| Patent | Date |
|---|
Method for Improved Critical Dimension Uniformity in a Semiconductor Device Fabrication Process
App 20220223428 - Hung; Chi-Cheng ; et al. | 2022-07-14 |
Method of fabricating semiconductor device with reduced trench distortions
Grant 11,387,113 - Yen , et al. July 12, 2 | 2022-07-12 |
Phase-shift Reticle For Use In Photolithography
App 20220163881 - Yeh; Tse-An ; et al. | 2022-05-26 |
Using Cumulative Heat Amount Data To Qualify Hot Plate Used For Postexposure Baking
App 20220139698 - Chao; Chia-Cheng ; et al. | 2022-05-05 |
Method for improved critical dimension uniformity in a semiconductor device fabrication process
Grant 11,289,338 - Hung , et al. March 29, 2 | 2022-03-29 |
Using cumulative heat amount data to qualify hot plate used for postexposure baking
Grant 11,222,783 - Chao , et al. January 11, 2 | 2022-01-11 |
Via Rail Solution For High Power Electromigration
App 20210366844 - Sio; Kam-Tou ; et al. | 2021-11-25 |
Method and apparatus for collecting information used in image-error compensation
Grant 11,150,561 - Cho , et al. October 19, 2 | 2021-10-19 |
Layout Modification Method For Exposure Manufacturing Process
App 20210296303 - CHO; Hung-Wen ; et al. | 2021-09-23 |
Structure and method for alignment marks
Grant 11,121,128 - Wen , et al. September 14, 2 | 2021-09-14 |
Via rail solution for high power electromigration
Grant 11,088,092 - Sio , et al. August 10, 2 | 2021-08-10 |
Via rail solution for high power electromigration
Grant 11,063,005 - Sio , et al. July 13, 2 | 2021-07-13 |
Dummy MOL removal for performance enhancement
Grant 11,043,426 - Yang , et al. June 22, 2 | 2021-06-22 |
Layout modification method for exposure manufacturing process
Grant 11,024,623 - Cho , et al. June 1, 2 | 2021-06-01 |
Dual power structure with connection pins
Grant 11,024,579 - Peng , et al. June 1, 2 | 2021-06-01 |
Semiconductor Device Including Source/drain Contact Having Height Below Gate Stack
App 20210082903 - YOUNG; Charles Chew-Yuen ; et al. | 2021-03-18 |
Method Of Fabricating Semiconductor Device With Reduced Trench Distortions
App 20210057231 - Yen; Yung-Sung ; et al. | 2021-02-25 |
Collector pellicle
Grant 10,880,981 - Chien , et al. December 29, 2 | 2020-12-29 |
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning
Grant 10,871,713 - Cho , et al. December 22, 2 | 2020-12-22 |
Power strap structure for high performance and low current density
Grant 10,861,790 - Chen , et al. December 8, 2 | 2020-12-08 |
Semiconductor device including source/drain contact having height below gate stack
Grant 10,833,061 - Young , et al. November 10, 2 | 2020-11-10 |
Method And Apparatus For Collecting Information Used In Image-error Compensation
App 20200348586 - CHO; Hung-Wen ; et al. | 2020-11-05 |
Layout Modification Method For Exposure Manufacturing Process
App 20200350306 - CHO; Hung-Wen ; et al. | 2020-11-05 |
Method for Improved Critical Dimension Uniformity in a Semiconductor Device Fabrication Process
App 20200343097 - Hung; Chi-Cheng ; et al. | 2020-10-29 |
Method of fabricating semiconductor device with reduced trench distortions
Grant 10,818,509 - Yen , et al. October 27, 2 | 2020-10-27 |
Dummy MOL removal for performance enhancement
Grant 10,784,168 - Yang , et al. Sept | 2020-09-22 |
Structure and Method for Alignment Marks
App 20200286887 - Wen; Ming-Chang ; et al. | 2020-09-10 |
Lithographic technique for feature cut by line-end shrink
