CHEN; Feng-Yu

Patent Applications and Registrations

Patent applications and USPTO patent grants for CHEN; Feng-Yu.The latest application filed is for "method of monitoring tool".

Company Profile

5.4.5

CHEN; Feng-Yu - Taichung City TW
Chen; Feng-Yu - Taichung TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method Of Monitoring Tool App 20220130697 - LIN; Hom-Chung ; et al.	2022-04-28
Tool monitoring device and method of monitoring tool Grant 11,239,099 - Lin , et al. February 1, 2	2022-02-01
Method for forming films on wafers separated by different distances Grant 11,133,207 - Yang , et al. September 28, 2	2021-09-28
Method for controlling temperature of furnace in semiconductor fabrication process Grant 10,930,527 - Lo , et al. February 23, 2	2021-02-23
Method For Controlling Temperature Of Furnace In Semiconductor Fabrication Process App 20200312685 - LO; Jian-Lun ; et al.	2020-10-01
Method for controlling temperature of furnace in semiconductor fabrication process Grant 10,741,426 - Lo , et al. A	2020-08-11
Tool Monitoring Device And Method Of Monitoring Tool App 20200105555 - LIN; Hom-Chung ; et al.	2020-04-02
Wafer Boat, Furnace Apparatus Using The Same, And Method For Forming Film App 20200075372 - YANG; Wen-Bin ; et al.	2020-03-05
Method For Controlling Temperature Of Furnace In Semiconductor Fabrication Process App 20190096714 - LO; Jian-Lun ; et al.	2019-03-28

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