniformity
App 20080227227 - Sundararajan; Radha ; et al. | 2008-09-18 |
System and Method to Customize a Security Log Analyzer
App 20080229418 - Chen; Lee ; et al. | 2008-09-18 |
Dynamic Control Of Process Chemistry For Improved Within-substrate Process Uniformity
App 20080223873 - Chen; Lee ; et al. | 2008-09-18 |
Plasma processing system for treating a substrate
Grant 7,396,431 - Chen , et al. July 8, 2 | 2008-07-08 |
System and method to associate a private user identity with a public user identity
App 20080148357 - Chen; Lee ; et al. | 2008-06-19 |
Method and system for intelligently forwarding multicast packets
Grant 7,389,359 - Jain , et al. June 17, 2 | 2008-06-17 |
Hyperthermal Neutral Beam Source And Method Of Operating
App 20080135742 - Economou; Demetre J. ; et al. | 2008-06-12 |
Method And System For Uniformity Control In Ballistic Electron Beam Enhanced Plasma Processing System
App 20080135518 - Chen; Lee ; et al. | 2008-06-12 |
System and method to resolve an identity interactively
App 20080109887 - Chen; Lee ; et al. | 2008-05-08 |
Method and system for forming a feature in a high-k layer
Grant 7,361,608 - Ko , et al. April 22, 2 | 2008-04-22 |
Hyperthermal neutral beam source and method of operating
Grant 7,358,484 - Economou , et al. April 15, 2 | 2008-04-15 |
Electron beam enhanced surface wave plasma source
App 20080060759 - Chen; Lee ; et al. | 2008-03-13 |
Radial line slot antenna having a conductive layer
App 20080060760 - Chen; Lee ; et al. | 2008-03-13 |
Method of treating a mask layer prior to performing an etching process
App 20080038926 - Ventzek; Peter L.G. ; et al. | 2008-02-14 |
System and method for distributed multi-processing security gateway
App 20080040789 - Chen; Lee ; et al. | 2008-02-14 |
Method of treating a mask layer prior to performing an etching process
App 20080032507 - Ventzek; Peter L.G. ; et al. | 2008-02-07 |
Method of treating a mask layer prior to performing an etching process
App 20080029483 - Ventzek; Peter L.G. ; et al. | 2008-02-07 |
Method and system for controlling the uniformity of a ballistic electron beam by RF modulation
App 20080023440 - Chen; Lee ; et al. | 2008-01-31 |
Method and apparatus for detecting endpoint in a dry etching system by monitoring a superimposed DC current
App 20080026488 - Panda; Siddhartha ; et al. | 2008-01-31 |
Sequence number based TCP session proxy
App 20070283429 - Chen; Lee ; et al. | 2007-12-06 |
Access record gateway
App 20070282855 - Chen; Lee ; et al. | 2007-12-06 |
Systems and methods for user access authentication based on network access point
App 20070271598 - Chen; Lee ; et al. | 2007-11-22 |
Method for treating a substrate
Grant 7,268,084 - Chen , et al. September 11, 2 | 2007-09-11 |
System and method for an adaptive TCP SYN cookie with time validation
App 20070195792 - Chen; Lee ; et al. | 2007-08-23 |
System and method for storing data-network activity information
App 20070180101 - Chen; Lee ; et al. | 2007-08-02 |
Method and system for etching high-k dielectric materials
App 20070155181 - Chen; Lee ; et al. | 2007-07-05 |
Plasma etching of Ni-containing materials
Grant 7,229,563 - Chen June 12, 2 | 2007-06-12 |
Method of controlling trimming of a gate electrode structure
App 20070111338 - Yue; Hongyu ; et al. | 2007-05-17 |
Anisotropic dry etching of Cu-containing layers
Grant 7,214,327 - Chen , et al. May 8, 2 | 2007-05-08 |
Method and system for etching high-k dielectric materials
Grant 7,202,169 - Chen , et al. April 10, 2 | 2007-04-10 |
Hyperthermal neutral beam source and method of operating
App 20070069118 - Economou; Demetre J. ; et al. | 2007-03-29 |
Method and system for controlling radical distribution
App 20070068625 - Funk; Merritt ; et al. | 2007-03-29 |
Surface wave plasma processing system and method of using