Grant 10,763,113 - Yen , et al. Sep | 2020-09-01 |
Method Of Controlling Reticle Masking Blade Positioning To Minimize Impact On Critical Dimension Uniformity And Device For Contr
App 20200264515 - CHO; Hung-Wen ; et al. | 2020-08-20 |
Layout modification method for exposure manufacturing process
Grant 10,720,419 - Cho , et al. | 2020-07-21 |
Methods for improved critical dimension uniformity in a semiconductor device fabrication process
Grant 10,714,357 - Hung , et al. | 2020-07-14 |
Method and apparatus for collecting information used in image-error compensation
Grant 10,712,651 - Cho , et al. | 2020-07-14 |
Monitoring System
App 20200177808 - CHEN; TUNG-YU ; et al. | 2020-06-04 |
Structure and method for alignment marks
Grant 10,665,585 - Wen , et al. | 2020-05-26 |
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning
Grant 10,642,158 - Cho , et al. | 2020-05-05 |
Device For Applying Magnetic Field To A Filter For Reducing Metallic Contaminants
App 20200129895 - MAI; Hsuan-Ying ; et al. | 2020-04-30 |
Via Rail Solution For High Power Electromigration
App 20200083182 - Sio; Kam-Tou ; et al. | 2020-03-12 |
Dummy Mol Removal For Performance Enhancement
App 20200020588 - Yang; Hui-Ting ; et al. | 2020-01-16 |
Via rail solution for high power electromigration
Grant 10,510,688 - Sio , et al. Dec | 2019-12-17 |
Lithographic Technique For Feature Cut By Line-end Shrink
App 20190378712 - YEN; Yung-Sung ; et al. | 2019-12-12 |
Layout Modification Method For Exposure Manufacturing Process
App 20190348409 - CHO; Hung-Wen ; et al. | 2019-11-14 |
Lithographic technique for feature cut by line-end shrink
Grant 10,388,523 - Yen , et al. A | 2019-08-20 |
Dual Power Structure With Connection Pins
App 20190244901 - Peng; Shih-Wei ; et al. | 2019-08-08 |
Layout modification method for exposure manufacturing process
Grant 10,366,973 - Cho , et al. July 30, 2 | 2019-07-30 |
Pattern forming method and apparatus for lithography
Grant 10,345,718 - Wang , et al. July 9, 2 | 2019-07-09 |
Lithographic technique incorporating varied pattern materials
Grant 10,312,109 - Tseng , et al. | 2019-06-04 |
Method Of Controlling Reticle Masking Blade Positioning To Minimize Impact On Critical Dimension Uniformity And Device For Contr
App 20190163046 - CHO; Hung-Wen ; et al. | 2019-05-30 |
Method And Apparatus For Collecting Information Used In Image-error Compensation
App 20190137866 - CHO; Hung-Wen ; et al. | 2019-05-09 |
Layout Modification Method For Exposure Manufacturing Process
App 20190131290 - CHO; Hung-Wen ; et al. | 2019-05-02 |
Dual power structure with connection pins
Grant 10,276,499 - Peng , et al. | 2019-04-30 |
Method for patterning interconnects
Grant 10,276,377 - Yen , et al. | 2019-04-30 |
Semiconductor Device Including Source/drain Contact Having Height Below Gate Stack
App 20190123036 - YOUNG; Charles Chew-Yuen ; et al. | 2019-04-25 |
Power Strap Structure For High Performance And Low Current Density
App 20190122987 - Chen; Chih-Liang ; et al. | 2019-04-25 |
Method of Fabricating Semiconductor Device with Reduced Trench Distortions
App 20190122895 - Yen; Yung-Sung ; et al. | 2019-04-25 |
Collector Pellicle
App 20190104604 - CHIEN; Shang-Chieh ; et al. | 2019-04-04 |
Using Cumulative Heat Amount Data To Qualify Hot Plate Used For Postexposure Baking
App 20190088471 - Chao; Chia-Cheng ; et al. | 2019-03-21 |
Apparatus and method for dispensing developer onto semiconductor substrate
