Chen; Hung

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chen; Hung.The latest application filed is for "chemical mechanical polishing apparatus and methods".

Company Profile

2.28.26

Chen; Hung - Sunnyvale CA
Chen; Hung - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical mechanical polishing apparatus and methods Grant 11,453,097 - Bajaj , et al. September 27, 2	2022-09-27
Chemical Mechanical Polishing Apparatus and Methods App 20200086452 - Bajaj; Rajeev ; et al.	2020-03-19
Chemical mechanical polishing apparatus and methods Grant 10,500,694 - Bajaj , et al. Dec	2019-12-10
Systems and methods for substrate polishing end point detection using improved friction measurement Grant 9,862,070 - Chang , et al. January 9, 2	2018-01-09
Chemical Mechanical Polishing Apparatus And Methods App 20170297163 - Bajaj; Rajeev ; et al.	2017-10-19
Multi-disk chemical mechanical polishing pad conditioners and methods Grant 9,308,623 - Chen , et al. April 12, 2	2016-04-12
Conditioning Of Grooving In Polishing Pads App 20150336236 - Chen; Hung ; et al.	2015-11-26
High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods Grant 9,119,461 - Chen , et al. September 1, 2	2015-09-01
Methods and apparatus for pre-chemical mechanical planarization buffing module Grant 8,968,055 - Chen , et al. March 3, 2	2015-03-03
Chemical Mechanical Polishing Retaining Ring Methods And Apparatus App 20150021498 - Hsu; Samuel ; et al.	2015-01-22
Multi-disk Chemical Mechanical Polishing Pad Conditioners And Methods App 20140315473 - Chen; Hung ; et al.	2014-10-23
Methods And Apparatus For A Non-contact Edge Polishing Module Using Ion Milling App 20140308813 - Hsu; Samuel ; et al.	2014-10-16
Chemical Mechanical Polishing Apparatus And Methods App 20140199840 - Bajaj; Rajeev ; et al.	2014-07-17
Anti-slip Scrubber Brush And Assembly Methods App 20130283553 - Chen; Hui ; et al.	2013-10-31
Methods And Apparatus For Active Substrate Precession During Chemical Mechanical Polishing App 20130288577 - Chen; Hung ; et al.	2013-10-31
High Stiffness, Anti-slip Scrubber Brush Assembly, High-stiffness Mandrel, Subassemblies, And Assembly Methods App 20130283556 - Chen; Hui ; et al.	2013-10-31
Methods And Apparatus For Pre-chemical Mechanical Planarization Buffing Module App 20130288578 - Chen; Hui ; et al.	2013-10-31
Systems And Methods For Substrate Polishing End Point Detection Using Improved Friction Measurement App 20130122782 - Chang; Shou-Sung ; et al.	2013-05-16
Systems And Methods For Substrate Polishing End Point Detection Using Improved Friction Measurement App 20130122788 - Chang; Shou-Sung ; et al.	2013-05-16
Carrier head with a flexible membrane Grant 7,040,971 - Zuniga , et al. May 9, 2	2006-05-09
Carrier head with a flexure Grant 6,857,946 - Zuniga , et al. February 22, 2	2005-02-22
Carrier head with a flexible membrane App 20050037698 - Zuniga, Steven M. ; et al.	2005-02-17
Carrier head for chemical mechanical polishing Grant 6,705,932 - Zuniga , et al. March 16, 2	2004-03-16
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20040033769 - Zuniga, Steven M. ; et al.	2004-02-19
CMP polishing pad Grant 6,575,825 - Tolles , et al. June 10, 2	2003-06-10
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system Grant 6,517,415 - Govzman , et al. February 11, 2	2003-02-11
Carrier head for chemical mechanical polishing a substrate Grant 6,514,124 - Zuniga , et al. February 4, 2	2003-02-04
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20020086624 - Zuniga, Steven M. ; et al.	2002-07-04
Carrier head for chemical mechanical polishing Grant 6,406,361 - Zuniga , et al. June 18, 2	2002-06-18
Apparatus and method for controlled delivery of slurry to a region of a polishing device App 20020068516 - Chen, Hung ; et al.	2002-06-06
Method of chemical mechanical polishing with edge control Grant 6,361,420 - Zuniga , et al. March 26, 2	2002-03-26
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system App 20020031981 - Govzman, Boris ; et al.	2002-03-14
Carrier head with a flexible membrane for chemical mechanical polishing Grant 6,277,014 - Chen , et al. August 21, 2	2001-08-21
CMP polishing pad App 20010008830 - Tolles, Robert D. ; et al.	2001-07-19
Method for detecting the presence of a substrate in a carrier head Grant 6,244,932 - Govzman , et al. June 12, 2	2001-06-12
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20010000775 - Zuniga, Steven M. ; et al.	2001-05-03
CMP polishing pad Grant 6,217,426 - Tolles , et al. April 17, 2	2001-04-17
Carrier head with a flexible membrane for a chemical mechanical polishing system Grant 6,183,354 - Zuniga , et al. February 6, 2	2001-02-06
Carrier head for chemical mechanical polishing Grant 6,165,058 - Zuniga , et al. December 26, 2	2000-12-26
Carrier head for chemical mechanical polishing Grant 6,162,116 - Zuniga , et al. December 19, 2	2000-12-19
Carrier head for chemical mechanical polishing a substrate Grant 6,159,079 - Zuniga , et al. December 12, 2	2000-12-12
Carrier head with edge control for chemical mechanical polishing Grant 6,132,298 - Zuniga , et al. October 17, 2	2000-10-17
Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus Grant 6,080,050 - Chen , et al. June 27, 2	2000-06-27
Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus Grant 5,993,302 - Chen , et al. November 30, 1	1999-11-30
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system Grant 5,957,751 - Govzman , et al. September 28, 1	1999-09-28

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