Chen; Hanhong
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Hanhong.The latest application filed is for "plasma source for rotating susceptor".
Company Profile
9.82.75
- Chen; Hanhong - Milpitas CA
- Chen; Hanhong - San Jose CA
- Chen; Hanhong - Santa Clara CA
Patent Activity
| Patent | Date |
|---|---|
| Plasma source for rotating susceptor Grant 11,315,769 - Bera , et al. April 26, 2 | 2022-04-26 |
| Complementary pattern station designs Grant 11,220,747 - AuBuchon , et al. January 11, 2 | 2022-01-11 |
| Plasma Source For Rotating Susceptor App 20210166923 - Bera; Kallol ; et al. | 2021-06-03 |
| Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources Grant 10,985,009 - Kalutarage , et al. April 20, 2 | 2021-04-20 |
| Dithering Or Dynamic Offsets For Improved Uniformity App 20210087681 - AuBuchon; Joseph ; et al. | 2021-03-25 |
| Methods for Controlling Pulse Shape in ALD Processes App 20210087688 - AuBuchon; Joseph ; et al. | 2021-03-25 |
| PEALD Nitride Films App 20210090877 - Chen; Hanhong ; et al. | 2021-03-25 |
| Peald Titanium Nitride With Direct Microwave Plasma App 20210050186 - Chen; Hanhong ; et al. | 2021-02-18 |
| Plasma source for rotating susceptor Grant 10,903,056 - Bera , et al. January 26, 2 | 2021-01-26 |
| Complementary Pattern Station Designs App 20200131636 - AuBuchon; Joseph ; et al. | 2020-04-30 |
| Methods Of Operating A Spatial Deposition Tool App 20200090978 - AuBuchon; Joseph ; et al. | 2020-03-19 |
| Methods Of Operating A Spatial Deposition Tool App 20200066572 - AuBuchon; Joseph ; et al. | 2020-02-27 |
| Methods To Deposit Flowable (gap-fill) Carbon Containing Films Using Various Plasma Sources App 20190333760 - Kalutarage; Lakmal Charidu ; et al. | 2019-10-31 |
| Method Of Forming Silicon Nitride Films Using Microwave Plasma App 20190259598 - CHEN; Hanhong ; et al. | 2019-08-22 |
| Plasma Source For Rotating Susceptor App 20180330927 - Bera; Kallol ; et al. | 2018-11-15 |
| DRAM MIMCAP Stack with MoO2 Electrode App 20160133691 - Phatak; Prashant B. ; et al. | 2016-05-12 |
| DRAM MIM capacitor using non-noble electrodes Grant 9,281,357 - Chen , et al. March 8, 2 | 2016-03-08 |
| High work function, manufacturable top electrode Grant 9,224,878 - Malhotra , et al. December 29, 2 | 2015-12-29 |
| Adsorption site blocking method for co-doping ALD films Grant 9,178,010 - Malhotra , et al. November 3, 2 | 2015-11-03 |
| Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applications Grant 9,178,006 - Rui , et al. November 3, 2 | 2015-11-03 |
| Methods to Improve Electrical Performance of ZrO2 Based High-K Dielectric Materials for DRAM Applications App 20150228710 - Rui; Xiangxin ; et al. | 2015-08-13 |
| Inexpensive electrode materials to facilitate rutile phase titanium oxide Grant 9,082,782 - Chen , et al. July 14, 2 | 2015-07-14 |
| DRAM MIM Capacitor Using Non-Noble Electrodes App 20150137315 - Chen; Hanhong ; et al. | 2015-05-21 |
| DRAM MIM Capacitor Using Non-Noble Electrodes App 20150087130 - Chen; Hanhong ; et al. | 2015-03-26 |
| Inexpensive electrode materials to facilitate rutile phase titanium oxide Grant 8,980,744 - Chen , et al. March 17, 2 | 2015-03-17 |
| Molybdenum oxide top electrode for DRAM capacitors Grant 8,975,633 - Chen , et al. March 10, 2 | 2015-03-10 |
| Enhanced work function layer supporting growth of rutile phase titanium oxide Grant 8,975,147 - Rui , et al. March 10, 2 | 2015-03-10 |
| DRAM MIM capacitor using non-noble electrodes Grant 8,969,169 - Chen , et al. March 3, 2 | 2015-03-03 |
| Yttrium and titanium high-k dielectric films Grant 8,900,418 - Hashim , et al. December 2, 2 | 2014-12-02 |
| Yttrium and titanium high-k dielectric films Grant 8,901,708 - Hashim , et al. December 2, 2 | 2014-12-02 |