Grant 10,203,606 - Chao , et al. Feb | 2019-02-12 |
Dummy Mol Removal For Performance Enhancement
App 20190043759 - Yang; Hui-Ting ; et al. | 2019-02-07 |
Semiconductor device including source/drain contact having height below gate stack
Grant 10,177,133 - Young , et al. J | 2019-01-08 |
Layout modification method and system
Grant 10,169,515 - Sio , et al. J | 2019-01-01 |
Power strap structure for high performance and low current density
Grant 10,170,422 - Chen , et al. J | 2019-01-01 |
Structure and method for overlay marks
Grant 10,163,738 - Wang , et al. Dec | 2018-12-25 |
Method of fabricating semiconductor device with reduced trench distortions
Grant 10,163,654 - Yen , et al. Dec | 2018-12-25 |
Via Rail Solution For High Power Electromigration
App 20180358309 - Sio; Kam-Tou ; et al. | 2018-12-13 |
Monitoring System
App 20180352155 - CHEN; CHUN-KUANG ; et al. | 2018-12-06 |
Lithography process and system with enhanced overlay quality
Grant 10,146,141 - Hung , et al. De | 2018-12-04 |
Pattern Forming Method And Apparatus For Lithography
App 20180335706 - WANG; Chung-Cheng ; et al. | 2018-11-22 |
Methods for Improved Critical Dimension Uniformity in a Semiconductor Device Fabrication Process
App 20180330960 - Hung; Chi-Cheng ; et al. | 2018-11-15 |
Grafting agent for forming spacer layer
Grant 10,114,291 - Cheng , et al. October 30, 2 | 2018-10-30 |
Dummy MOL removal for performance enhancement
Grant 10,096,522 - Yang , et al. October 9, 2 | 2018-10-09 |
Lithographic Technique Incorporating Varied Pattern Materials
App 20180286698 - Tseng; Chin-Yuan ; et al. | 2018-10-04 |
Lithographic Technique For Feature Cut By Line-end Shrink
App 20180277358 - YEN; Yung-Sung ; et al. | 2018-09-27 |
Methods for improved critical dimension uniformity in a semiconductor device fabrication process
Grant 10,032,639 - Hung , et al. July 24, 2 | 2018-07-24 |
Method to define multiple layer patterns using double exposures
Grant 10,007,177 - Weng , et al. June 26, 2 | 2018-06-26 |
Power Strap Structure For High Performance And Low Current Density
App 20180174967 - Chen; Chih-Liang ; et al. | 2018-06-21 |
Method of forming an interconnect structure for a semiconductor device
Grant 9,997,404 - Wu , et al. June 12, 2 | 2018-06-12 |
Lithographic technique incorporating varied pattern materials
Grant 9,991,132 - Tseng , et al. June 5, 2 | 2018-06-05 |
Lithographic technique for feature cut by line-end shrink
Grant 9,984,876 - Yen , et al. May 29, 2 | 2018-05-29 |
Power strap structure for high performance and low current density
Grant 9,911,697 - Chen , et al. March 6, 2 | 2018-03-06 |
Monitoring Apparatus And Related Method
App 20180048554 - HUANG; JI-DE ; et al. | 2018-02-15 |
Dual Power Structure With Connection Pins
App 20180019207 - Peng; Shih-Wei ; et al. | 2018-01-18 |
Methods For Improved Critical Dimension Uniformity In A Semiconductor Device Fabrication Process
App 20170345670 - Hung; Chi-Cheng ; et al. | 2017-11-30 |
Method for Patterning Interconnects
App 20170338146 - Yen; Yung-Sung ; et al. | 2017-11-23 |
Dummy Mol Removal For Performance Enhancement
App 20170323832 - Yang; Hui-Ting ; et al. | 2017-11-09 |
Modular light control device and dimming control system
Grant 9,814,111 - Huang , et al. November 7, 2 | 2017-11-07 |
Power Strap Structure For High Performance And Low Current Density
App 20170317027 - Chen; Chih-Liang ; et al. | 2017-11-02 |
