| Patent | Date |
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Semiconductor devices with gate electrodes and with monocrystalline silicon regions that contain atoms of nitrogen and one or more of chlorine, bromine, sulfur, fluorine, or phosphorus
Grant 8,283,733 - Dong , et al. October 9, 2 | 2012-10-09 |
Method of Improving Minority Lifetime in Silicon Channel and Products Thereof
App 20110095344 - Dong; Zhong ; et al. | 2011-04-28 |
Method of forming ONO-type sidewall with reduced bird's beak
Grant 7,910,429 - Dong , et al. March 22, 2 | 2011-03-22 |
Method of repairing deep subsurface defects in a silicon substrate that includes diffusing negatively charged ions into the substrate from a sacrificial oxide layer
Grant 7,851,339 - Dong , et al. December 14, 2 | 2010-12-14 |
Fabrication of integrated circuits with isolation trenches
Grant 7,807,577 - Dong , et al. October 5, 2 | 2010-10-05 |
Photolithographic Patterning Of Arrays Of Pillars Having Widths And Lengths Below The Exposure Wavelengths
App 20100068658 - Zhang; Fenghong ; et al. | 2010-03-18 |
Use Of Different Pairs Of Overlay Layers To Check An Overlay Measurement Recipe
App 20100063764 - Lou; Limin ; et al. | 2010-03-11 |
Fabrication Of Integrated Circuits With Isolation Trenches
App 20100047994 - Dong; Zhong ; et al. | 2010-02-25 |
Method of Improving Minority Lifetime in Silicon Channel and Products Thereof
App 20090294806 - DONG; Zhong ; et al. | 2009-12-03 |
Nonvolatile Memories Which Combine A Dielectric, Charge-trapping Layer With A Floating Gate
App 20090096009 - Dong; Zhong ; et al. | 2009-04-16 |
Nonvolatile Memories With Charge Trapping Layers Containing Silicon Nitride With Germanium Or Phosphorus
App 20090032861 - Dong; Zhong ; et al. | 2009-02-05 |
Reducing nitrogen concentration with in-situ steam generation
Grant 7,387,972 - Dong , et al. June 17, 2 | 2008-06-17 |
Reducing Nitrogen Concentration With In-situ Steam Generation
App 20080132086 - Dong; Zhong ; et al. | 2008-06-05 |
Method for simultaneously fabricating ONO-type memory cell, and gate dielectrics for associated high voltage write transistors and gate dielectrics for low voltage logic transistors by using ISSG
Grant 7,297,597 - Dong , et al. November 20, 2 | 2007-11-20 |
Reducing nitrogen concentration with in-situ steam generation
App 20070207627 - Dong; Zhong ; et al. | 2007-09-06 |
Reducing Nitrogen Concentration With In-situ Steam Generation
App 20070205446 - Dong; Zhong ; et al. | 2007-09-06 |
Atomic layer deposition of interpoly oxides in a non-volatile memory device
Grant 7,122,415 - Jang , et al. October 17, 2 | 2006-10-17 |
Floating gate nitridation
Grant 7,001,810 - Dong , et al. February 21, 2 | 2006-02-21 |
Method for simultaneously fabricating ONO-type memory cell, and gate dielectrics for associated high voltage write transistors and gate dielectrics for low voltage logic transistors by using ISSG
App 20060017092 - Dong; Zhong ; et al. | 2006-01-26 |
Atomic layer deposition of interpoly oxides in a non-volatile memory device
App 20060008997 - Jang; Chuck ; et al. | 2006-01-12 |
Method of forming ONO-type sidewall with reduced bird's beak
App 20050227437 - Dong, Zhong ; et al. | 2005-10-13 |
Nonvolatile Memory With Pedestals
App 20040191986 - Chung, Mei-Hua ; et al. | 2004-09-30 |
Floating gate nitridation
App 20040185647 - Dong, Zhong ; et al. | 2004-09-23 |
Nonvolatile memory with pedestals
Grant 6,787,415 - Chung , et al. September 7, 2 | 2004-09-07 |
Atomic layer deposition of interpoly oxides in a non-volatile memory device
App 20040051134 - Jang, Chuch ; et al. | 2004-03-18 |
Floating gate nitridation
App 20030153149 - Dong, Zhong ; et al. | 2003-08-14 |
Floating gate nitridation
App 20030153150 - Dong, Zhong ; et al. | 2003-08-14 |
Clean chemistry low-k organic polymer etch
Grant 6,337,277 - Chou , et al. January 8, 2 | 2002-01-08 |
Metal and metal silicide nitridization in a high density, low pressure plasma reactor
App 20010002326 - Yang, Yun-Yen Jack ; et al. | 2001-05-31 |
Gas dispersion window for plasma apparatus and method of use thereof
Grant 5,824,605 - Chen , et al. October 20, 1 | 1998-10-20 |
Dynamic feedback electrostatic wafer chuck
Grant 5,812,361 - Jones , et al. September 22, 1 | 1998-09-22 |
Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window
Grant 5,368,710 - Chen , et al. November 29, 1 | 1994-11-29 |
Plasma cleaning method for removing residues in a plasma treatment chamber
Grant 5,356,478 - Chen , et al. October 18, 1 | 1994-10-18 |
Window for microwave plasma processing device
Grant 5,234,526 - Chen , et al. August 10, 1 | 1993-08-10 |
Plasma apparatus including dielectric window for inducing a uniform electric field in a plasma chamber
Grant 5,226,967 - Chen , et al. July 13, 1 | 1993-07-13 |
Method of producing flat ECR layer in microwave plasma device and apparatus therefor
Grant 5,198,725 - Chen , et al. March 30, 1 | 1993-03-30 |
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