| Yttrium and titanium high-K dielectric film Grant 8,900,422 - Hashim , et al. December 2, 2 | 2014-12-02 |
| Band gap improvement in DRAM capacitors Grant 8,878,269 - Chen , et al. November 4, 2 | 2014-11-04 |
| System and method for step coverage measurement Grant 8,859,301 - Chen , et al. October 14, 2 | 2014-10-14 |
| Single-sided non-noble metal electrode hybrid MIM stack for DRAM devices Grant 8,853,049 - Deweerd , et al. October 7, 2 | 2014-10-07 |
| High work function, manufacturable top electrode Grant 8,847,397 - Malhotra , et al. September 30, 2 | 2014-09-30 |
| Zinc oxide photoelectrodes and methods of fabrication Grant 8,835,756 - Lu , et al. September 16, 2 | 2014-09-16 |
| Method for fabricating a DRAM capacitor Grant 8,836,002 - Ramani , et al. September 16, 2 | 2014-09-16 |
| High temperature ALD process of metal oxide for DRAM applications Grant 8,835,273 - Chen , et al. September 16, 2 | 2014-09-16 |
| Fabrication of semiconductor stacks with ruthenium-based materials Grant 8,828,821 - Chen , et al. September 9, 2 | 2014-09-09 |
| High temperature ALD process for metal oxide for DRAM applications Grant 8,829,647 - Chen , et al. September 9, 2 | 2014-09-09 |
| Method for fabricating a DRAM capacitor Grant 8,813,325 - Ramani , et al. August 26, 2 | 2014-08-26 |
| Method of processing MIM capacitors to reduce leakage current Grant 8,815,677 - Chen , et al. August 26, 2 | 2014-08-26 |
| Methods for forming high-K crystalline films and related devices Grant 8,809,160 - Chen , et al. August 19, 2 | 2014-08-19 |
| Band gap improvement in DRAM capacitors Grant 8,772,123 - Chen , et al. July 8, 2 | 2014-07-08 |
| High Work Function, Manufacturable Top Electrode App 20140187016 - Malhotra; Sandra G. ; et al. | 2014-07-03 |
| High Work Function, Manufacturable Top Electrode App 20140183697 - Malhotra; Sandra G. ; et al. | 2014-07-03 |
| Molybdenum oxide top electrode for DRAM capacitors Grant 8,765,569 - Chen , et al. July 1, 2 | 2014-07-01 |
| Titanium based high-K dielectric films Grant 8,737,036 - Chen , et al. May 27, 2 | 2014-05-27 |
| High Temperature ALD Process for Metal Oxide for DRAM Applications App 20140077337 - Chen; Hanhong ; et al. | 2014-03-20 |
| High Temperature ALD Process of Metal Oxide for DRAM Applications App 20140080284 - Chen; Hanhong ; et al. | 2014-03-20 |
| Method for producing MIM capacitors with high K dielectric materials and non-noble electrodes Grant 8,674,479 - Chen , et al. March 18, 2 | 2014-03-18 |
| Integration of non-noble DRAM electrode Grant 8,652,927 - Malhotra , et al. February 18, 2 | 2014-02-18 |
| Enhanced non-noble electrode layers for DRAM capacitor cell Grant 8,647,943 - Chen , et al. February 11, 2 | 2014-02-11 |
| Enhanced Non-noble Electrode Layers For Dram Capacitor Cell App 20130330902 - Chen; Hanhong ; et al. | 2013-12-12 |
| Integration of Non-Noble DRAM Electrode App 20130320495 - Malhotra; Sandra G. ; et al. | 2013-12-05 |
| Enhanced non-noble electrode layers for DRAM capacitor cell Grant 8,581,318 - Chen , et al. November 12, 2 | 2013-11-12 |
| Semiconductor stacks including catalytic layers Grant 8,581,319 - Chen , et al. November 12, 2 | 2013-11-12 |
| Asymmetric MIM capacitor for DRAM devices Grant 8,575,671 - Chen , et al. November 5, 2 | 2013-11-05 |
| Method of using a catalytic layer to enhance formation of a capacitor stack Grant 8,574,997 - Chen , et al. November 5, 2 | 2013-11-05 |
| Blocking layers for leakage current reduction in DRAM devices Grant 8,574,999 - Malhotra , et al. November 5, 2 | 2013-11-05 |
| Method for Producing MIM Capacitors with High K Dielectric Materials and Non-Noble Electrodes App 20130285205 - Chen; Hanhong ; et al. | 2013-10-31 |