Dual power structure with connection pins
Grant 9,793,211 - Peng , et al. October 17, 2 | 2017-10-17 |
Novel Grafting Agent For Forming Spacer Layer
App 20170256396 - Cheng; Ya-Ling ; et al. | 2017-09-07 |
Designed-based interconnect structure in semiconductor structure
Grant 9,754,881 - Chen , et al. September 5, 2 | 2017-09-05 |
Method of forming features with various dimensions
Grant 9,728,407 - Hsieh , et al. August 8, 2 | 2017-08-08 |
Lithographic Technique For Feature Cut By Line-end Shrink
App 20170207081 - Yen; Yung-Sung ; et al. | 2017-07-20 |
Method of Forming Features with Various Dimensions
App 20170194146 - Hsieh; Ken-Hsien ; et al. | 2017-07-06 |
Method of patterning a film layer
Grant 9,684,236 - Hsieh , et al. June 20, 2 | 2017-06-20 |
Layout Modification Method And System
App 20170140086 - SIO; KAM-TOU ; et al. | 2017-05-18 |
Via Rail Solution for High Power Electromigration
App 20170117272 - Sio; Kam-Tou ; et al. | 2017-04-27 |
Dual Power Structure with Connection Pins
App 20170110405 - Peng; Shih-Wei ; et al. | 2017-04-20 |
Lithographic technique for feature cut by line-end shrink
Grant 9,613,850 - Yen , et al. April 4, 2 | 2017-04-04 |
Structure And Method For Overlay Marks
App 20170084506 - WANG; Hsien-Cheng ; et al. | 2017-03-23 |
Method To Define Multiple Layer Patterns Using Double Exposures
App 20170052445 - Weng; Ming-Huei ; et al. | 2017-02-23 |
Driving circuit and lamps
Grant 9,560,701 - Chen , et al. January 31, 2 | 2017-01-31 |
Structure and method for overlay marks
Grant 9,543,406 - Wang , et al. January 10, 2 | 2017-01-10 |
Lamp
Grant 9,538,594 - Chen , et al. January 3, 2 | 2017-01-03 |
Multiple directed self-assembly patterning process
Grant 9,530,660 - Tseng , et al. December 27, 2 | 2016-12-27 |
Method Of Forming An Interconnect Structure For A Semiconductor Device
App 20160365276 - WU; Yung-Hsu ; et al. | 2016-12-15 |
Method Of Fabricating Semiconductor Device With Reduced Trench Distortions
App 20160358788 - Yen; Yung-Sung ; et al. | 2016-12-08 |
Multiple Directed Self-Assembly Patterning Process
App 20160336186 - Tseng; Chin-Yuan ; et al. | 2016-11-17 |
Lithographic Technique Incorporating Varied Pattern Materials
App 20160307769 - Tseng; Chin-Yuan ; et al. | 2016-10-20 |
Fin patterning methods for increased process margin
Grant 9,449,880 - Tseng , et al. September 20, 2 | 2016-09-20 |
Structure And Method For Semiconductor Device
App 20160268244 - YOUNG; Charles Chew-Yuen ; et al. | 2016-09-15 |
Fin Patterning Methods For Increased Process Margin
App 20160254191 - Tseng; Chin-Yuan ; et al. | 2016-09-01 |
Method of forming an interconnect structure for a semiconductor device
Grant 9,431,297 - Wu , et al. August 30, 2 | 2016-08-30 |
Method Of Fabricating Semiconductor Device
App 20160240430 - Yen; Yung-Sung ; et al. | 2016-08-18 |
Method of fabricating semiconductor device with reduced trench distortions
Grant 9,418,868 - Yen , et al. August 16, 2 | 2016-08-16 |
Method of fabricating semiconductor device
Grant 9,412,649 - Yen , et al. August 9, 2 | 2016-08-09 |
Method and structure for lithography processes with focus monitoring and control
Grant 9,383,657 - Wang , et al. July 5, 2 | 2016-07-05 |
Lithographic Technique for Feature Cut by Line-End Shrink
App 20160181110 - Yen; Yung-Sung ; et al. | 2016-06-23 |
Designed-based Interconnect Structure In Semiconductor Structure
App 20160172297 - CHEN; Chih-Liang ; et al. | 2016-06-16 |
