CHEN; Erica
Patent Applications and Registrations
Patent applications and USPTO patent grants for CHEN; Erica.The latest application filed is for "methods and apparatus for processing a substrate".
- CHEN; Erica - Santa Clara CA
- CHEN; Erica - Cupertino CA
- CHEN; Erica - Sunnyvale CA
| Patent | Date |
|---|---|
| Methods And Apparatus For Processing A Substrate App 20220301867 - TANNOS; Jethro ; et al. | 2022-09-22 |
| Methods And Apparatus For Processing A Substrate App 20220298636 - ASRANI; Soham Sunjay ; et al. | 2022-09-22 |
| Airgap Structures For Improved Eyepiece Efficiency App 20220299677 - CHEN; Erica ; et al. | 2022-09-22 |
| Methods For Graphene Formation App 20220172948 - Zhou; Jie ; et al. | 2022-06-02 |
| Methods for graphene formation using microwave surface-wave plasma on dielectric materials Grant 11,289,331 - Zhou , et al. March 29, 2 | 2022-03-29 |
| Gap fill deposition process Grant 11,101,174 - Jiang , et al. August 24, 2 | 2021-08-24 |
| Methods And Apparatus For Carbon Compound Film Deposition App 20210217585 - LIANG; Qiwei ; et al. | 2021-07-15 |
| Methods for film modification Grant 11,049,731 - Chen , et al. June 29, 2 | 2021-06-29 |
| Gap Fill Deposition Process App 20210111067 - JIANG; Hao ; et al. | 2021-04-15 |
| Residual removal Grant 10,964,527 - Kim , et al. March 30, 2 | 2021-03-30 |
| Methods For Gapfill In High Aspect Ratio Structures App 20210028055 - Manna; Pramit ; et al. | 2021-01-28 |
| Enhanced selective deposition process Grant 10,892,161 - Liu , et al. January 12, 2 | 2021-01-12 |
| Wafer Treatment For Achieving Defect-free Self-assembled Monolayers App 20200402792 - Ke; Chang ; et al. | 2020-12-24 |
| Methods for gapfill in high aspect ratio structures Grant 10,811,303 - Manna , et al. October 20, 2 | 2020-10-20 |
| Wafer treatment for achieving defect-free self-assembled monolayers Grant 10,770,292 - Ke , et al. Sep | 2020-09-08 |
| Methods For Graphene Formation App 20200105525 - Zhou; Jie ; et al. | 2020-04-02 |
| Methods For Film Modification App 20200105541 - Chen; Erica ; et al. | 2020-04-02 |
| Residual Removal App 20190393024 - KIM; Jong Mun ; et al. | 2019-12-26 |
| Methods For Gapfill In High Aspect Ratio Structures App 20190157134 - Manna; Pramit ; et al. | 2019-05-23 |
| Enhanced Selective Deposition Process App 20190148144 - LIU; Biao ; et al. | 2019-05-16 |
| Methods for gapfill in high aspect ratio structures Grant 10,192,775 - Manna , et al. Ja | 2019-01-29 |
| Wafer Treatment For Achieving Defect-Free Self-Assembled Monolayers App 20180366317 - Ke; Chang ; et al. | 2018-12-20 |
| Gapfill film modification for advanced CMP and recess flow Grant 10,096,512 - Chen , et al. October 9, 2 | 2018-10-09 |
| Advanced process flow for high quality FCVD films Grant 9,777,378 - Nemani , et al. October 3, 2 | 2017-10-03 |
| 3D material modification for advanced processing Grant 9,773,675 - Godet , et al. September 26, 2 | 2017-09-26 |
| Methods For Gapfill In High Aspect Ratio Structures App 20170271196 - Manna; Pramit ; et al. | 2017-09-21 |
| 3d Material Modification For Advanced Processing App 20170154776 - GODET; Ludovic ; et al. | 2017-06-01 |
| Gapfill Film Modification For Advanced Cmp And Recess Flow App 20170117157 - CHEN; Erica ; et al. | 2017-04-27 |
| 3D material modification for advanced processing Grant 9,620,407 - Godet , et al. April 11, 2 | 2017-04-11 |
| Air gap formation in interconnection structure by implantation process Grant 9,595,467 - Xue , et al. March 14, 2 | 2017-03-14 |
| Advanced Process Flow For High Quality Fcvd Films App 20160194758 - NEMANI; Srinivas D. ; et al. | 2016-07-07 |
| 3d Material Modification For Advanced Processing App 20160163546 - GODET; Ludovic ; et al. | 2016-06-09 |
| Air Gap Formation In Interconnection Structure By Implantation Process App 20160141202 - XUE; Jun ; et al. | 2016-05-19 |
| Flowable Film Properties Tuning Using Implantation App 20160079034 - Yieh; Ellie Y. ; et al. | 2016-03-17 |
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