Grant 7,138,767 - Chen , et al. November 21, 2 | 2006-11-21 |
Surface wave plasma processing system and method of using
App 20060071607 - Chen; Lee ; et al. | 2006-04-06 |
Method and system for forming a feature in a high-k layer
App 20060065938 - Ko; Akiteru ; et al. | 2006-03-30 |
Method for treating a substrate
App 20060065629 - Chen; Lee ; et al. | 2006-03-30 |
Plasma processing system for treating a substrate
App 20060065367 - Chen; Lee ; et al. | 2006-03-30 |
Method and system for improving coupling between a surface wave plasma source and a plasma space
App 20060065621 - Chen; Lee ; et al. | 2006-03-30 |
Blood test prototypes and methods for the detection of circulating tumor and endothelial cells
App 20050244843 - Chen, Wen-Tien ; et al. | 2005-11-03 |
Anisotropic dry etching of cu-containing layers
App 20050224456 - Chen, Lee ; et al. | 2005-10-13 |
Method of controlling trimming of a gate electrode structure
App 20050221513 - Yue, Hongyu ; et al. | 2005-10-06 |
Plasma etching of ni-containing materials
App 20050211670 - Chen, Lee | 2005-09-29 |
Method and system for analyzing data from a plasma process
App 20050199341 - Delp, Deana ; et al. | 2005-09-15 |
Plasma etching of cu-containing layers
App 20050167399 - Ludviksson, Audunn ; et al. | 2005-08-04 |
Method and system for etching a high-k dielectric material
App 20050164511 - Chen, Lee ; et al. | 2005-07-28 |
Substrate holder for plasma processing
App 20050120960 - Chen, Lee | 2005-06-09 |
Method and system for etching a high-k dielectric material
App 20050118353 - Chen, Lee ; et al. | 2005-06-02 |
Method of trimming a gate electrode structure
Grant 6,852,584 - Chen , et al. February 8, 2 | 2005-02-08 |
Accelerated ion beam generator
Grant 6,809,310 - Chen October 26, 2 | 2004-10-26 |
Method and system to enhance the removal of high-k dielectric materials
App 20040129674 - Bease, Gordon ; et al. | 2004-07-08 |
Method and system for etching high-k dielectric materials
App 20040110375 - Chen, Lee ; et al. | 2004-06-10 |
Accelerated ion beam generator
App 20030141831 - Chen, Lee | 2003-07-31 |
Method and system for intelligently forwarding multicast packets
App 20030079040 - Jain, Nitin ; et al. | 2003-04-24 |
RF-powered plasma accelerator/homogenizer
Grant 6,512,333 - Chen January 28, 2 | 2003-01-28 |
RF-powered plasma accelerator/homogenizer
App 20020113206 - Chen, Lee | 2002-08-22 |
RF-grounded sub-Debye neutralizer grid
Grant 6,331,701 - Chen , et al. December 18, 2 | 2001-12-18 |
Tri-polar electrostatic chuck
Grant 5,572,398 - Federlin , et al. November 5, 1 | 1996-11-05 |
Neutral beam apparatus for in-situ production of reactants and kinetic energy transfer
Grant 5,468,955 - Chen , et al. November 21, 1 | 1995-11-21 |
Supersonic molecular beam etching of surfaces
Grant 5,286,331 - Chen , et al. February 15, 1 | 1994-02-15 |
Anisotropic silicon etching in fluorinated plasma
Grant 4,741,799 - Chen , et al. May 3, 1 | 1988-05-03 |
Method for control of etch profile
Grant 4,671,849 - Chen , et al. June 9, 1 | 1987-06-09 |
Monitoring technique for plasma etching
Grant 4,602,981 - Chen , et al. July 29, 1 | 1986-07-29 |
Single wafer plasma etch reactor
Grant 4,534,816 - Chen , et al. August 13, 1 | 1985-08-13 |
Optical emission spectroscopy end point detection in plasma etching
Grant 4,493,745 - Chen , et al. January 15, 1 | 1985-01-15 |
Laser induced chemical etching of metals with excimer lasers
Grant 4,490,211 - Chen , et al. December 25, 1 | 1984-12-25 |
Laser induced dry chemical etching of metals
Grant 4,490,210 - Chen , et al. December 25, 1 | 1984-12-25 |
Laser induced dry etching of vias in glass with non-contact masking
Grant 4,478,677 - Chen , et al. October 23, 1 | 1984-10-23 |
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