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Field curvature correction for multi-beam inspection systems Grant 11,302,511 - Brodie , et al. April 12, 2 | 2022-04-12 |
Method and system for charged particle microscopy with improved image beam stabilization and interrogation Grant 11,120,969 - Masnaghetti , et al. September 14, 2 | 2021-09-14 |
Method and System for Charged Particle Microscopy with Improved Image Beam Stabilization and Interrogation App 20200227232 - Masnaghetti; Doug K. ;   et al. | 2020-07-16 |
Generating high resolution images from low resolution images for semiconductor applications Grant 10,648,924 - Zhang , et al. | 2020-05-12 |
Method and system for charged particle microscopy with improved image beam stabilization and interrogation Grant 10,643,819 - Masnaghetti , et al. | 2020-05-05 |
Inspection system including parallel imaging paths with multiple and selectable spectral bands Grant 10,429,319 - Hwang , et al. October 1, 2 | 2019-10-01 |
Systems and methods for defect detection using image reconstruction Grant 10,416,087 - Zhang , et al. Sept | 2019-09-17 |
Generating simulated output for a specimen Grant 10,043,261 - Bhaskar , et al. August 7, 2 | 2018-08-07 |
Hybrid inspectors Grant 9,916,965 - Bhaskar , et al. March 13, 2 | 2018-03-13 |
Detecting defects on a wafer using defect-specific and multi-channel information Grant 9,846,930 - Wu , et al. December 19, 2 | 2017-12-19 |
Field Curvature Correction for Multi-Beam Inspection Systems App 20170229279 - Brodie; Alan ;   et al. | 2017-08-10 |
Generating Simulated Output For A Specimen App 20170200265 - Bhaskar; Kris ;   et al. | 2017-07-13 |
Hybrid Inspectors App 20170194126 - Bhaskar; Kris ;   et al. | 2017-07-06 |
Systems and Methods for Defect Detection Using Image Reconstruction App 20170191945 - Zhang; Jing ;   et al. | 2017-07-06 |
Generating High Resolution Images From Low Resolution Images For Semiconductor Applications App 20170193680 - Zhang; Jing ;   et al. | 2017-07-06 |
System and method for apodization in a semiconductor device inspection system Grant 9,645,093 - Sullivan , et al. May 9, 2 | 2017-05-09 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information App 20170091925 - Wu; Kenong ;   et al. | 2017-03-30 |
Detecting defects on a wafer using defect-specific and multi-channel information Grant 9,552,636 - Wu , et al. January 24, 2 | 2017-01-24 |
Method and System for Charged Particle Microscopy with Improved Image Beam Stabilization and Interrogation App 20160372304 - Masnaghetti; Doug K. ;   et al. | 2016-12-22 |
Scratch filter for wafer inspection Grant 9,442,077 - Huang , et al. September 13, 2 | 2016-09-13 |
System and Method for Apodization in a Semiconductor Device Inspection System App 20160054232 - Sullivan; Jamie M. ;   et al. | 2016-02-25 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information App 20160027165 - Wu; Kenong ;   et al. | 2016-01-28 |
Variable polarization wafer inspection Grant 9,239,295 - Peng , et al. January 19, 2 | 2016-01-19 |
System and method for apodization in a semiconductor device inspection system Grant 9,176,069 - Sullivan , et al. November 3, 2 | 2015-11-03 |
Super resolution inspection system Grant 9,128,064 - Cavan , et al. September 8, 2 | 2015-09-08 |
Detecting defects on a wafer using defect-specific and multi-channel information Grant 9,092,846 - Wu , et al. July 28, 2 | 2015-07-28 |
Scratch Filter for Wafer Inspection App 20150063677 - Huang; Junqing ;   et al. | 2015-03-05 |
Inspection System Including Parallel Imaging Paths with Multiple and Selectable Spectral Bands App 20140285657 - Hwang; Shiow-Hwei ;   et al. | 2014-09-25 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information App 20140219544 - Wu; Kenong ;   et al. | 2014-08-07 |
System and Method for Apodization in a Semiconductor Device Inspection System App 20140016125 - Sullivan; Jamie M. ;   et al. | 2014-01-16 |
Super Resolution Inspection System App 20130321797 - Cavan; Daniel L. ;   et al. | 2013-12-05 |
Variable Polarization Wafer Inspection App 20130265577 - Peng; Xianzhao ;   et al. | 2013-10-10 |
Systems configured to inspect a specimen Grant 7,535,563 - Chen , et al. May 19, 2 | 2009-05-19 |
Dark field inspection apparatus and methods Grant 7,436,503 - Chen , et al. October 14, 2 | 2008-10-14 |