Chen; Jin-Yuan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Jin-Yuan.The latest application filed is for "etch chamber with dual frequency biasing sources and a single frequency plasma generating source".
- Chen; Jin-Yuan - Union City CA
- Chen, Jin-Yuan - Bountiful UT
| Patent | Date |
|---|---|
| Etch chamber with dual frequency biasing sources and a single frequency plasma generating source App 20070020937 - Chen; Jin-Yuan ; et al. | 2007-01-25 |
| Etch chamber with dual frequency biasing sources and a single frequency plasma generating source App 20060175015 - Chen; Jin-Yuan ; et al. | 2006-08-10 |
| Etch chamber with dual frequency biasing sources and a single frequency plasma generating source App 20040025791 - Chen, Jin-Yuan ; et al. | 2004-02-12 |
| Fixed matching network with increased match range capabilities App 20040027209 - Chen, Jin-Yuan ; et al. | 2004-02-12 |
| Process chamber having a voltage distribution electrode App 20030006009 - Todorov, Valentin N. ; et al. | 2003-01-09 |
| Method of eliminating notching when anisotropically etching small linewidth openings in silicon on insulator App 20030003748 - Khan, Anisul ; et al. | 2003-01-02 |
| Pulsed RF power delivery for plasma processing Grant 6,472,822 - Chen , et al. October 29, 2 | 2002-10-29 |
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