Double patterning strategy for contact hole and trench in photolithography
Grant 9,323,155 - Chen , et al. April 26, 2 | 2016-04-26 |
Method Of Forming An Interconnect Structure For A Semiconductor Device
App 20160099174 - Wu; Yung-Hsu ; et al. | 2016-04-07 |
Color temperature and illumination adjusting system, and method thereof
Grant 9,307,614 - Chen , et al. April 5, 2 | 2016-04-05 |
Lens Having Through Hole And Lighting Module
App 20160069534 - Chen; Chun-Kuang | 2016-03-10 |
Designed-based interconnect structure in semiconductor structure
Grant 9,281,273 - Chen , et al. March 8, 2 | 2016-03-08 |
Lithography Process and System with Enhanced Overlay Quality
App 20160062250 - Hung; Chi-Cheng ; et al. | 2016-03-03 |
Designed-based Interconnect Structure In Semiconductor Structure
App 20160064322 - CHEN; Chih-Liang ; et al. | 2016-03-03 |
Overlay mark assistant feature
Grant 9,214,347 - Yao , et al. December 15, 2 | 2015-12-15 |
Integrated wireless and wired light control system
Grant 9,210,778 - Chen , et al. December 8, 2 | 2015-12-08 |
Wireless control system and wireless network expansion method applied thereto
Grant 9,148,751 - Chen , et al. September 29, 2 | 2015-09-29 |
Method and Structure for Lithography Processes with Focus Monitoring and Control
App 20150248068 - Wang; Jhih-Yu ; et al. | 2015-09-03 |
Light-emitting diode light tube driving circuit
Grant 9,107,255 - Chen , et al. August 11, 2 | 2015-08-11 |
Structure and Method for Alignment Marks
App 20150214225 - Wen; Ming-Chang ; et al. | 2015-07-30 |
Dimmer circuit and lighting apparatus using the same
Grant 9,055,626 - Chen , et al. June 9, 2 | 2015-06-09 |
Control method of lamp
Grant 9,055,625 - Lin , et al. June 9, 2 | 2015-06-09 |
Led Driver Circuit Capable Of Extending A Lifespan Of The Led Driver And Reducing Manufacturing Cost
App 20150102727 - CHEN; Chun-Kuang ; et al. | 2015-04-16 |
Structure and method for alignment marks
Grant 9,000,525 - Wen , et al. April 7, 2 | 2015-04-07 |
Lamps and control circuit
Grant 8,981,669 - Chen , et al. March 17, 2 | 2015-03-17 |
Light-emitting Diode Light Tube Driving Circuit
App 20150015154 - CHEN; Chun-Kuang ; et al. | 2015-01-15 |
Integrated Wireless And Wired Light Control System
App 20150008846 - CHEN; Yuan-Ching ; et al. | 2015-01-08 |
Wireless Control System And Wireless Network Expansion Method Applied Thereto
App 20150011164 - CHEN; Yuan-Ching ; et al. | 2015-01-08 |
Application Circuit And Control Method Thereof
App 20140346964 - CHEN; Chun-Kuang ; et al. | 2014-11-27 |
Lamps
Grant 8,884,527 - Lin , et al. November 11, 2 | 2014-11-11 |
Illumination control circuit and illumination control method
Grant 8,847,505 - Chen , et al. September 30, 2 | 2014-09-30 |
Double Patterning Strategy For Contact Hole And Trench In Photolithography
App 20140272714 - CHEN; CHUN-KUANG ; et al. | 2014-09-18 |
Method And System Of Detecting Flickering Frequency Of Ambient Light Source
App 20140214362 - CHEN; Yuan-Ching ; et al. | 2014-07-31 |
Dimming Circuit And Lighting Device Using The Same
App 20140191679 - Chen; Chun-Kuang ; et al. | 2014-07-10 |
Holographic reticle and patterning method
Grant 8,758,963 - Chang , et al. June 24, 2 | 2014-06-24 |
Double patterning strategy for contact hole and trench in photolithography
Grant 8,741,552 - Chen , et al. June 3, 2 | 2014-06-03 |
Illumination controlling circuit and illumination system