| Blocking layers for leakage current reduction in DRAM devices Grant 8,569,818 - Malhotra , et al. October 29, 2 | 2013-10-29 |
| System and Method for Step Coverage Measurement App 20130272496 - Chen; Hanhong ; et al. | 2013-10-17 |
| Titanium-based high-K dielectric films Grant 8,551,851 - Chen , et al. October 8, 2 | 2013-10-08 |
| High performance dielectric stack for DRAM capacitor Grant 8,546,236 - Malhotra , et al. October 1, 2 | 2013-10-01 |
| Blocking layers for leakage current reduction in DRAM devices Grant 8,541,282 - Malhotra , et al. September 24, 2 | 2013-09-24 |
| High performance dielectric stack for DRAM capacitor Grant 8,541,283 - Malhotra , et al. September 24, 2 | 2013-09-24 |
| Top electrode templating for DRAM capacitor Grant 8,541,868 - Malhotra , et al. September 24, 2 | 2013-09-24 |
| Method of forming stacked metal oxide layers Grant 8,530,322 - Chen , et al. September 10, 2 | 2013-09-10 |
| Integration of non-noble DRAM electrode Grant 8,530,348 - Malhotra , et al. September 10, 2 | 2013-09-10 |
| High Performance Dielectric Stack For Dram Capacitor App 20130217202 - Malhotra; Sandra G. ; et al. | 2013-08-22 |
| System and method for step coverage measurement Grant 8,486,727 - Chen , et al. July 16, 2 | 2013-07-16 |
| Method for producing MIM capacitors with high K dielectric materials and non-noble electrodes Grant 8,481,384 - Chen , et al. July 9, 2 | 2013-07-09 |
| High performance dielectric stack for DRAM capacitor Grant 8,476,141 - Malhotra , et al. July 2, 2 | 2013-07-02 |
| Method for Fabricating a DRAM Capacitor App 20130154057 - Ramani; Karthik ; et al. | 2013-06-20 |
| High Performance Dielectric Stack For Dram Capacitor App 20130143384 - Malhotra; Sandra ; et al. | 2013-06-06 |
| High Performance Dielectric Stack for DRAM Capacitor App 20130140619 - Malhotra; Sandra ; et al. | 2013-06-06 |
| Method for ALD Deposition Rate Enhancement App 20130140675 - Chen; Hanhong ; et al. | 2013-06-06 |
| Band Gap Improvement In DRAM Capacitors App 20130127015 - Chen; Hanhong ; et al. | 2013-05-23 |
| Blocking Layers For Leakage Current Reduction In Dram Devices App 20130122683 - Malhotra; Sandra G. ; et al. | 2013-05-16 |
| Adsorption Site Blocking Method for Co-Doping ALD Films App 20130119513 - Malhotra; Sandra ; et al. | 2013-05-16 |
| Top Electrode Templating for DRAM Capacitor App 20130119512 - Malhotra; Sandra G. ; et al. | 2013-05-16 |
| Adsorption Site Blocking Method For Co-doping Ald Films App 20130122678 - Malhotra; Sandra ; et al. | 2013-05-16 |
| Top Electrode Templating For Dram Capacitor App 20130122681 - Malhotra; Sandra ; et al. | 2013-05-16 |
| Adsorption site blocking method for co-doping ALD films Grant 8,440,537 - Malhotra , et al. May 14, 2 | 2013-05-14 |
| Blocking Layers For Leakage Current Reduction In Dram Devices App 20130115750 - Malhotra; Sandra ; et al. | 2013-05-09 |
| Blocking Layers for Leakage Current Reduction in DRAM Devices App 20130113079 - Malhotra; Sandra G. ; et al. | 2013-05-09 |
| Top electrode templating for DRAM capacitor Grant 8,435,854 - Malhotra , et al. May 7, 2 | 2013-05-07 |
| Enhanced Work Function Layer Supporting Growth of Rutile Phase Titanium Oxide App 20130095632 - Rui; Xiangxin ; et al. | 2013-04-18 |
| Asymmetric MIM Capacitor for DRAM Devices App 20130093051 - Chen; Hanhong ; et al. | 2013-04-18 |
| Enhanced work function layer supporting growth of rutile phase titanium oxide Grant 8,415,657 - Rui , et al. April 9, 2 | 2013-04-09 |
| High performance dielectric stack for DRAM capacitor Grant 8,415,227 - Malhotra , et al. April 9, 2 | 2013-04-09 |
| Inexpensive Electrode Materials to Facilitate Rutile Phase Titanium Oxide App 20130072015 - Chen; Hanhong ; et al. | 2013-03-21 |
