Chen; Kai-Hsiung
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Kai-Hsiung.The latest application filed is for "overlay marks for reducing effect of bottom layer asymmetry".
Company Profile
18.20.23
- Chen; Kai-Hsiung - New Taipei City TW
- Chen; Kai-Hsiung - New Taipei TW
- Chen; Kai-Hsiung - Danshuei Township TW
- Chen; Kai-Hsiung - Taipei Hsien TW
Patent Activity
| Patent | Date |
|---|---|
| Overlay Marks For Reducing Effect Of Bottom Layer Asymmetry App 20220221804 - Hsieh; Hung-Chih ; et al. | 2022-07-14 |
| Overlay marks for reducing effect of bottom layer asymmetry Grant 11,294,293 - Hsieh , et al. April 5, 2 | 2022-04-05 |
| Spectroscopic overlay metrology Grant 10,983,005 - Wu , et al. April 20, 2 | 2021-04-20 |
| Method for forming semiconductor device structure with overlay grating Grant 10,867,933 - Chen , et al. December 15, 2 | 2020-12-15 |
| Method and system for overlay control Grant 10,866,524 - Chang , et al. December 15, 2 | 2020-12-15 |
| Method For Forming Semiconductor Device Structure With Overlay Grating App 20200365520 - CHEN; Long-Yi ; et al. | 2020-11-19 |
| Noise Reduction for Overlay Control App 20200310255 - Hu; Weimin ; et al. | 2020-10-01 |
| Aperture Design and Methods Thereof App 20200284954 - Hsieh; Hung-Chih ; et al. | 2020-09-10 |
| Method for forming semiconductor device structure with overlay grating Grant 10,734,325 - Chen , et al. | 2020-08-04 |
| Noise reduction for overlay control Grant 10,684,556 - Hu , et al. | 2020-06-16 |
| Aperture design and methods thereof Grant 10,663,633 - Hsieh , et al. | 2020-05-26 |
| Method and System for Overlay Control App 20200124984 - Chang; Yang-Hung ; et al. | 2020-04-23 |
| Overlay Marks for Reducing Effect of Bottom Layer Asymmetry App 20200089132 - Hsieh; Hung-Chih ; et al. | 2020-03-19 |
| Method For Forming Semiconductor Device Structure With Overlay Grating App 20200058595 - CHEN; Long-Yi ; et al. | 2020-02-20 |
| Method and system for overlay control Grant 10,514,612 - Chang , et al. Dec | 2019-12-24 |
| Method for forming semiconductor device structure with overlay grating Grant 10,461,037 - Chen , et al. Oc | 2019-10-29 |
| Noise Reduction for Overlay Control App 20190258179 - Hu; Weimin ; et al. | 2019-08-22 |
| Noise reduction for overlay control Grant 10,281,827 - Hu , et al. | 2019-05-07 |
| Method For Forming Semiconductor Device Structure With Overlay Grating App 20190131190 - CHEN; Long-Yi ; et al. | 2019-05-02 |
| Semiconductor Metrology Target And Manufacturing Method Thereof App 20190067203 - CHEN; Long-Yi ; et al. | 2019-02-28 |
| Semiconductor metrology target and manufacturing method thereof Grant 10,204,867 - Chen , et al. Feb | 2019-02-12 |
| Aperture Design and Methods Thereof App 20190004220 - Hsieh; Hung-Chih ; et al. | 2019-01-03 |
| Method and System for Overlay Control App 20180329313 - Chang; Yang-Hung ; et al. | 2018-11-15 |
| Method and system for overlay control Grant 10,031,426 - Chang , et al. July 24, 2 | 2018-07-24 |
| Spectroscopic Overlay Metrology App 20180172514 - Wu; Kai ; et al. | 2018-06-21 |
| Noise Reduction for Overlay Control App 20180173110 - Hu; Weimin ; et al. | 2018-06-21 |
| Method and apparatus for estimating focus and dose of an exposure process Grant 9,766,554 - Chen , et al. September 19, 2 | 2017-09-19 |
| Hybrid focus-exposure matrix Grant 9,690,212 - Zhou , et al. June 27, 2 | 2017-06-27 |
| Method And Apparatus For Estimating Focus And Dose Of An Exposure Process App 20160274456 - Chen; Yen-Liang ; et al. | 2016-09-22 |
| Method and apparatus for extracting systematic defects Grant 9,418,199 - Hu , et al. August 16, 2 | 2016-08-16 |
| Method and System For Overlay Control App 20150268564 - Chang; Yang-Hung ; et al. | 2015-09-24 |
| Method And Apparatus For Extracting Systematic Defects App 20150254394 - Hu; Jia-Rui ; et al. | 2015-09-10 |
| Systems and methods for similarity-based semiconductor process control Grant 9,070,622 - Ke , et al. June 30, 2 | 2015-06-30 |
| Method and system for overlay control Grant 9,053,284 - Chang , et al. June 9, 2 | 2015-06-09 |
| Systems And Methods For Similarity-based Semiconductor Process Control App 20150079700 - Ke; Chih-Ming ; et al. | 2015-03-19 |
| Method and apparatus for extracting systematic defects Grant 8,984,450 - Hu , et al. March 17, 2 | 2015-03-17 |
| Method and System for Overlay Control App 20150067617 - Chang; Yang-Hung ; et al. | 2015-03-05 |
| Method and Apparatus for Extracting Systematic Defects App 20140282334 - Hu; Jia-Rui ; et al. | 2014-09-18 |
| Hybrid Focus-Exposure Matrix App 20140257761 - Zhou; Wen-Zhan ; et al. | 2014-09-11 |
| Exposure system and method Grant 7,301,603 - Chen , et al. November 27, 2 | 2007-11-27 |
| CMP process control method Grant 7,004,814 - Chen , et al. February 28, 2 | 2006-02-28 |
| Exposure system and method App 20060008715 - Chen; Kai-Hsiung ; et al. | 2006-01-12 |
| CMP process control method App 20050208876 - Chen, Chen-Shien ; et al. | 2005-09-22 |
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