Chen; Guangqing
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Guangqing.The latest application filed is for "method and apparatus for design of a metrology target".
- Chen; Guangqing - Fremont CA
| Patent | Date |
|---|---|
| Method And Apparatus For Design Of A Metrology Target App 20220113638 - Chen; Guangqing ; et al. | 2022-04-14 |
| Method and apparatus for design of a metrology target Grant 11,221,560 - Chen , et al. January 11, 2 | 2022-01-11 |
| Process based metrology target design Grant 10,296,681 - Chen , et al. | 2019-05-21 |
| Method and apparatus for design of a metrology target Grant 10,296,692 - Chen , et al. | 2019-05-21 |
| Process Based Metrology Target Design App 20180268093 - CHEN; Guangqing ; et al. | 2018-09-20 |
| Process based metrology target design Grant 10,007,744 - Chen , et al. June 26, 2 | 2018-06-26 |
| Method And Apparatus For Inspection And Metrology App 20180046737 - WILLEMS; Lotte Marloes ; et al. | 2018-02-15 |
| Method and apparatus for design of a metrology target Grant 9,804,504 - Chen , et al. October 31, 2 | 2017-10-31 |
| Method and apparatus for design of a metrology target Grant 9,494,874 - Chen , et al. November 15, 2 | 2016-11-15 |
| Method And Apparatus For Design Of A Metrology Target App 20160252820 - CHEN; Guangqing ; et al. | 2016-09-01 |
| Method and apparatus for design of a metrology target Grant 9,355,200 - Chen , et al. May 31, 2 | 2016-05-31 |
| Process Based Metrology Target Design App 20160140267 - CHEN; Guangqing ; et al. | 2016-05-19 |
| Method And Apparatus For Design Of A Metrology Target App 20150185625 - CHEN; Guangqing ; et al. | 2015-07-02 |
| Method And Apparatus For Design Of A Metrology Target App 20150186582 - CHEN; Guangqing ; et al. | 2015-07-02 |
| Method And Apparatus For Design Of A Metrology Target App 20150186581 - Chen; Guangqing ; et al. | 2015-07-02 |
| Method And Apparatus For Design Of A Metrology Target App 20150185626 - CHEN; Guangqing ; et al. | 2015-07-02 |
| Method for lithography model calibration Grant 7,488,933 - Ye , et al. February 10, 2 | 2009-02-10 |
| Method For Lithography Model Calibration App 20070032896 - Ye; Jun ; et al. | 2007-02-08 |
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