| Yttrium and Titanium High-K Dielectric Films App 20130069201 - Hashim; Imran ; et al. | 2013-03-21 |
| Band Gap Improvement In DRAM Capacitors App 20130071987 - Chen; Hanhong ; et al. | 2013-03-21 |
| Electrode Treatments for Enhanced DRAM Performance App 20130069202 - Rui; Xiangxin ; et al. | 2013-03-21 |
| Yttrium and Titanium High-K Dielectric Films App 20130071990 - Hashim; Imran ; et al. | 2013-03-21 |
| Electrode Treatments for Enhanced DRAM Performance App 20130071991 - Rui; Xiangxin ; et al. | 2013-03-21 |
| Single-sided Non-noble Metal Electrode Hybrid Mim Stack For Dram Devices App 20130071989 - Deweerd; Wim ; et al. | 2013-03-21 |
| Molybdenum Oxide Top Electrode for DRAM Capacitors App 20130056851 - Chen; Hanhong ; et al. | 2013-03-07 |
| High Performance Dielectric Stack For Dram Capacitor App 20130052792 - Malhotra; Sandra ; et al. | 2013-02-28 |
| Doping Approach Of Titanium Dioxide For Dram Capacitors App 20130052790 - Deweerd; Wim ; et al. | 2013-02-28 |
| Titanium-Based High-K Dielectric Films App 20130044404 - Chen; Hanhong ; et al. | 2013-02-21 |
| Inexpensive electrode materials to facilitate rutile phase titanium oxide App 20130037913 - Chen; Hanhong ; et al. | 2013-02-14 |
| Inexpensive electrode materials to facilitate rutile phase titanium oxide Grant 8,354,702 - Shanker , et al. January 15, 2 | 2013-01-15 |
| Asymmetric MIM capacitor for DRAM devices Grant 8,349,696 - Chen , et al. January 8, 2 | 2013-01-08 |
| Method Of Processing Mim Capacitors To Reduce Leakage Current App 20120322220 - Chen; Hanhong ; et al. | 2012-12-20 |
| Molybdenum Oxide Top Electrode For Dram Capacitors App 20120322221 - Chen; Hanhong ; et al. | 2012-12-20 |
| Method For Ald Deposition Rate Enhancement App 20120309162 - Chen; Hanhong ; et al. | 2012-12-06 |
| Inexpensive electrode materials to facilitate rutile phase titanium oxide Grant 8,318,572 - Shanker , et al. November 27, 2 | 2012-11-27 |
| Method For Fabricating A Dram Capacitor App 20120262835 - Ramani; Karthik ; et al. | 2012-10-18 |
| Yttrium and titanium high-k dielectric films Grant 8,278,735 - Hashim , et al. October 2, 2 | 2012-10-02 |
| Electrode Treatments For Enhanced Dram Performance App 20120235276 - Rui; Xiangxin ; et al. | 2012-09-20 |
| Method For Producing Mim Capacitors With High K Dielectric Materials And Non-noble Electrodes App 20120214288 - Chen; Hanhong ; et al. | 2012-08-23 |
| Fabrication Of Semiconductor Stacks With Ruthenium-based Materials App 20120171839 - Chen; Hanhong ; et al. | 2012-07-05 |
| Method Of Forming Stacked Metal Oxide Layers App 20120156854 - Chen; Hanhong ; et al. | 2012-06-21 |
| Methods For Forming High-k Crystalline Films And Related Devices App 20120156889 - Chen; Hanhong ; et al. | 2012-06-21 |
| System and Method for Step Coverage Measurement App 20120123744 - Chen; Hanhong ; et al. | 2012-05-17 |
| Yttrium and Titanium High-K Dielectric Films App 20120061799 - Hashim; Imran ; et al. | 2012-03-15 |
| Titanium-based High-k Dielectric Films App 20110203085 - Chen; Hanhong ; et al. | 2011-08-25 |
| Enhanced Work Function Layer Supporting Growth Of Rutile Phase Titanium Oxide App 20110204475 - Rui; Xiangxin ; et al. | 2011-08-25 |
| Titanium-based high-K dielectric films Grant 7,968,452 - Chen , et al. June 28, 2 | 2011-06-28 |
| Yttrium and Titanium High-K Dielectric Film App 20110014359 - Hashim; Imran ; et al. | 2011-01-20 |
| Titanium-Based High-K Dielectric Films App 20100330269 - Chen; Hanhong ; et al. | 2010-12-30 |
| Zinc Oxide Photoelectrodes and Methods of Fabrication App 20080149171 - Lu; Yicheng ; et al. | 2008-06-26 |
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