Grant 8,716,951 - Chen , et al. May 6, 2 | 2014-05-06 |
Illumination System
App 20140117851 - CHEN; Chun-Kuang ; et al. | 2014-05-01 |
Dimmer Circuit And Lighting Apparatus Using The Same
App 20140111105 - Chen; Chun-Kuang ; et al. | 2014-04-24 |
Lamp
App 20140103824 - Chen; Chun-Kuang ; et al. | 2014-04-17 |
Light Device
App 20140078771 - Chen; Chun-Kuang ; et al. | 2014-03-20 |
Lamp Tube
App 20140063820 - Chen; Chun-Kuang ; et al. | 2014-03-06 |
Overlay Mark Assistant Feature
App 20130330904 - Yao; Hsin-Chieh ; et al. | 2013-12-12 |
Control Method Of Lamp
App 20130307433 - Lin; Feng-Ling ; et al. | 2013-11-21 |
Device and method for providing wavelength reduction with a photomask
Grant 8,563,198 - Lin , et al. October 22, 2 | 2013-10-22 |
Color Temperature And Illumination Adjusting System, And Method Thereof
App 20130271031 - Chen; Chun-Kuang ; et al. | 2013-10-17 |
Light-emitting Device
App 20130242570 - CHEN; CHUN-KUANG ; et al. | 2013-09-19 |
Point light source and light source module using the same
Grant 8,511,853 - Chen , et al. August 20, 2 | 2013-08-20 |
Overlay mark assistant feature
Grant 8,513,821 - Yao , et al. August 20, 2 | 2013-08-20 |
Led Lighting Apparatus And Dimming Method Thereof
App 20130200814 - CHEN; CHUN-KUANG ; et al. | 2013-08-08 |
Illumination Control Circuit And Illumination Control Method
App 20130169183 - CHEN; Po-Shen ; et al. | 2013-07-04 |
Illumination Controlling Circuit And Illumination System
App 20130147354 - CHEN; Chun-Kuang ; et al. | 2013-06-13 |
Light Adjustment Device And Light System Including The Same
App 20130135333 - CHEN; Chun-Kuang ; et al. | 2013-05-30 |
Downlight
Grant D681,863 - Chen , et al. May 7, 2 | 2013-05-07 |
Lamps And Illuminating System
App 20130093334 - Lin; Feng-Ling ; et al. | 2013-04-18 |
Driving Circuit And Lamps
App 20130093349 - Chen; Chun-Kuang ; et al. | 2013-04-18 |
Lamps And Control Circuit
App 20130093344 - Chen; Chun-Kuang ; et al. | 2013-04-18 |
Lamps
App 20130093331 - Lin; Feng-Ling ; et al. | 2013-04-18 |
Holographic Reticle and Patterning Method
App 20120295185 - Chang; Shih-Ming ; et al. | 2012-11-22 |
Holographic reticle and patterning method
Grant 8,227,150 - Chang , et al. July 24, 2 | 2012-07-24 |
Structure And Method For Overlay Marks
App 20120146159 - WANG; Hsien-Cheng ; et al. | 2012-06-14 |
Reverse planarization method
Grant 8,173,548 - Hung , et al. May 8, 2 | 2012-05-08 |
Point Light Source And Light Source Module Using The Same
App 20120044679 - CHEN; Chun-Kuang ; et al. | 2012-02-23 |
Reverse Planarization Method
App 20110294286 - Hung; Chi-Cheng ; et al. | 2011-12-01 |
Structure and Method for Alignment Marks
App 20110284966 - Wen; Ming-Chang ; et al. | 2011-11-24 |
Overlay Mark Assistant Feature
App 20110285036 - Yao; Hsin-Chieh ; et al. | 2011-11-24 |
Device And Method For Providing Wavelength Reduction With A Photomask
App 20110244378 - Lin; Burn Jeng ; et al. | 2011-10-06 |
System for improving critical dimension uniformity
Grant 8,027,529 - Yu , et al. September 27, 2 | 2011-09-27 |
Method And Apparatus For Enhanced Dipole Lithography
App 20110212403 - Kuo; Ming-Jhih ; et al. | 2011-09-01 |
Methods To Achieve 22 Nanometer And Beyond With Single Exposure
App 20110193202 - Yu; Vincent ; et al. | 2011-08-11 |
Double patterning strategy for contact hole and trench
Grant 7,935,477 - Hsu , et al. May 3, 2 | 2011-05-03 |
Seal ring arrangements for immersion lithography systems
