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Method For Post Chemical Mechanical Polishing Clean App 20180323058 - Ye; Yi-Liang ;   et al. | 2018-11-08 |
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Method of removing a hard mask layer on a gate structure while forming a protective layer on the surface of a substrate Grant 9,646,889 - Yu , et al. May 9, 2 | 2017-05-09 |
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Method of forming multilayer hard mask with treatment for removing impurities and forming dangling bonds Grant 9,613,808 - Ye , et al. April 4, 2 | 2017-04-04 |
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Semiconductor structure and manufacturing method thereof Grant 9,419,089 - Lin , et al. August 16, 2 | 2016-08-16 |