Grant 7,924,401 - Lin , et al. April 12, 2 | 2011-04-12 |
Double Patterning Strategy For Forming Fine Patterns In Photolithography
App 20110059407 - LIN; Li-Te S. ; et al. | 2011-03-10 |
Double Patterning Strategy For Contact Hole And Trench In Photolithography
App 20100310995 - Chen; Chun-Kuang ; et al. | 2010-12-09 |
Holographic Reticle and Patterning Method
App 20100297538 - Chang; Shih-Ming ; et al. | 2010-11-25 |
System For Improving Critical Dimension Uniformity
App 20100201961 - Yu; Shinn-Sheng ; et al. | 2010-08-12 |
Method and system for improving critical dimension uniformity
Grant 7,732,109 - Yu , et al. June 8, 2 | 2010-06-08 |
Hood for immersion lithography
Grant 7,675,604 - Chen , et al. March 9, 2 | 2010-03-09 |
Multi-focus scanning with a tilted mask or wafer
Grant 7,667,821 - Lin , et al. February 23, 2 | 2010-02-23 |
Exposure scan and step direction optimization
Grant 7,666,576 - Liang , et al. February 23, 2 | 2010-02-23 |
Seal Ring Arrangements for Immersion Lithography Systems
App 20090180087 - Lin; Burn Jeng ; et al. | 2009-07-16 |
Double Patterning Strategy For Contact Hole And Trench
App 20090142701 - Hsu; Feng-Cheng ; et al. | 2009-06-04 |
Seal ring arrangements for immersion lithography systems
Grant 7,517,639 - Lin , et al. April 14, 2 | 2009-04-14 |
Method And System For Improving Critical Dimension Uniformity
App 20080248403 - Yu; Shinn-Sheng ; et al. | 2008-10-09 |
Immersion Lithography Defect Reduction With Top Coater Removal
App 20080020324 - SHIU; Lin-Hung ; et al. | 2008-01-24 |
Exposure Scan And Step Direction Optimization
App 20070285639 - LIANG; Fu-Jye ; et al. | 2007-12-13 |
Hood For Immersion Lithography
App 20070258060 - CHEN; Li-Jui ; et al. | 2007-11-08 |
System and method for photolithography in semiconductor manufacturing
App 20070092840 - Chen; Kuei Shun ; et al. | 2007-04-26 |
Lithography process to reduce interference
App 20070087291 - Gau; Tsai-Sheng ; et al. | 2007-04-19 |
Immersion optical projection system
Grant 7,180,572 - Shih , et al. February 20, 2 | 2007-02-20 |
Seal ring arrangements for immersion lithography systems
App 20070008508 - Lin; Burn Jeng ; et al. | 2007-01-11 |
Apparatus and method for immersion lithography
Grant 7,091,502 - Gau , et al. August 15, 2 | 2006-08-15 |
Photomask with wavelength reduction material and pellicle
App 20060083997 - Lin; Burn Jeng ; et al. | 2006-04-20 |
Immersion optical projection system
App 20050286030 - Shih, Jen-Chieh ; et al. | 2005-12-29 |
Multi-focus scanning with a tilted mask or wafer
App 20050270508 - Lin, Burn-J. ; et al. | 2005-12-08 |
Method of defining forbidden pitches for a lithography exposure tool
Grant 6,973,636 - Shin , et al. December 6, 2 | 2005-12-06 |
Apparatus and method for immersion lithography
App 20050253090 - Gau, Tsai Sheng ; et al. | 2005-11-17 |
Alert system and method for geographic or natural disasters utilizing a telecommunications network
Grant 6,914,525 - Rao , et al. July 5, 2 | 2005-07-05 |
Device and method for providing wavelength reduction with a photomask
App 20050100798 - Lin, Burn Jeng ; et al. | 2005-05-12 |
Method of defining forbidden pitches for a lithography exposure tool
App 20050086629 - Shin, Jaw-Jung ; et al. | 2005-04-21 |
Alert system and method for geographic or natural disasters utilizing a telecommunications network
App 20040075552 - Rao, Herman ; et al. | 2004-04-22 |
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